Series VQ Metal Seal/Rubber Seal Body Ported

Specifications Positive COM AXT661-14A-F Single (2 wire) VQ4 Negative COM AXT661-14AN-F Positive COM AXT661-13A-F VQZ Double (latching) (3 wire) Negative COM AXT661-13AN-F VQD Note) Lead wire length: 300mm Note) The parts numbers above are applicable to VQ0/1000 (2 to 16 stations) and 13 14 VQ2000 (2 to 10 stations). VQ2000 (11 to 16 stations) uses AXT661 A (N)F425. VZS VFS 3.

SYJ3000/5000/7000

M8 connector (WO): SYJ3 20-WO-M3 (-F) M plug connector (M): SYJ3 20-M-M3 (-F) 3 4 5 3 4 5 3 4 5 Approx. 300 (Lead wire length) 28 [35] 12.6 M8 x 1 32.5 15 39.1 [46.1] Approx. 300 (Lead wire length) 50.1 [52.3] 40.3 [42.5] 49.2 41.8 53.1 46.6 35.3 13.5 13.5 13.5 111.5 [115.9] 91.9 [96.3] 109.7 15 15 22.1 15 22.1 22.1 Refer to page 1-5-79 for dimentions with connector cable. 1-5-10 11 4/5

MXS

adjuster MXS12-10AS MXS12-20AS MXS12-30AS MXS12-40AS MXS12-50AS SMXS12A, #1 SMXS12A, #2 SMXS12A, #3(#3+#7) SMXS12B, #1 SMXS12B, #2(#2+#5) SMXS12B, #3(#3+#7) (mm) Model F 35 35 35 50 35 55 65 K J 40 40 40 52 60 85 130 I 10 10 10 10 22 43 52 NN 2 2 2 3 3 4 5 H 40 40 40 25 36 36 38 G 15 15 15 17 15 25 35 HA 40 40 40 25 36 72 76 ZZ 80 80 80 92 112 158 212 N 4 4 4 4 6 6 6 GA 15 15 15 42 51 61

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

CDBA1L40-100-HN 2 wires K59 J59 12V 5V 12V 12V 3 wires (NPN) 2 wires 3 wires (NPN) 3 wires (PNP) G39 G39C IC Conduit terminal K39 K39C G59W F59W 5V 12V PLC IC Diagnosis indication (2 color) G5PW Mounting Bracket Part No.

MHZ

M (maximum allowable moment)(Nm) Allowable load F (N) = L x 10 3 0.68 Allowable load F = 30 x 10 3 = 22.7 (N) (: Constant for unit conversion) Load f = 10 (N) < 22.7 (N) 12-2-15 15 Parallel Style Air Gripper Compact Series (Without Auto Switch) Series MHZA2-6/MHZAJ2-6 Size: 6 How to Order MHZA 2 6 D MHZA J 2 6 D Dust cover type With dust cover Nil F S Chloroprene rubber (CR) Fluoro rubber

MHZ

M (maximum allowable moment)(Nm) Allowable load F (N) = L x 10 3 0.68 Allowable load F = 30 x 10 3 = 22.7 (N) (: Constant for unit conversion) Load f = 10 (N) < 22.7 (N) 12-2-15 15 Parallel Style Air Gripper Compact Series (Without Auto Switch) Series MHZA2-6/MHZAJ2-6 Size: 6 How to Order MHZA 2 6 D MHZA J 2 6 D Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

+0.025 0 12 F +0.025 0 3H9 ( ) depth 3 N 1 x F 2 30 24 M 0.5 23 24 Z ZZ (NN 1) x H G H 13 6.5 6.5 13 B A 3.2 6.5 7 7 15 1 3H9 ( ) depth 3 +0.025 0 4 NN x M4 x 0.7 thread depth 8 B A 3H9 ( ) depth 3 +0.025 0 HA GA Section AA Section BB (mm) ZZ 74 79 90 108 126 176 M 49 54 65 83 101 151 Z 48.5 53.5 64.5 82.5 100.5 150.5 K 23.5 33.5 43.5 53.5 63.5 88.5 J 19.5 29 39 56 60 96 I 13 8.5 9.5 10.5

SMC

+0.025 0 12 F +0.025 0 N 1 x F 2 3H9 depth 3 30 24 M 0.5 23 24 Z ZZ (NN1) x H G H 13 6.5 6.5 13 B A 3.2 6.5 7 7 15 1 3H9 depth 3 +0.025 0 4 NN-M4 x 0.7 thread depth 8 B A 3H9 depth 3 +0.025 0 HA GA Section AA Section BB (mm) ZZ 74 79 90 108 126 176 M 49 54 65 83 101 151 Z 48.5 53.5 64.5 82.5 100.5 150.5 K 23.5 33.5 43.5 53.5 63.5 88.5 J 19.5 29 39 56 60 96 I 13 8.5 9.5 10.5 24.5 38.5 NN 2

Stopper Cylinder

KE [mm] Bore size A B D E F G H J K M N O P Q T V Y Z W Rc NPT G Rc NPT G 16 59.5 41.5 10 29 6 3 18 18 28 3.5 6.5 depth 4 M5 x 0.8 M5 x 0.8 M5 x 0.8 17 20 18 37 0 0 0 20 67 45 12 36 8 4 22 22 36 5.5 9 depth 7 1/8 1/8 M5 x 0.8 20 24 22 47 1.5 1.5 0 32 68 48 20 45 7.5 8 20 4.5 32 34 5.5 9 depth 7 1/8 1/8 1/8 20 36 20 14 40 80.5 52.5 25 52 8 10 28 5 41 40 5.5 9 depth 7 1/8 1/8 1/8 24.5

