e-Rodless Actuator

Auto switch part no. 8 7 8 0.5 Lead wire length (m) 41 38 41 3 68 63 68 5 Auto Switch Internal Circuit D-M9N, D-M9NV Unit: mm Dimensions DC (+) Brown Mounting screw M2.5 x 4l Slotted set screw D-M9 Switch main circuit Switch main circuit Switch main circuit Indicator light OUT Black 2.6 2.7 2.8 4 DC () Blue 22 500 (3000) D-M9P, D-M9PV 3.2 DC (+) Brown 6 Most sensitive position 22 500 (3000

Sine Cylinder Series REC

19.5 32 13 10.5 10 45 10 17 26 32 32 46.5 5.5 10 6 22 19.5 32 13 10.5 11 45 12 17 26 40 56.2 7 12 8 24 21 41 16 13.5 12.5 50 14 22 32 Note) For 32, a trunnion pivot bracket NA (42.5) is used as standard.

Sine Cylinder Series REC

19.5 32 13 10.5 10 45 10 17 26 32 32 46.5 5.5 10 6 22 19.5 32 13 10.5 11 45 12 17 26 40 56.2 7 12 8 24 21 41 16 13.5 12.5 50 14 22 32 Note) For 32, a trunnion pivot bracket NA (42.5) is used as standard.

CXS

Stroke (mm) Up to 10 Up to 30 Up to 50 Up to 75 Up to 100 Max. speed (mm/s) Up to 400 more than 400 Up to 400 more than 400 Up to 400 more than 400 Up to 400 more than 400 Up to 400 more than 400 (5) (6) (7) 6 10 15 Selection graph (8) (9) (10) (11) (12) (13) (14) (15) 20 25 32 The maximum speeds for 6 to 32 are: 6, 10: Up to 800 mm/s; 15, 20: Up to 700 mm/s; 25, 32: Up to 600 mm/s Caution

CXS

Stroke (mm) Up to 10 Up to 30 Up to 50 Up to 75 Up to 100 Max. speed (mm/s) Up to 400 more than 400 Up to 400 more than 400 Up to 400 more than 400 Up to 400 more than 400 Up to 400 more than 400 (5) (6) (7) 6 10 15 Selection graph (8) (9) (10) (11) (12) (13) (14) (15) 20 25 32 The maximum speeds for 6 to 32 are: 6, 10: Up to 800 mm/s; 15, 20: Up to 700 mm/s; 25, 32: Up to 600 mm/s Caution

NCA1

(4") 6.765 7.265 7.765 8.265 8.765 9.265 9.765 10.265 11.265 12.265 13.265 6-15-22 22 Series NCA1 Stainless Steel Rod Specifications 1.5 2 2.5 3.25 4 Bore size (inch) Air 250 psi (1.75 MPa) 8 psi (0.06 MPa) Stainless steel 304 40 to 140F (5 to 60C) 2 to 20 inch/sec (50 to 500 mm/sec) Air cushion standard Fluid Max. operating pressure Min. operating pressure Rod material Ambient & fluid temperature

NCA1

(4") 6.765 7.265 7.765 8.265 8.765 9.265 9.765 10.265 11.265 12.265 13.265 6-15-22 22 Series NCA1 Stainless Steel Rod Specifications 1.5 2 2.5 3.25 4 Bore size (inch) Air 250 psi (1.75 MPa) 8 psi (0.06 MPa) Stainless steel 304 40 to 140F (5 to 60C) 2 to 20 inch/sec (50 to 500 mm/sec) Air cushion standard Fluid Max. operating pressure Min. operating pressure Rod material Ambient & fluid temperature

V100

L dimension 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 VS VFN Silencer (For manifold EXH port) Silencer is installed in the EXH port. 63 38 22 Dimensions 13 Silencer part no.

Table of Contents

Port size A B C D E F 28 3/4 31 34 22 143 107 IF320 104 1 37 62 89 28 194 IF321 IF323 104 1 29 39 56 28 161 16-12-9 5 Series IF3 Flow Rate vs.

