KJ

Red 1 4 1 8 3 16 3 8 1 2 07 1 4 1 4 3 8 Nil VMG 09 5 16 11 3 8 1 2 13 1 2 Same dia. rod Same dia. tubing 1 8 tubing tubing 5 32 tubing 3 16 tubing 1 4 tubing 5 16 tubing 3 8 tubing 1 2 Model Male connector Straight Different dia. straight H Hexagon socket head male connector S F Female union Male elbow Elbow Plug-in elbow Reducer elbow 45 male elbow L K V VS VF LF VD VT Z ZD ZT W Universal

2/3 Port Valve

22 2, 23 2 1 2 3 2 3 4 2 3 4 2 3 4 2 3 4 1 2 3 Option (Bracket) Grommet: G Conduit: C Min. pitch for bracket is H mm.

Aluminum High Vacuum Angle Valve

Note 2) Types with auto switches are not available in case of high temperature types. r o 2-1 8-1 8-2 XLA 2-1 8-1 Note) Values at normal temperature, excluding gas permeation. r o 8-2 XL XL XLQ Maintenance Parts XM XY w Bonnet Assembly Part No. i Bypass Valve Part No.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

(Value in the initial state) Base mounted Solenoid specifications JIS Symbol Grommet (G), (H) L plug connector (L) M plug connector (M) DIN terminal (D) M8 connector (W) Base mounted Body ported 2 position single solenoid 2 position single (A) 4 (B) 2 (A) 4 (B) 2 Electrical entry G, H, L, M, W D 1 (P) 5 (R1) 3 (R2) 1 (P) 3 (R2) 5 (R1) 24, 12, 6, 5, 3 24, 12 DC AC 50/60Hz Coil rated voltage

New

Grommet (with surge voltage suppressor) Grommet W W U U X X U1 U1 X1 X1 z300 Q F D D z300 Q F 2 x 3.4 Mounting hole 2 x 3.4 Mounting hole R C C R E 1.2 1.2 1.2 1.2 E B1 B1 2 x P Port size 2 x P Port size B B DIN terminal Conduit terminal Y Y W W U U X X U1 U1 X1 X1 Cable 6 to 12 F Q 2 x 3.4 Mounting hole 2 x 3.4 Mounting hole D D S G1/2 Qp2 F 34 (44) 31.5 25 T C R R G1/2 E E Sp2 B1 2 x P

LEH_C

2) SETON 3) 1.() INP ON, 3) 2 (8mm3mm) 5 - AREA 1 8 INP 100 8 () AREA 3 INP 100 3 () AREA 0.9 INP 1() 0.99. 99 OUT* 2) 1) ON OFF 2) DRIVEON OUT* DRIVEOFF IN* OUT*OUT*OFF OUT(LEC ) 5.4 (LEC ) (LEC ) () ID 1 164 1) IO 1: 64 1 S 0 (+) 1000.00 (-) -1000.00 /: 2,000 Max.2000 0.50 1.00LEHZ(J),LEHF 0.00 LEHS 2) 100 40100 1:+ 1:+2: SW 2: /12 6 - W 1 0.00 W 2 0.00 0.00 1

3

A B W A B W A B W 4.5 (2) 12 16 19 21 17 19 12 12 4 12 4 4 6 4 12 8 8 0 4.5 (2) 16 12 4 12 4 4 6 4 12 8 8 0 Note 1) ( ): D-A96, A9V Note 2) When setting an auto switch, confirm the operation and adjust its mounting position.

Air Cylinder CLA Series Fine Lock Model

M14X1.5 M 1 8 X 1 . 5 [418X1.5 M22X1.5 1,I26X1.5 7 t 2 O 27 n 20 45 153 a 22 85 tiz 1 1 7 162 209 43 1 . 2 59 170 t. 16 30 46 1 0 50 168 0 22 95 74 127 58 1 8 1 232 52 '|.2 66 189 3l 48.5 60 142 0 rE ;ij;5 28 1 0 90 144 58 1 9 1 244 52 1 . 2 66 199 37 55 1 5 23 70 204 0 34 140 1 0 192 71 ?

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A @0 @1 !9 #2 !0 #1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A Ball bushing bearing #5 @5 #0 @6 @8 !7 !3 #8 !2 @1 !

