VFS

Body type Plug-in type ARBF2000-00-P-1 Non plug-in type ARBF2000-00-P-2 P port regulation Body type Plug-in type VVFS2000-10A Non plug-in type Part no. Rc 1 4 VVFS2000-P-02-1 VVFS2000-P-02-2 Accessory One pair of gasket and mounting thread is attached to every option parts assembly.

VFR

A, B, EA, EB port) Nil R External pilot Internal pilot 1 4 3 8 02 03 Plug-in VFR3000 P 02 Thread type Non plug-in VFS3000 S 02 Nil F G Rc N NPT NPTF T B Plug-in VFR3000 P 02 Non plug-in VFS3000 S 02 B Piping port (P, A, B, EA, EB port) Note) Mounting bolts and gaskets are not attached. 1 4 02 3-5-31 32 Series VFR3000 Construction 2 position single 2 position

Best Pneumatics Vol. 14

Y300 Y400 Y500 Spacer (5) (6) 01 (02) AKM2000(01) 02 AKM4000(02) 03 AKM3000Check valve (6) IS1000M-20 IS1000M-30 IS1000M-40 IS1000M-50 Pressure switch 01 (02) Y210(01) 02 Y410(02) 03 Y510Y310(02) 03 Y110-M5 (5) (6) T-interface Attachment 02 03 04 (6) VHS40-06 01 02 VHS20VHS30VHS4002 03 Residual pressure relief 3 port valve 02 03 04 06 E500-06 02 03 04 E200E30001 02 03 (6) E400Piping adapter

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

(R) port SUP (P) port Applicable solenoid valve VF3160-Side ported/Common EXH type Type 61 VV5F3 05 61 1 01 02 VF3163-01 02 Stations 02 2 stations 10 20 stations CYL (A, B) port SUP (P) port EXH port Top ported/Individual EXH type Type 70 Applicable solenoid valve VV5F3 05 70 3 01 02 VF370-CYL (A, B) port Stations 02 2 stations 10 20 stations EXH (R) port SUP (P) port Applicable solenoid

ZP

) UM:-A12-06 ZP3-T (10/13/16) B:-A12-06 ZP3-T (015/02/035) U:-A3 ZP3-T (015/02/035) U:-B3 ZP3-T (015/02/035) U:-A6-@ ZP3-(015/02/035)U: ZP3A-T1-A3 ZP3A-T1-B3 ZP3A-T1-A6-B3 ZP3A-T3-A5 ZP3A-T3-B5 Note 1) ; in the table indicates the pad material.

Modular F.R.L. Unit

N.C. 0.2MPa Note 2) Note 3) Float type auto drain Spacer Pressure switch Note 5) Note 4) Note 5) T-interface Y21001 (02) Y310(01) 02 Y310(01) 02 Y410(02) 03 Y510(02) 03 Note 5) 02 03 04 01 02 VHS302 03 VHS2000VHS302 03 VHS40003-port valve for residual pressure release 02 03 04 06 02 03 04 06 01 02 Y3401 02 01 02 03 E30002 03 04 E30002 03 04 E200E400E500-06 Note 5) Piping adapter Note 5) 01

ZP3

ZP3 T 015 U N A3 With adapter From p. 137 p. 160 From p. 162 ZP3 T 015 U N J 3 B3 With buffer From p. 140 p. 161 p. 164 q w e r t y u Flat type q Vacuum inlet direction w Pad diameter e Material Nil Pad unit T Vertical Y Lateral 015 1.5 02 2 035 3.5 N NBR S Silicone rubber1 U Urethane rubber F FKM GN Conductive NBR GS Conductive silicone rubber r Buffer specification t Buffer stroke J Rotating

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 50.6 [57.6] 9.5 22 45.5 (P, EA, EB port) 1/4 18 18 28 56 L plug connector (L): 10-SY5140(R)-L-02 M plug connector (M): 10-SY5140(R)-M-02 DIN terminal (D, Y): 10-SY5140(R)-02 M8 connector (WO): 10-SY5140(R)-WO-02 D Y 95.8 [98] Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 83.4 75.9 64.6 M8 x 1 Max. 10 104.9

Vacuum Pad

) UM:-A12-06 ZP3-T (10/13/16) B:-A12-06 ZP3-T (015/02/035) U:-A3 ZP3-T (015/02/035) U:-B3 ZP3-T (015/02/035) U:-A6-@ ZP3-(015/02/035)U: ZP3A-T1-A3 ZP3A-T1-B3 ZP3A-T1-A6-B3 ZP3A-T3-A5 ZP3A-T3-B5 Note 1) ; in the table indicates the pad material.