IR1000/2000/3000

pressure P1 (MPa) IR IR2010-02 IR2010-02 IR2010-02 Supply pressure: 0.7 MPa Back pressure: 0.7 MPa 0.7 VEX 0.204 0.4 0.6 Set pressure P2 (MPa) Set pressure (MPa) Set pressure (MPa) AMR 0.202 0.5 Set point 0.3 ITV 0.4 0.200 0.2 0.3 IC 0.198 0.2 0.1 VBA 0.1 0.196 VE 0 100 200 300 400 500 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 0 100 200 300 400 500 600 700 800 900 1.0 Flow rate ( /min (ANR))

CG1

18 22 14 16 20 22 25 30 35 43 29 33 40 49 60 74 56 64 28 32 38 45.5 54 63.5 79 96 99.5 120 8 10 12 14 16 18 18 22 Up to 200 Up to 300 Up to 300 Up to 500 Up to 600 Up to 600 Up to 750 Up to 750 With rod boot ZZ Bore (mm) Applicable pin part no.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

] 94.2 86.8 80.3 22 22 22 22 64.3 63 63 63 63 22 22 22 22 31.5 31.5 31.5 31.5 3.2 3.2 3.2 3.2 11.5 11.5 11.5 11.5 12 12 12 12 25.5 25.5 25.5 25.5 Refer to the page 91 for dimentions with connector cable. 55 Series SYJ7000 2 Position Double [ ]: AC G H 01 02 Grommet (G), (H): SYJ724022 12 G: Approx. 300 H: Approx. 600 (Lead wire length) 63 107.4 [111.8] B A With interface regulator 27 A B

MHZ

30 4 4 6 10 14 22 30 4 4 6 10 14 22 30 6 10 16 20 25 32 40 6 10 16 20 25 32 40 6 10 16 20 25 32 40 32, 40 Double acting Normally closed Normally open Single acting 3.7 13 38 57 83 161 267 JIS Symbol Double acting Note 1) Values based on pressure of 0.5 MPa, gripping point L = 20 mm, at center of stroke.

MHZ

30 4 4 6 10 14 22 30 4 4 6 10 14 22 30 6 10 16 20 25 32 40 6 10 16 20 25 32 40 6 10 16 20 25 32 40 32, 40 Double acting Normally closed Normally open Single acting 3.7 13 38 57 83 161 267 JIS Symbol Double acting Note 1) Values based on pressure of 0.5 MPa, gripping point L = 20 mm, at center of stroke.

MXS

22 22 22 20 26 32 40 30 KA N 4 4 4 4 6 6 6 8 8 HA 45 45 45 55 35 70 70 76 80 ZZ 108 108 108 118 131 172 213 271 311 F 50 50 50 60 35 60 70 75 80 FF 40 40 40 50 35 60 70 75 80 GA 22 22 22 22 55 61 102 154 190 M 92 92 92 102 115 156 197 255 295 MXS25-10 MXS25-20 MXS25-30 MXS25-40 MXS25-50 MXS25-75 MXS25-100 MXS25-125 MXS25-150 90.5 90.5 90.5 SMXS25A, #5(#1+#5) SMXS25A, #6(#2+#6) SMXS25A, #7

CY1F

Standard Stroke Maximum stroke available (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit.

0.5

600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 0 0 0 0 Installation distance [mm] 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance [mm] 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance [mm] Installation distance [mm] Installation distance [mm] Installation distance [mm] IZF10R

100

Specific Product Precautions 22 A ZL3/ZL6 Series Exhaust Characteristics (Representative value) ZL3H ZL3M 100 90 80 70 60 50 40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 0.3 0.4 0.5 400 500 450 400 350 300 250 200 150 100 50 0 0.2 0.6 Vacuum pressure Suction flow rate [L/min(ANR)] Air consumption [L/min(ANR)] Suction flow rate [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure 350

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

speed (mm/s) Collision speed (mm/s) L unit 1000 1000 Air cushion 500 400 300 500 400 300 L unit Air cushion 200 200 1002 3 4 5 10 20 50 100 1 2 3 4 5 10 20 30 400 50 Caution Load weight (kg) Load weight (kg) 1.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

300 500 400 300 200 200 100 1 2 3 4 5 10 20 30 1002 3 4 5 10 20 30 0.5 40 50 100 Load weight (kg) Load weight (kg) 20 Horizontal collision: P = 0.5 MPa 40 Horizontal collision: P = 0.5 MPa 2000 1500 2000 1500 Collision speed (mm/s) Collision speed (mm/s) L unit 1000 1000 Air cushion 500 400 300 500 400 300 L unit Air cushion 200 200 1002 3 4 5 10 20 50 100 1 2 3 4 5 10 20 30 400 50 Caution