Series VQ1000/2000 10- 21- 5 Port Solenoid Valve M kit is available with [W] only. S/L/T kit are selectable depending on the manifold type. Note) F/P/J/G kit are available with Nil only. M kit is available with [W] only. S/T kit are selectable depending on the manifold type. S Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Option Note 1) The !
Note 3) AD27 Y200 IS1000M-20 Float type auto drain AD37 AD37NNote 6) AD47 AD47NNote 6) AD47 AD47NNote 6) Y300 IS1000M-30 Y400 IS1000M-40 Y500 IS1000M-50 Spacer Note 5) Pressure switch Note 4) Note 5) Y21001 (02) Y310(01) 02 Y410(02) 03 Y510(02) 03 T-Interface Note 5) 02 03 04 VHS40-06 VHS2001 02 VHS3002 03 VHS403-port valve for residual pressure release 02 03 04 06 02 03 04 06 E20001 02
S/T/M kits are selectable depending on the manifold type. Note) F/P kits are available with Nil only. M kit is available with [W] only. S/L/T kits are selectable depending on the manifold type. S VQC 1/2 VQC 4/5 Note 1) The !4s fitting assembly is included. Note 2) The housing assembly and SI unit of F/P/S kits are not included. Separately place an order for q, w, e.
(For details, refer to page 4-4-25.) 4-4-20 21 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ500 Construction q e r t w y q e r t w y N.C. N.O.
(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03
Base material: Aluminum Fluid: Air Base material: Aluminum Fluid: Air Common SUP type Individual SUP type Common SUP type Individual SUP type u u e t u e t u w w t e y r q y i OUT t e y r q y i w i w i y r q y r q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com o
7 @6 r u #1 t @4 @5 #2 @0 y i !9 !0 q !1 w !
6 t !0 i q o u y !7 r !9 w !4 CY3B10, 15 !4 !8 !7 !6 !5 !0 i o q u y t r !2 w !1 The above drawing is 15. (3 magnets are used in 10.) CY3B20 to 40 !3 !4 !1 !8 !6 !5 !7 !0 i q o u t y r e w !2 CY3B50, 63 !4 !8 !6 !5 !0 !7 i o q u y t !3 r !2 w !1 Component Parts Note Hard anodized Material Aluminum alloy No.
[inch] Model T (M) Weight [g] X Y Nylon Urethane 11 mm or less Metric Size M, R, Rc Inch Size UNF, NPT Inch Size M, R, Rc Metric Size G Metric Size R, Rc Inch Size NPT Inch Size R Metric Size Uni Inch Size Uni H T 3/16 KQ2E05-00Mm1 M14 x 1 17 8.4 11 27.3 15 13.3 7.8 6.5 3.5 30.5 m: A (Brass), N (Brass + Electroless nickel plating) L M M Sealant/Gasket Seal Face Seal Gasket Seal Release button
0 o t r e w y (B) (A) 2 4 (B) (A) 2 4 4(A) 3 5 1 3 5 1 (EB) (P) (EA) (EB) (P) (EA) 2(B) i 5(EA)/3(EB) 1(P) 2 position double 2 position double 2 position double with back pressure check valve t r e w y q !1 u !
(Values at the initial period) Value for high voltage type (1.5 W) Value for low voltage type (0.5 W) Dusttight/Low jetproof type (IP65) is available on T, L, S and M kits of VQ2000.
Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust
) UM:-A12-06 ZP3-T (10/13/16) B:-A12-06 ZP3-T (015/02/035) U:-A3 ZP3-T (015/02/035) U:-B3 ZP3-T (015/02/035) U:-A6-@ ZP3-(015/02/035)U: ZP3A-T1-A3 ZP3A-T1-B3 ZP3A-T1-A6-B3 ZP3A-T3-A5 ZP3A-T3-B5 Note 1) ; in the table indicates the pad material.
) UM:-A12-06 ZP3-T (10/13/16) B:-A12-06 ZP3-T (015/02/035) U:-A3 ZP3-T (015/02/035) U:-B3 ZP3-T (015/02/035) U:-A6-@ ZP3-(015/02/035)U: ZP3A-T1-A3 ZP3A-T1-B3 ZP3A-T1-A6-B3 ZP3A-T3-A5 ZP3A-T3-B5 Note 1) ; in the table indicates the pad material.
) UM:-A12-06 ZP3-T (10/13/16) B:-A12-06 ZP3-T (015/02/035) U:-A3 ZP3-T (015/02/035) U:-B3 ZP3-T (015/02/035) U:-A6-@ ZP3-(015/02/035)U: ZP3A-T1-A3 ZP3A-T1-B3 ZP3A-T1-A6-B3 ZP3A-T3-A5 ZP3A-T3-B5 Note 1) ; in the table indicates the pad material.
Example) 90-AW30K-03B-1N q w e r t y Series compatible with secondary batteries 90 Material restriction q Symbol Body size Description 30 40 60 w K With backflow function With backflow function + Nil N F Thread type Rc NPT G e + 02 03 04 06 10 1/4 3/8 1/2 3/4 1 r Port size + Nil B Note 2) Note 1) Mounting Without mounting option With bracket With set nut (for panel fitting) a Option t H +
AS3001F-06 AN110-01 T0604 x 1 m AS3001F-06 VQZ1151-01 VQZ1121-C6 T0806 x 1 m AS3001F-08 VQZ2151-02 VQZ2121-C6 AN200-02 T1075 x 1 m AS4001F-10 AN300-03 T0604 x 1 m AS3001F-06 T1209 x 1 m AS4001F-12 VQZ3121-C6 VQZ3151-03 909 Series VQZ Model Selection Sonic conductance C [dm3/(sbar)] Type of actuation Voltage Electrical entry Light/surge voltage suppressor Manual override VQZ1000 2 position
Minimum Auto Switch Mounting Stroke (in) D-M9, D-M9W D-M9V, D-M9WV No. of auto switches D-A9 D-A9V D-F9BAL Model NCDQ8A(B)-(C)(M) NCDQ8A(B)-S(M) NCDQ8A(B)W-(C)(M) NCDQ8A(B)Z-(M) 2 1 0.25(1/4") 0.62(5/8") 0.62(5/8") 0.25(1/4") 1.00(1") 0.37(3/8") 2 0.87(7/8") 0.25(1/4") 0.37(3/8") 0.25(1/4") NCDQ8A(B)-T(M) 1 0.37(3/8") 0.37(3/8") 37 Series NCQ8 Auto Switches/Proper Mounting Positions and Height