Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

thread depth 3.5 3.8 7 Bottom view of MXQ8-30 132214.6 K 3.8 7 27 23 6 4 23 Z ZZ G (NN 1) x H H 12.5 12.5 5.7 5.7 A B 3.2 3.2 6.5 7 7 14 1 3H9 ( ) depth 3 +0.025 0 A B 4 3H9 ( ) depth 3 +0.025 0 NN x M4 x 0.7 thread depth 8 HA GA A-A B-B (mm) Model F 25 25 26 32 46 50 N 4 4 6 6 6 6 G 7 14 8 8 31 H 25 28 31 29 30 NN 2 2 3 3 4 4 GA 13 14 29 39 37 61 HA 19 28 27 31 58 60 I 11 10 12 14 13

Modular F.R.L. Units

EXH Flow Rate Characteristics Model Port size Flow rate characteristics Model Standard specifications P1 P2 A B C D E F G H I VHS20 1/8, 1/4 1/8 66.4 22.3 40 37.5 14 46.6 33.6 28 43 VHS30 1/4, 3/8 1/4 80.3 29.4 53 49 19 52 38 30 49 VHS40 1/4, 3/8, 1/2 3/8 104.9 38.5 70 63 22 58 44 36 63 VHS40-06 3/4 1/2 110.4 42 75 63 22 58 44 44 63 VHS50 3/4, 1 1/2 134.3 53 90 76 26 76 61 53 81 IN, OUT EXH

ZP

H F Model A B C D2 E F G H Vacuum inlet direction q Pad dia.

CY1

40 50 1 0 1 2 3 4 5 6 10 7 8 9 10 11 0 1 2 3 4 5 6 7 8 9 10 1112 13 14 15 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY1R20 CY1R63 200 H 1000 100 Allowable driving force Fn (N) Allowable driving force Fn (N) 500 H 400 50 30 L 300 200 L 100 10 5 Useable range 20 30 40 50 Useable range 1 0 1 2 3 4 5 6 10 7 8 9 10 11 12 13 0 1 2 3 4 5 6 7 8 9 10 1112

ZPT/ZPX

42 ZF (mm) B 42 50 ZPT50H-A14 52 Model A 40 ZPT40H-A14 ZP 50 ZPT50H-B8 52 M8 x 1.25 50 ZPT50H-B10 52 M10 x 1.5 ZCU AMJ 63 80 ZPT H-B (Female thread) 63 80 ZPT 6380H-A16 (Male thread) Misc.

CQS

NPN) 5V A96V A96 IC 3 wire (NPN) F9NV F9N 3 wire (PNP) F9PV F9P Mounting Bracket Part No.

7

VXS 8A 1/2 10 10A 1/4 VXB 15A Stainless steel A N.O. 3/8 B Grommet 100 VAC With surge voltage suppressor 1/2 VXE C 110 VAC G H J K 3/8 D 200 VAC 4 10A C37 N.C. VXP 1/2 E 230 VAC 15 15A 3/8 Stainless steel B N.O. F VXR 24 VDC 1/2 G DIN terminal 24 VDC L M 5 20A C37 N.C. VXH With surge voltage suppressor 3/4 20 H 100 VAC C N.O. Stainless steel J 110 VAC VXF 6 25A N.C.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

CBAIB63SCBA13, #2 CBAIB80SCBA14, #2 CBAIB100SCBA15, #2 f ZZ Bore (mm) e Stroke range (mm) h l 40 50 63 80 100 1/4 stroke 154 43 59 20 to 500 11.2 1/4 stroke 167 52 66 20 to 600 11.2 1/4 stroke 178 52 66 20 to 600 11.2 1/4 stroke 213 65 80 20 to 750 12.5 1/4 stroke 224 65 81 20 to 750 14 3.4-16 End Lock Cylinder Series CBA1 Dimensions: With Mounting Bracket -H -R -W N L Axial foot: CBA1L Bore