ZP

(Pad diameter: 20 mm or less) ZP T 02 U N A5 From p. 33 p. 115 p. 117 From p. 121 With adapter ZP T 02 U N J 6 B3 A8 From p. 43 p. 116 p. 118 From p. 124 With buffer q w e r t y u i Flat type q Vacuum inlet direction w Pad diameter t Buffer stroke 02 2 16 16 04 4 20 20 06 6 25 25 08 8 32 32 10 10 40 40 13 13 50 50 e Material Nil Pad unit T Vertical R Lateral (With One-touch fitting) Y Lateral

Modular F.R.L. Unit

) T-interface Note 6) (02) 02 02 03 03 (04) 04 Y61004 02 VHS40-06 02 04 VHS50-(10) pressure release 02 02 06 3-port valve for residual Note 6) 03 VHS2001 VHS3003 VHS3003 VHS4002 03 01 02 02 06 06 06 Piping adapter Note 6) E200-02 E30003 E300-03 E40004 E500-06 E600-10 E60010 E60010 E100-M5 03 04 04 06 02 01 02 02 Pressure switch Note 6) 03 IS1000E-20 02 IS1000E-3003 IS1000E-3003 IS1000E

Micro Mechanical Valve Series VM1000

(Total Travel) 3 P .T.

A

K E O F F TA K EO F F T Y P E 1 "T" Type 4 "X" Type T H R E A D T Y P E Nil Rc(PT) N NPT P O R T S I Z E M5 M5 x 0.8 01 1/8 02 1/4 03 3/8 04 1/2 mm mm Model Port Size A B C Model Port Size A B C D Y11-M5 M5X0.8 8 12 8 Y14-M5 M5 23 16 14 25 Y21-01 1/8 10 29 19 Y24-01 1/8 40 40 22 40 Y21-02 1/4 10 29 19 Y24-02 1/4 40 40 22 40 Y31-01 1/8 11 33 19 Y34-02 1/8 49 43 28 48 Y31-02 1/4 11 33 19 Y44

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

1/8, C6 Nil F N T Rc G NPT NPTF P port 1/4 01 1/8 C6 One-touch fitting for 6 N7 One-touch fitting for 1/4" Type 43 (5 port / base mounted) How to Order 10 SS5YJ5 43 05 C4 Clean series Manifold stations -+ -+ A B 02 2 stations P, R port thread type R port 1/8 : : R P 20 20 stations A, B port C4 Nil F N T Rc G NPT NPTF P port 1/8 A, B port size One-touch fitting for 4 C4 One-touch fitting

SX

8 stations 4 stations 02 2 stations 02 2 stations 02 2 stations (2) (2) (2) Applicable up to 20 solenoids.

SY

ARBY3000 Series SY3000 Series SY5000 00 2 P ARBY5000 Regulated port Regulated port Pressure gauge connecting port Pressure gauge connecting port P port A port (P port control type A port regulated) B port (P port control type B port regulated) P port A port (P port control type A port regulated) B port (P port control type B port regulated) P A1 B1 P A1 B1 Pressure gauge (G15-10-01) Plug

Table of Contents

Construction The same symbol Without buffer Replacement of the symbol T ZP 02 A5 UN [Pad model no.]

VM

-02/03 3 (Exhaust center) Rc 1/4: 17 VH302-02/03 VH312-02/03 2 (Position) 1 (P) 3 (R) 2 1 VH3 0.71 1/4, 3/8 VH320-02/03 VH330-02/03 3 (Closed center) Rc 3/8: 20 Exhaust center VH321-02/03 VH331-02/03 3 (Exhaust center) (A) 2 (B) 4 VH322-02/03 VH332-02/03 2 (Position) 12 3 4 VH400-02 to 06 VH410-02 to 06 3 (Closed center) 1 (P) 3 (R) Rc 1/4: 45 4 3 VH401-02 to 06 VH411-02 to 06 3 (Exhaust

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators 3(R2) 1 (P) (R1)5 1 (P) (R1)5 3(R2) t e q t r w qr w (B) 2 (A) 4 (B) 2 (A) 4 u u 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) 5 (R) y 3 position closed center/exhaust center/pressure center 3 position closed center 2(B) (A)4 q t r w 3(R2) 1 (P) (R1)5 (B) 2 (A) 4 3 position exhaust center 2(B) (A)4 3(R2) 1 (P) (R1)5 3 position pressure center u 2(B) (A)4 3

Modular F.R.L. Units

High pressure 2.0 MPa (-X425) P.53 P.77 P.107 Low temperature 30 to 60C (-X430) P.53 P.77 P.106 High temperature 5 to 80C (-X440) P.53 P.77 P.106 Clean series (10-) P.54 P.63 P.80 P.80 P.111 P.111 Copper, fluorine and silicone-free + Low particle generation (21-) P.54 P.63 P.80 P.80 P.111 P.111 Related Product Modular adapter Example) Air filter + 3 port valve Easy modular connections for