LX

T-slot A dimension T-slotBdimension Work piece mounting reference plane 6.5 27.5 T-slot B Cross Section C-C (mm) D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model Refer to page 301 for mounting.

Battery-less

Model (L) B D E F G J K LES25DEm-30mm-m 214 48 4 133.5 81 4 19 121.5 LES25DEm-30Bmm-m 254.5 LES25DEm-50mm-m 240 42 6 159.5 87 4 39 147.5 LES25DEm-50Bmm-m 280.5 LES25DEm-75mm-m 274 55 6 193.5 96 4 64 181.5 LES25DEm-75Bmm-m 314.5 LES25DEm-100mm-m 347 50 8 266.5 144 4 89 254.5 LES25DEm-100Bmm-m 387.5 LES25DEm-125mm-m 372 55 8 291.5 144 6 57 279.5 LES25DEm-125Bmm-m 412.5 LES25DEm-150mm-m 397

2/3 Port Valve

Refer to p.4.1-54, 4.1-55 for specifications and models.

Table of Contents

Pin description 1 DC (+) 2 Analog output Accumulated pulse output wiring examples 3 DC () 4 OUT1 4-I thread with depth J 40 Max. 30V 80 mA or less OUT1 Black Load H 0V Blue 50 msec PF2A7H--28 29(-M) A B C D E F G H I J Model Brown PF2A703H PF2A706H PF2A712H 55 160 40 92 67 55 Rc 1, NPT 1, G 1 36 M5 x 0.8 8 OUT1 80 mA Load Black 65 180 45 104 79 65 Rc 11/2, NPT 11/2, G 11/2 Rc 2, NPT 2, G

CLS

125 + 55 135 + 55 150 + 55 n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 CL 2 (Different sides, Same side), 1 155 170 35 145 CL1 D-F5NTL (n 4) 2 (n 4) 2 (n 2) 2 (n 4) 2 155 + 55 170 + 55 35 + 55 145 + 55 MLGC n (Same side) n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 2, 4, 6, 8 n = 4, 8, 12, 16 Different sides Same side Different sides Same side CNG 110 150 2 35 110 150

Floating Joint

55 50 59.5 66 79 96 96 42 48 54 60 74 74 36 44 48 48 86 107 102 125 144 151 25 32 70 80 90 90 47 58 69 79 89 89 2 2 4 4 4 4 14 16 18 18 22 22 16 20 20 22 24 28 32 41 41 46 55 70 53 65 56 67.5 78 78 1.09 2.03 4.1 6.4 10 10.5 1.5 1.5 1.5 1.5 1.5 1.5 98.5 123 155 187 213 220 18 24 24 38 42 49 9000 14000 22000 36000 55000 55000 1.25 2 2 2.5 3 3 DSemi-standard: Heavy Load Type Hydraulic: Up

Fluoropolymer Piping Equipment

3/8" 3/4" 1/2" 20 29 24 17 26 21 44 54 49 23 39 28 5.8 LQ1T5A-R32 1/4" 3/4" 1/4" 39.5 20 36 17 46.5 55 46.5 49 23 3.6 LQ1T6A-R2 1" 1/2" 1" 8 39.5 24 20 20 29 14 28 TD TID 7 TH TIH 9 LQ1T6A-R3 1" 3/8" 1" 5.8 LQ1T6A-R4 1" 1/4" 1" 20 17 55 47.5 55 23 3.6 LQ1T6A-R5 3/4" 1" 1" 8 39.5 18 36 36 69.5 69.5 69.5 49 15 LQ1T6A-R6 1/2" 1" 1" 24 21 54.5 28 9 LQ1T6A-R7 3/4" 3/4" 1" 39.5 36 69.5

MXQ

Z ZZ (NN 1) x H G B H A 32 11.5 32 11.5 6.6 6.6 12 12 11 11 35 1.5 7 B A NN-M8 x 1.25 thread depth 16 6H9 depth 6 +0.030 0 HA GA 6H9 depth 6 +0.030 0 Section AA Section BB (mm) Model F 55 46 55 65 75 60 48 60 65 N 4 4 4 4 4 6 8 8 8 G 23 23 23 23 32 44 31 56 H 55 55 55 65 80 44 66 66 NN 2 2 2 2 2 3 4 4 4 GA 23 23 23 23 32 72 88 97 122 HA 55 55 55 65 80 65 88 132 132 I 16 16 16 16 16 31

Electric Actuator/Slider Type

20 to 55 74 16 60 to 185 107 190 to 300 144 WC + Stroke [mm] LEYG M, LEYG L Common Size Stroke range (mm) A B C DA EA EB EH EV FA FB FC G GA H J K M NA NB NC 15 to 35 141.5 116 50 20 46 85 103 52.3 11 14.5 12.5 5.4 40.3 98.8 30.8 29 34 M5 x 0.8 8 6.5 40 to 100 67.5 105 to 120 166.5 141 125 to 200 84.5 205 to 300 102 25 20 to 35 160.5 130 55 25 60 101 123 63.8 12 18.5 16.5 5.4 50.3 125.3

CS1

Refer to p1.10-8 for auto switch min. mountable stroke. 55 160 342.5 105 0.17 Stroke 358.5 176 55 175 115 372.5 0.17 Stroke 387.5 190 In case of rod boot style, min. stroke is 30mm or more. The drawing shows with an auto switch. Eliminate the unnecessary parts.

