Thermo-chiller

Current (% for chiller main breaker volume) HRS100-A/W-20 4 h 2 h 1 h 4 min 6 min 10 min 14 min 20 min 30 min 2 min 1 min Operating time 20 s 30 s 10 s Max. 5 s 2 s 1 s Min. 0.5 s 0.2 s 0.1 s 0.05 s 0.02 s 0.01 s 100 125 200 300 500 400 600 700 1000 2000 3000 4000 5000 6000 7000 10 1500 Current (% for chiller main breaker volume) 28 Series HRS100/150 Specic Product Precautions 5 Be sure to

Gun Type Ionizer

Blow setting Trigger setting 0 Trigger linked 1 1 Trigger lock 2 Continuous blow 3 s 3 5 s OFF timer 4 7 s 5 Trigger linked 5 6 Trigger lock 7 Pulse blow 3 s 8 5 s OFF timer 9 7 s Selection of blow setting M Continuous blow M Pulse blow Blows ionized air continuously. Pulse blow saves air.

HRX-OM-W002

9-11 HRR Series HRX-OM-W002 Contents 9.4.2 HRR018-A/W-10/20. 9-11 9.4.3 HRR024-A/W-20. 9-12 9.4.4 HRR030-A/W-20. 9-12 9.5 Heating capacity . 9-13 9.5.1 HRR012-A/W-10-,HRR018-A/W-10-. 9-13 9.5.2 HRR012-A/W-20,HRR018-A/W-20 . 9-13 9.5.3 HRR024-A/W-20,HRR030-A/W-20 . 9-13 9.6 Pump capacity. 9-14 9.6.1 HRR012/018/024/030-A/W. 9-14 9.6.2 HRR012/018-A/W-10-T/MT . 9-14 9.6.3 HRR012/018/024/030-A

3 Port Solenoid Valve Metal Seal Series VZ200 1

MN Option Nil None M plug connector S With surge voltage suppressor Z With light/surge voltage suppressor Indicator light is not available for grommet type.

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

X port (External pilot) M5 x 0.8 A port 1/8, 1/4 34 Series SYJ700 How to Order Light/surge voltage suppressor Rated voltage Electrical entry for G, H, L, M and W Electrical entry for D Nil Without light/surge voltage suppressor Nil Without light/surge voltage suppressor DC S Z R U With light/surge voltage suppressor (Non-polar type) S Z With surge voltage suppressor With surge voltage suppressor

Vacuum Filter AFJ Series

m AFJ20-02-40-S/AFJ30-03-40-S/AFJ40-04-40-S AFJ20-02-40-T/AFJ30-03-40-T/AFJ40-04-40-T 12 12 AFJ20-02-40-T AFJ30-03-40-T AFJ20-02-40-S AFJ30-03-40-S AFJ40-04-40-S 10 10 Pressure drop [kPa] Pressure drop [kPa] 8 8 AFJ40-04-40-T 6 6 4 4 2 2 Water drop removal type Nominal filtration rating: 40 m Large flow type Nominal filtration rating: 40 m 0 0 0 100 200 300 400 500 600 800 700 900 Flow rate

HRX-OM-X084

AL XXALM / Key Alarm number (Alarm number minimum AL01 LO W M LEVEL FLT / Key AL02 Alarm number MENU Key LO W LEVEL W RN / Key Alarm number (Alarm number maximum AL17 LO W FLO W FLT Key / 7.1 Alarm Notification HRR Series 7-2 HRX-OM-X084 Chapter 7 Alarm Notification and Troubleshooting 7.2 Alarm Buzzer Stop The alarm buzzer sounds to notify when the alarm signal is output.

Sine Cylinder Series REC

Load (kg) Load (kg) 10 10 30 10 100 300 Speed (mm/s) Speed (mm/s) Speed (mm/s) 300 300 REA REB Stroke Stroke Speed REC CY Time Time Stroke P=0.5 MPa,M=10 kg P=0.3 MPa,M=10 kg M=10 kg M=30 kg V=300 mm/s V=100 mm/s CX MQ Model Recommended Speed Controllers Caution RHC RZQ Model Elbow type Straight type In-line type REC20 AS2201F-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 REC25 AS2201F

Sine Cylinder Series REC

Load (kg) Load (kg) 10 10 30 10 100 300 Speed (mm/s) Speed (mm/s) Speed (mm/s) 300 300 REA REB Stroke Stroke Speed REC CY Time Time Stroke P=0.5 MPa,M=10 kg P=0.3 MPa,M=10 kg M=10 kg M=30 kg V=300 mm/s V=100 mm/s CX MQ Model Recommended Speed Controllers Caution RHC RZQ Model Elbow type Straight type In-line type REC20 AS2201F-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 REC25 AS2201F

HRX-OM-X071

Applicable model HRR050-A/W-40-T1 HRR050-A/W-40-T2 Rated flow50/60Hz common*1 L/min 16 24 Maximum pump head 50/60Hz common*2 m 50 Pump Output W 400 750 Circuit protector A 10 Recommended earth leakage breaker capacity A 10 Due to an increase in heat generation of the pump. The cooling reduces about 400W from the value in the catalog.