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

[ ] for AC Other dimensions are the same as the grommet style. 1.2-57 Series SYJ7000 3 Position Closed Center/Exhaust Center/Pressure Center 3 4 5 G H 3 4 5 G H C6 C8 Built-in One-touch fitting: SYJ7 20-l -ll Grommet (G), (H): SYJ7 20-l ll-01 2-3.2 (Mounting holes for manifold) A B 35 17 2-One-touch fitting (A, B port) Applicable tube C6: T0604 C8: T0806 17 36 (4.9) A B 13 3 46.6 33.6

10

Cushion valve G 2 x Rc P W V Port G E Width across flats KA TX D E B C H1 AL MM MB MA N 2 x 4 x J N TY B C Width across flats B1 A H K F TT ZZ + Stroke S + Stroke With rod boot d e 10.2 10.2 f h l [mm] Bore size [mm] A AL B B1 C D E F G H H1 J K KA MA MB MM N P S TT TX TY V W ZZ 32 22 19.5 46 17 32.5 12 30 13 13 47 6 M6 x 1 6 10 16 4 M10 x 1.25 27 1/8 84 17 48 49 4 6.5 135 40 30 27 52 22

2 Phase Stepper Motor/Without Motor Brake Series LXS

3 0.5 3 3 3 N.O.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

(Port size 1/8 type) (Port size 1/4, 3/8 type) Flow Rate Characteristics JSX Series Body Material Stainless Steel Body Material Stainless Steel A A 2 x J 2 x J Table of UL-compliant Products JSXD Series JSXZ Series JSXM Series Option Replacement Parts B B 1/4, 3/8 1/8 C C F F D E D 31.3 E H G 2 x M5 x 3 [mm] Size Port size A B C D E F G H J 20 1/8 13 46 7 40 56 1.5 5.3 20, 30 1/4, 3/8

Table of Contents

Refer to page 3-8-52 for details.

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

Output Black lead wire 50 MSM5AZP1A Mitsubishi Electric Corporation HC-PQ053 50 SGME-A5BF12 Yaskawa Electric Corporation Blue lead wire SGME-A5AF12 50 H S For motor mounting dimensions, refer to the dimensions for series LJ1 10 on page 143 as a reference for mounting and design. Refer to pages starting with 205 for driver dimensions, etc.

MB

C0.5 file chamfer AL B MM R sphere TP R sphere DC 30 H W1 T H H H Symbol: A12 Symbol: A13 Symbol: A14 Symbol: A15 30 C 30 DA DA C0.5 R sphere DA DA C AL MM 30 A H T W1 A H C A H H Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 MM 30 MM 30 DA MM 30 AL MM 30 H A H A A C H A H Symbol: A20 Symbol: A21 Symbol: A22 Symbol: A23 DA 30 30 DA L RD 30 MM 30 MM MM DB DB T T C B A H A A A L K H W H H

MQQ

E F A B H Applicable bore (mm) Applicable bore (mm) Part no.

MQQ

3 w q e RE A B REC CX CY !5 !0 !1 !2 u y i o MQQ M RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

MQQ

Metal Seal Accessory Dimensions Rod end nut Mounting nut d d C C B H B H Material: Carbon steel Material: Carbon steel Applicable bore size (mm) Part no.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

C1 = C D1 = (mm) L2 max Y D2 Size (mm) 10 D1 X L1 max Y 1 3 Size 2 to 8 C1 L1 = 10 15 3 Y 1.5 2 to 14 X 1 3 to 4 3 to 9 Y = C2 L2 = 15 20 3 to 4 Y 1.5 3 to 18 X 1.5 3 to 5 3 to 10 X = D2 = 20 30 3 to 5 Y 2 3 to 20 X 1.5 3 to 6 3 to 13 C2 = C 30 40 3 to 6 Y 4.5 3 to 22 X 2 3 to 8 6 to 15 Symbol: A7 The long shaft can be further shortened by machining it into a stepped round shaft with male

ZR

(Refer to page 13-3-37.)