LJ1H

Housing 23.5 24.6 105 118 29 24.6 B Thread size M3 x 0.5 6 4 45 M4 x 0.7 8 2 46 Effective thread length (mm) Quantity P.C.D. 55 55 A A Motor mounting area 1 For the motor mounting area dimensions of the models below, refer to the long stroke type dimensions. B Section BB Section BB Long stroke type1 Coupling Motor P.C.D.

MXS Series Air Slide Table

Model F 50 50 50 60 35 60 70 75 80 FF 40 40 40 50 35 60 70 75 80 GA 22 22 22 22 55 61 102 154 190 KA NA 2 2 2 2 2 2 4 4 4 M 92 92 92 102 115 156 197 255 295 HA 45 45 45 55 35 70 70 76 80 ZZ 108 108 108 118 131 172 213 271 311 N 4 4 4 4 6 6 6 8 8 G 22 22 22 22 20 26 32 40 30 H 45 45 45 55 35 35 35 38 40 NN 2 2 2 2 3 4 5 6 7 I 12 12 12 12 12 33 50 67 82 J 47 47 47 57 70 90 114 155 180 K 35

Table of Contents

Individual spacer R1 13-2-55 55 Series ZX Vacuum Pump System Manifold Common EXH Common air supply for vacuum valve Common vacuum supply End plate Manifold base 4-5.5 mounting hole Adjustment needle Adsorption confirmation switch ZSP1 Manual override (Push and turn the locking type override.)

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Z ZZ G (NN 1) x H H 32 11.5 32 11.5 A B 6.6 6.6 11 12 12 35 1.5 A B NN x M8 x 1.25 thread depth 16 7 HA GA 6H9 ( ) depth 6 +0.030 0 6H9 ( ) depth 6 +0.030 0 B-B A-A (mm) Model F 55 46 55 65 75 60 48 60 65 N 4 4 4 4 4 6 8 8 8 G 23 23 23 23 32 44 31 56 H 55 55 55 65 80 44 66 66 NN 2 2 2 2 2 3 4 4 4 GA 23 23 23 23 32 72 88 97 122 HA 55 55 55 65 80 65 88 132 132 I 16 16 16 16 16 31 20 18

JA/JAH/JB/JS

-12-150 JAF40-12-175 JAF50-16-150 JAF63-16-200 JAF80-20-250 JAF100-24-300 JAF100-27-150 JAF125-27-200 JAF160-33-200 13 17 17 22 22 22 27 27 32 41 41 41 55 7 8 8 11 11 11 13.5 13.5 16 20 20 20 24 6.6 6.6 6.6 9 9 9 9 9 11 11 11 18 22 6 6 6 9 9 9 12 12 16 19 19 21 29 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 36 40 40 52 52 52 45 45 55 65 65 72 100 48 52 52 70 70 70 19 25 25 32 32 32 65 65 75

CQM

30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 40 45 50 55 60 65 70 75 80 85 110 135 45 50 55 60 65 70 75 80 85 90 115 140 55 60 65 70 75 80 85 90 95 120 145 M3 x 30 x 35 x 40 x 45 x 50 x 55 M3 x 30 x 35 x 40 x 45 x 50 x 55 M5 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 M5 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 M5 x 40 x 45 x 50 x 55 x 60 x

JA/JAH/JB/JS

-12-150 JAF40-12-175 JAF50-16-150 JAF63-16-200 JAF80-20-250 JAF100-24-300 JAF100-27-150 JAF125-27-200 JAF160-33-200 13 17 17 22 22 22 27 27 32 41 41 41 55 7 8 8 11 11 11 13.5 13.5 16 20 20 20 24 6.6 6.6 6.6 9 9 9 9 9 11 11 11 18 22 6 6 6 9 9 9 12 12 16 19 19 21 29 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 36 40 40 52 52 52 45 45 55 65 65 72 100 48 52 52 70 70 70 19 25 25 32 32 32 65 65 75

2–4

70 75 80 85 90 115 140 55 60 65 70 75 80 85 90 95 120 145 M3 x 30 x 35 x 40 x 45 x 50 x 55 M3 x 30 x 35 x 40 x 45 x 50 x 55 M5 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 M5 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 M5 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 110 x 135 M5 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 90 x 115 x 140 M6 x 55 x 60 x 65 x 70 x 75 x

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

110 + 55 120 + 55 10 + 55 100 + 55 "n" pcs.

CHKD/CHKG

(mm) Rod end male threads Water resistant type (mm) a b c e f g h Bore size (mm) B C N S g h A Bore size (mm) 20 20 12.5 15 M10 x 1.25 6 10 23 66 61 43 18 26.5 6 33 76 25 25 15.5 18 M12 x 1.25 6 12 26 71 63 45 18 30 6 36 81 32 32 22 25 M16 x 1.5 7 14 35 86 71 51 20 38 7 45 96 40 40 27 30 M20 x 1.5 7 19 40 95 75 55 20 45 7 50 105 50 50 32 35 M24 x 1.5 8 24 46 106 81 60 21 55 7 56 116 63 63