Mechanical Valves Series NVM, NVFM, NVZNI

Td_i ACTUATOR SUB ASSEMBLIES NYTMZJV Pa.t# trYZil4SU Patl# Cam Lever Acetal vM-01c vM-o1c Cam Lever teel VM.O1 VM-OICS Cam Lever One-wav Acetal vM-02c vM-02c Cam Lever One-Way Steel vM-02c VM-O2CS Descrlptlon HOI|T Matorial M5 x0.8 Plunqer VM.OsD vM-05c Roller Plunoer In Line Acetal VM.06D vM-06c Roller Plunger In Line Steel VM.O6DS VM.O6CS Tooqle Lever vM-080 VM.O8C Push Button-MushroomvM-30c

High Vacuum Angle Valve, XL Series

Surface leakage Leakage that occurs between the deformable seal material and the sealing surface at room temperature (20 to 30C). This is read within a few minutes after the start of the test. Gas permeation This is leakage caused by diffusion through the deformable seal material.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Leakage rate is measured at room temperature (20 to 30C). Gas permeation This is leakage caused by diffusion through the elastic body seal material. As temperature increases, the diffusion rate increases, and in many cases, becomes greater than surface leakage.

Aluminum High Vacuum Angle Valve

Leakage rate is measured at room temperature (20 to 30C). XGT CYV Gas permeation This is leakage caused by diffusion through the elastic body seal material. As temperature increases, the diffusion rate increases, and in many cases, becomes greater than surface leakage.

High Vacuum Angle Valve

Leakage rate is measured at room temperature (20 to 30C). XGT CYV Gas permeation This is leakage caused by diffusion through the elastic body seal material. As temperature increases, the diffusion rate increases, and in many cases, becomes greater than surface leakage.

IDUS/IDFS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3 8 1.0 18.2 3.0 = 15.2g/m3 20 2 3 4 1.5 15 10 5 8 7 3.0 1 6 5 0 Intake air temperature C (Atmospheric pressure) Air temperature (Pressure dew point) C -20 -10 0 10 20 30 40 50 60 0 10 20 30 40 50 60 70 80 [Example] If air at 30C and 60% humidity is pressurized

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Piston rod Table (2) MXP6 MXP10/12/16 L2 L2 L2 (mm) 10 (One side only) 10 (One side only) 9 8 8 8 8 8 Model MXP6-5C MXP6-10C MXP10-10C MXP10-20C MXP12-15C MXP12-25C MXP16-20C MXP16-30C Damage is not allowed. 3. Shock absorber is considered a consumable component. When energy absorption is decreased, replace it.

Specification: Copper, Fluorine and Silicon-free + Low Particle Generation, Vacuum Suction Type, Bore: 12mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Symmetric Type, Stroke: 30mm, Adjuster: Metal Stopper, Both Ends, Functional Option: Standard Type, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire: -, Number: -

Specification: 22 (Copper, Fluorine and Silicon-free + Low Particle Generation, Vacuum Suction Type), Bore: 12mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: L (Symmetric Type), Stroke: 30mm, Adjuster: C (Metal Stopper, Both Ends), Functional Option: Standard Type, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal

Bore Size: 16mm, Symmetric Type: Standard, Stroke: 125mm, Adjuster: B (Both Sides Adjusters/Shock Absorbers), Function: Standard, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal

Bore Size: 16mm, Symmetric Type: Standard, Stroke: 30mm, Adjuster: A (Both Sides Adjusters/Rubber Stoppers), Function: Standard, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal

Bore Size: 16mm, Symmetric Type: Standard, Stroke: 100mm, Adjuster: AS (Adjuster at Forwarding End/Rubber Stopper), Function: Standard, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal

Bore Size: 16mm, Symmetric Type: Standard, Stroke: 20mm, Adjuster: B (Both Sides Adjusters/Shock Absorbers), Function: Standard, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal

Bore Size: 16mm, Symmetric Type: Standard, Stroke: 50mm, Adjuster: AT (Retracting Stroke End Adjuster/Rubber Stopper), Function: Standard, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal

Bore Size: 16mm, Symmetric Type: Standard, Stroke: 50mm, Adjuster: B (Both Sides Adjusters/Shock Absorbers), Function: Standard, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal

Bore Size: 16mm, Symmetric Type: Standard, Stroke: 75mm, Adjuster: AS (Adjuster at Forwarding End/Rubber Stopper), Function: Standard, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal

Bore Size: 16mm, Symmetric Type: Standard, Stroke: 75mm, Adjuster: B (Both Sides Adjusters/Shock Absorbers), Function: Standard, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal

Bore Size: 16mm, Symmetric Type: Standard, Stroke: 40mm, Adjuster: C (Both Side Adjusters/Metal Stoppers), Function: Standard, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal

Bore Size: 16mm, Symmetric Type: Standard, Stroke: 50mm, Adjuster: CT (Retracting Stroke End Adjuster/Metal Stopper), Function: Standard, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal

Bore Size: 16mm, Symmetric Type: Standard, Stroke: 30mm, Adjuster: Both Sides Adjusters/Rubber Stoppers, Function: Standard, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: -, Number: -