5 Port Solenoid Valve Series VQZ1000/2000/3000

16.5 15 R1 5 3 R2 1 P X (Pitch) P = 10.5 16.1 57 32.8 M5 x 0.8 [4(A), 2(B) port] A 33.5 20.5 6.5 20 6 4 B 2 External pilot 3.2 (Pitch) P = 10.5 14.5 M5 The dashed lines indicate the DIN rail mounting [-D].

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

(Example) For M3: L1 = 6 mm Applicable shaft type: W CRB2 CRBU2 Q1 = M L1 + (3 x P) (mm) CRB1 Y Q2 Size (mm) Y = L1 = 15 X Q1 M3 Size 1.5 to 9 MSU 15 20 M3, M4 1.5 to 18 M3 1.5 to 10 L2 + (3 x P) L2 = 20 30 M3, M4, M5 1.5 to 20 M3, M4 X = 2 to 13 CRJ 30 40 Q2 = M M3, M4, M5 2 to 22 M3, M4, M5 4.5 to 15 CRA1 Symbol: A3 The long shaft can be further shortened by machining male threads into

Modular F.R.L. Unit

75 75 B 108 160 201 239 242 E 28 40 57 73 73 P 30 44 46 54 56 K 0 5 3.5 1.5 1.2 M 25 30 41 50 50 N 28 34 40 54 54 Q 4.5 5.4 6.5 8.5 8.5 H 26 63 66 76 76 G 25 40 55 80 80 Y 14 19 21 21 U 2 2.3 2.3 2.3 2.3 T 40 55 53 70 70 Z 6 7 7 7 W 18.5 28.5 38.5 42.5 42.5 B 125 177 242 278 278 V 18 30 31 35.5 37 J 27 30.5 38.5 38.5 S 6.5 15.4 8 10.5 10.5 AW10 AW20 AW30 AW40 AW40-06 M5 x 0.8 1/8, 1/4

Aluminum High Vacuum Angle Valve

Rc1/8 Pilot port size XLAV M5: Port 1(P), Port 3(R) Rc1/8: Port 1(P), M5: Port 3(R) XLA 0.25 0.45 1.1 1.6 2.9 5.0 10.6 18.5 Weight (kg) XLAV 0.29 0.49 1.14 1.64 2.96 5.06 10.7 18.6 Note 1) Conductance is the value for an elbow with the same dimensions.

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

/EB 4.14 (225.7) C6: P to A/B 9.54 (520.2) A/B to EA/EB 9.0 (490.7) C8: P to A/B 16.2 (883.3) A/B to EA/EB 16.2 (883.3) C10: Valve effective area Note 2) mm (Nl/min) Manifold base weight W (g) n: Number of stations W = 39n + 83 W = 48n + 99 W = 67n + 118 W = 88n + 151 W = 109n + 174 Flat ribbon cable connector, Socket: 26 pin MIL, With strain relief, MIL-C-83503 conformity Applicable flat

A

I f a p re s s u re g re a t e r t h a n t h e s e t p re s s u re i s re a c h e d , t h e u n i t w i l l o p e n , c l o s i n g w h e n p re s s u re i s l e s s t h a n s e t pressure.

Vacuum System Peripherals:

Air operated Nil M6 x 1 (Option) M5 x 0.8 PV/V port size Applicable to only plug connector.

0.

Rubber seal Body type 2 Body ported Port size [2(A) port] Port size Symbol VQZ200 VQZ300 p p p C4 C6 C8 C10 M5 02 4 one-touch fitting 6 one-touch fitting 8 one-touch fitting 10 one-touch fitting M5 thread Rc 1/4 p p p p Function Symbol Specifications DC AC (0.35 W) p Note 3) Nil Standard p (0.9 W) p B Note 1) High speed response type High pressure type (Metal seal type only) (0.9 W)

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

5 V,12 V 3-wire (NPN equivalent) A96V A96 IC circuit 5V 12 V Grommet A72H A72 200 V 100 V A93V A90V A93 A90 IC circuit 5 V,12 V 12 V 100 V or less Relay, PLC 2-wire A73C A80C A79W 24 V Connector IC circuit 5 V,12 V 24 V or less DDiagnostic indication (2-color indication) Grommet Solid state auto switches marked with are produced upon receipt of order.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

48 V, 100 V, 110 V, 120 V, 200 V, 220 V, 230 V, 240 V DC 12 V, 24 V Allowable voltage fluctuation 10% of the rated voltage Allowable leakage voltage AC 5% or less of the rated voltage DC 2% or less of the rated voltage Apparent power*4, *5 AC 4.5 VA 8 VA 9.5 VA Power consumption*4 DC 4 W 6 W 8 W Temperature rise*6 AC/DC 70/65C Glossary of Terms Coil specifications *1 Leakage: The value at