Air Cylinder

ZZ S ZZ S ZZ S ZZ S ZZ 20 87 141 112 166 137 191 25 87 145 112 170 137 195 32 89 147 114 172 139 197 164 222 40 113 179 138 204 163 229 188 254 213 279 Symbol Symbol Bore size Bore size Female Rod End (mm) Stroke A1 H MM 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 S ZZ S ZZ S ZZ S ZZ S ZZ 20 8 20 M4 x 0.7 87 120 112 145 137 170 25 8 20 M5 x 0.8 87 120 112 145 137 170 32 12 20 M6

SL5200

Single Stage Compact Regulator for Ultra High Purity Series SL5200 Sub-atmospheric pressure delivery option Springless design (No poppet spring in the wetted area) For UHP gas delivery Flow capacity Standard: to 30 slpm HF (option): to 130 slpm Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance How to Order Port Number q w e SL52 S M FV4 FV4 02

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

driving size EVS1-01 (Size: 01) EVS1-02 (Size: 02) 100 80 1000 l/min (ANR) 400 l/min (ANR) Accommodates enclosure IP65 Dust/Splashproof type Lightweight Size 01 (3 position): 0.26 kg Size 02 (3 position): 0.18 kg 3-11-11 12 ISO Standard Solenoid Valve Size 1,2/Single Unit Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 Courtesy

ARM10/11

S L L H H 8 11.5 L2 dimension Stations 1 2 3 4 5 6 7 8 9 M DIN rail part no.

ARM10/11

S L L H H 8 11.5 L2 dimension Stations 1 2 3 4 5 6 7 8 9 M DIN rail part no.

VS 8-2/VS 8-4

lead wire L kit with 1.5 m lead wire Lead wire housing assembly 16 L kit with 3.0 m lead wire M kit, 26 pins Circular connector housing assembly 17 32 Series VS 8-2/VS 8-4 S R S R Manifold Component Part No. !

Air Pilot Operated Series NVSA

Seat AXT 333 PILOI COVEF "8" END Typ "N & O" w/(4) scrws PC 010S1 4B Type "A & B" w/{41 Screws P C 0 1 1 1 1 Screw Pllot Cover (41 6 Spool & Sleeve Ass'y. 440F. S.S. 7 O R i m . S & S ( 6 ) Buna N ARP 568014 oushion Pilol Covers "A & B" (21 AXT 334.5N D Gasket . Pilot Covers (2) Buna N AXT 334.7N-1 PILOT COVERS',f'ENO 10A TYpe "O Alum. D-C. PC 0100-1 108 Typ N" Alum. D.O.

ITV

Linearity within 1% (Full span) Hysteresis 0.5% (Full span) Repeatability 0.5% (Full span) ITV (Electro-pneumatic regulator) Mist separator (0.01 m or less) (0.3 m or less) High-speed response time 0.1sec Air Filter (5 m or less) IR (Precision regulator) W (Without load) 14-8-2 3 Compact Electro-pneumatic Regulator Series ITV0 How to Order F.R.L.

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

N 9 T L A N 1 * S 1 9 T L A N ) a P M ( g i s p e r u s s e r p y l p p u s . x a M ) 5 . 1 ( 0 2 2 ) a P M ( g i s p e r u s s e r p g n i t a r e p o . x a M ) 0 . 1 ( 0 5 1 e g n a r . p m e t g n i t a r e p O ) C 0 6 ~ 5 ( F 0 4 1 ~ 3 2 t n a c i r b u l d e d n e m m o c e R ) 2 3 G V O S I ( 1 # l i O e n i b r u T y d o B C D A e r u s s e r p e n i l d n a k n a t n e e w t e

OMU0023

109 6D m 14 0E SO 46 2E . 78 4E N 110 6E n 15 0F SI 47 2F / 79 4F O 111 6F o 16 10 DLE 48 30 0 80 50 P 112 70 p 17 11 DC1 49 31 1 81 51 Q 113 71 q 18 12 DC2 50 32 2 82 52 R 114 72 r 19 13 DC3 51 33 3 83 53 S 115 73 s 20 14 DC4 52 34 4 84 54 T 116 74 t 21 15 NAK 53 35 5 85 55 U 117 75 u 22 16 SYN 54 36 6 86 56 V 118 76 v 23 17 ETB 55 37 7 87 57 W 119 77 w 24 18 CAN 56 38 8 88 58 X 120 78 x