MK

F Yh9 Z Model 0.1 0.2 MKB32 1 8 0 0.15 0.15 31.5 9 depth 7 M10 x 1.5 93.5 71.5 45 5.5 12 37 7.5 60 14 16 34 4.5 Rc / 54 3 6.5 14 0.15 20 0.15 7 30 0.062 0 0.1 0.2 MKB40 1 8 65 29.5 35 9 depth 7 M10 x 1.5 94.5 52 5.5 12 8 69 14 16 40 5 Rc / 61 3 6.5 14 24 7 30 0.062 0.1 0.2 0 MKB50 1 4 0.15 0.15 11 depth 8 76.5 34 41 M12 x 1.75 112 64 6.6 15 10.5 86 19 20 50 7 Rc / 73 3.5 7.5 0.15 30 0.15

CLK1

Unclamp side lock (F) 3-Rc 1/4 Clamp side port 3-Rc 1/4 Unclamp side port 52 N L + Stroke Rear cushion valve Top width across flats 3 4-M6 x 1 Thread depth 12 17 1010 GA W GB 45 45 14 30 BX M 3 25 43 IA BY Max.Wc 40 30 D 13 35 36 Ws Width across flats K Width across flats 44 0.050 0.093 +0.027 0 +0.3 0 +0.4 0 F Shaft: 12d9 Clevis width CLK1A: 16.5 R15 Hole: 12H8 CLK1B: 19.5 S + Stroke 27

4/5 Port Air Operated Valve Series SYJA3000

Nil 4 3 2 position double 2 position single 2 1 1/8 With sub-plate 01 F N T JIS Symbol Body ported 3 position closed center 3 position exhaust center 5 3 position pressure center 2 position single 2 position double (B) 2 (A) 4 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 3 position closed center 3 position exhaust center (A) 4 (A) 4 (B) 2 (B) 2 How to Order Manifold Base 1 (P) 5 (

Clamp Cylinder with Lock Series CLK1

Unclamp side lock (F) 3-Rc 1/4 Clamp side port 3-Rc 1/4 Unclamp side port 52 N L + Stroke Rear cushion valve Top width across flats 3 4-M6 x 1 Thread depth 12 17 1010 GA W GB 45 45 14 30 BX M 3 25 43 IA BY Max.Wc 40 30 D 13 35 36 Ws Width across flats K Width across flats 44 0.050 0.093 +0.027 0 +0.3 0 +0.4 0 Shaft: 12d9 F Clevis width CLK1A: 16.5 R15 Hole: 12H8 CLK1B: 19.5 S + Stroke 27

Aluminum High Vacuum Angle Valve

XLD-50 XLD-63 XLD-80 XLD-100 XLD-160 50 123 48 1 12 40 26 16 7.5 41 65 170 66 2 11 55 41 20 15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

3

AB B MK MK Basic (mm) MK2T A B C D E F Yh9 G 45 52 64 77 H 16 16 20 20 I 9 9 11 14 J 7 7 8 10.5 K M6 x 1.0 M6 x 1.0 M8 x 1.25 M10 x 1.5 L 10 10 14 18 S 31.5 29 34 34.5 T 10.5 9 11.5 10.5 W 14 15 19 19 X 3 3 3.5 3.5 Z 6.5 6.5 7.5 7.5 AA 4.5 5 7 7 AB 1 1 1 1.4 AC 5.5 5.5 6.6 9 AE 1/8 1/8 1/4 1/4 Model 30 30 37 48 MKB32-Z MKB40-Z MKB50-Z MKB63-Z 0 0.062 0 0.062 0 0.062 0 0.062 49.5 57 71 84

Profile Design ISO/VDMA Air Cylinder Series CP95

e Order No. b d f l1 c a 32 M10x1.25 GKM10-20 10 40 10 52 20 20 40 M12x1.25 GKM12-24 12 48 12 62 24 24 50/63 M16x1.5 GKM16-32 16 64 16 83 32 32 80/100 M20x1.5 GKM20-40 20 80 20 105 40 40 Rod end nut (standard equipment) 30 d D C H B Bore size (mm) Order No.

VXP21/22/23

(217.5) 114 (124) ( ): N.O. 17-3-52

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

3 e i o w !0 !5 Lateral load resisting type: MQQL (Built-in ball bushing) !1 !6 !

VCW

Nil: NBR F: FKM E: EPDM P: PTFE OR-1717-178For VCW30, 40 t Nil: NBR F: FKM E: EPDM P: PTFE OR-3305-178Nil: NBR F: FKM E: EPDM P: PTFE After replacing coils, press the clip in the direction of t. 17-2-50 3 Series VCW Direct Operated 2 Port Solenoid Valve For Water Precautions Be sure to read before handling. Refer to page 17-6-3 for Safety Instructions and Solenoid Valve Precautions.

PA300/500/700

31.5 VR 74 60 2 52 31 VH 9 119.5 (Piping port) Rc 3/8, 1/2 VHS 42 31 9 3(R) 1(P) 3.5 108.5 (Breathing port) M5 x 0.8 A B Body ported: VPA742V41 31.5 NC NO 2(A) 33 40 4.5 2-5.2 52 Switch mark (Mounting hole) (PA port) Rc 1/8 (Mounting groove for M6 thread) 2-R 3.2 2-5.2 Bracket (Mounting hole) PA 63.9 63 63 56.5 38.5 5.5 31.5 2 52 31 74 60 9 119.5 (Piping port) Rc 3/8, 1/2 42 31 9 3(R) 1(