Air Pilot Operated Series NVSA

PC 0roGl 1 1 8 Typ "N" w/Operator & (4) Screws \2:) Alum. O.C. PC 0101.1 1 1 C Typ "8" Wo OpeEtor w/{4) Screws Alum. D.C.PC 0110,1t 1 1 D Type "A" W/opelator & (4) Scrws Alum. D.C. P C 0 1 1 1 . r l O.Flnq ' Op6ralol Buna N 13 Recessd Non.Locking Operator PB 0103 1 4 Screws .

MHF2

0 @2 @1 !1 w u !7 @0 !2 !5 o !8 y !9 !4 r t e !6 Parts list Parts list Note Material No. Description No.

15

QW PW GP W 2 x P (Piping port) 2 x UU (Bumper bolt) HP HA HG 2 x For holding switch rail GA G A L A G R GA 5.3 (6.9) 2 x 2 x Counterbore diameter B 14 Square nut 2 x 2 x Counterbore depth C K 18.5 Q + Stroke GB (NA) GB 2 x NN (Adjustment bolt) (NF) (NC) (NB) (NC) (NE) 2 x Shock absorber Amount of stroke adjustment Y2 Y1 Adjustment bolt Shock absorber Bumper bolt CY3B CY3R R1 R1 With shock

Compact Hydraulic Cylinder

2 !1 u !4 t w e !5 Rod end male thread CHQB32 to CHQB100 r o !0 y q !2 !1 !4 u t !3 e w !5 Rod end male thread Description Material Note Parts List Replacement Parts: Seal Kit No. Bore size (mm) Seal kit no.

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

C 2-M5 x 0.8 2 x 4-OB 2 x 4-OA effective depth RA Y Q F Depth of counterbore RB I 4-N through 4-N through M0.2 D E K B + Stroke L M0.2 A + Stroke E 25, 30, 40 H effective thread depth C 2 x 4-OA effective depth RA 2-Rc1/8 (NPT1/8, G1/8) 2 x 4-OB Y Q F Depth of counterbore RB E J I M0.2 D W K B + Stroke L A + Stroke M0.2 E (mm) Bore size (mm) Stroke range (mm) Note) F A H B C D E OA I J K

Cylinder with Lock Series MNB

9i @2 q r y#0 $0 $2 w $3 #8 @9 A C B Section A !2 !2 #4 @6 #9 @8 $4 #2 #1 #6 #7 $6 !0 u @5 !6 @1 !1 $7 o $8 e $1 !2 Section B Section C 100 80 63 50 40 32 80, 100 80, 100 Description Material Note Parts list Description Material Note Parts list No. No.

CM2

2 !3 !4 !5 !6 !

SFOD-OMT0005CN

Para protect 12 1+(++) 2(+) Enable SW Enable SW 12 SW 1 2 Unit name Unit name () W-AREA1 W-AREA1 (-) (+) WAREA ON (mm) W 1W 2 WAREA ON *W 1W 2 PARA W 1=W 2=0 WAREA OFF) W-AREA2 W-AREA2 (-) (+) ORG Correct Link Offset () Sensor type Sensor type () Option 1 Option 1 () Undefine No. 11 Undefine No. 11 () Undefine No. 12 Undefine No. 12 () *1 -45- 10.3 () ORIG

ZP

Adapter connection thread Symbol Thread dia. 1 A8 Symbol Pad dia. 1 02 to 08 2 A10 B5 2 10 to 16 3 A14 3 20 to 32 B8 4 40, 50 T 2 ZP B5 [q Adaptor] S ZP 06 B5 R [w Type R adaptor] Buffer connection thread B5 Symbol S Pad dia. 02 to 16 Pad dia.

Single Axis Electric Actuator Series LJ1H

Nil W Axial Right Left Top Bottom F R L T B Cable length Motor specification 2m 3m 4m 5m 2 3 4 5 Motor output Standard motor Matsushita Electric Industrial Co., Ltd.

VXP21/22/23

40 (67) TI/ TIL Conduit terminal: T PA 92 2 PAX PB (2.3) 98 104 (7.5) (5.5) 25 52 55 (33) 36 G 1/2 (27) 30 (27) 30 11 14 IN OUT Bracket 50 (52) (67) 24 26 (28) 2-Rc 1/4, 3/8, 1/2 22 28 40 59 2 : Port size Rc 1/2 17-3-49 8 The VX series will be revised shortly.