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

C10 M5 02 One-touch fitting for 3.2 v v v v Configuration One-touch fitting for 4 2 position single One-touch fitting for 6 (A) 4 (B) 2 One-touch fitting for 8 1 One-touch fitting for 10 M5 thread Rc(PT)1/4 5 (R1) 1 (P) 3 (R2) 2 position double (A) 4 (B) 2 (A) 4 (B) 2 Note 1) Refer to p.1.12-27 for inch size and One-touch fitting. 2 5 (R1) Metal Rubber 5 (R1) 1 (P) 3 (R2) 1 (P) 3 (R2)

CY1

D1.6x P First tentative bore size determination 0.1xWcos+Wsin D5.0x P 0.1xW+W D5.0x P W W>WV P>PV Determination of allowable load weight & pressure Inclined operation (Refer to p. 39 for vertical operation.)

Compact Rotary Actuator Series CRQ2

(Example) For M5: L2 = 10 Applicable shaft types: K, T, X Q1 = M K axis T, X shaft Q1 = M L1 = L2 + (3 x P) L2 + (3 x P) L1 + (3 x P) L1 + (3 x P) L2 = L2 = L1 = Q2 = M Q2 = M (mm) (mm) Q2 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Q1 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Size 10 15 20 30 40 Size 10 15 20 30 40 (mm) Q1 M3, M4 M3, M4, M5, M6 M4, M5,

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

(Inch) M5 1/8 1/4 M5x0.8 VQZ1000 V V V V V Cylinder port VQZ2000 V V V V V VQZ3000 V V V V V Note 1) Mixing One-touch fittings and thread types is impossible.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Rod End Lock: -R Bore size (mm) WH W P WA WB 20 30 M5 x 0.8 16 15(16) 23 25 30 M5 x 0.8 16 15(16) 25 32 25 Rc 1/8 16 15(16) 28.5 40 20 Rc 1/8 16 15(16) 33 50 20 Rc 1/4 18 17(18) 40.5 63 20 Rc 1/4 18 17(18) 47.5 80 20 Rc 3/8 22 22 60.5 100 20 Rc 1/2 22 22 71 ( ): Denotes the dimensions for long strokes.

CL

x 0.8 depth 7.5 M5 x 0.8 depth 8 M6 x 1 depth 12 Without rod boot ZZ e f h l ZZ With rod boot Stroke range Bore size (mm) H1 WA WW WB WH H PG PH PL PW S TA TB P TC W 30 30 25 20 20 25 32 40 178 193 196 221 198 215 218 241 55 62 62 70 16 17 17 17 30 30 35 35 35 40 40 50 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 23 25 28.5 33 11 11 10 10 14 14 13 14 11 11 11 12 5.5 7 7 9 38 41 41 41 86 96 97 105.5 20

MXS

3 wire (PNP) P.5.3-39 V V Solid state switch F9BV F9B 2 wire V V Relay, PLC 24V Yes Grommet 12V F9NWV F9NW 3 wire (NPN) V V Diagnostic indication (2 color) F9PWV F9PW P.5.3-66 3 wire (PNP) V V F9BWV F9BW 2 wire V V PLC: Programmable Logic Controller Note 1) Lead wire length 0.5m (Ex.)

Possible to transfer a workpiece at low-speed.

(Example) For M3: L1 = 6 Applicable shaft types: J, K, T Q1 = M K axis T, X shaft Q1 = M L1 = L2 + (3 x P) L2 + (3 x P) L1 + (3 x P) L1 + (3 x P) L2 = L2 = L1 = Q2 = M Q2 = M (mm) (mm) Q2 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Q1 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Size 10 15 20 30 40 Size 10 15 20 30 40 (mm) Q1 M3, M4 M3, M4, M5, M6 M4, M5, M6

SZ3000

0 e w t y q o 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 3 position pressure center 4(A) (A) 4 (B) 2 2(B) 5 (EA) 1 (P) 3 (EB) 5(EA) 1(P) 3(EB) i Component Parts 2 position single with back pressure check valve Material Note Description No. q w e r t y u i Zinc die-casted Body r u !

SZ3000

0 e w t y q o 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 3 position pressure center 4(A) (A) 4 (B) 2 2(B) 5 (EA) 1 (P) 3 (EB) 5(EA) 1(P) 3(EB) i Component Parts 2 position single with back pressure check valve Material Note Description No. q w e r t y u i Body Zinc die-casted r u !