MLGP A + Stroke 20Data Common Dimensions: MVGPM/MVGPL B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking IC Standard stroke (mm) Bore size (mm) ID IE IF IG IH J K L 20 25 32 9.5 10 9 79.5 10 10 12 32.5 8.5 9 9 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 83 93 112 6 7.5 9 24 30 34 M5 M5 M6 32 18 21 24 3 20, 30, 40, 50, 75, 100, 125 150, 175, 200,
A + Stroke 20Data Common Dimensions: MVGPM/MVGPL B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking IC Standard stroke (mm) Bore size (mm) ID IE IF IG IH J K L 20 25 32 9.5 10 9 79.5 10 10 12 32.5 8.5 9 9 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 83 93 112 6 7.5 9 24 30 34 M5 M5 M6 32 18 21 24 3 20, 30, 40, 50, 75, 100, 125 150, 175, 200,
VZA4141-21 pc. VZA4221-M013 pcs. VZA4241-23 pcs. VVZ4000-31A-11 pc. VVZ4000-31A-21 pc. Base mounted 2 position single 2 position double Sub-plate Assembly Part No.: VZA4000-S01 02 Thread type Mounting bolt and gasket are not included.
Formula: L5 = 20n + 8 L3 = 20n + 26 n: Stations (Max. 20 stations) Dimensions L n 2 3 123 112.5 86 18.5 68 4 148 137.5 106 21 88 5 160.5 150 126 17.5 108 6 185.5 175 146 20 128 7 198 187.5 166 16 148 8 223 212.5 186 18.5 168 9 248 237.5 206 21 188 10 260.5 250 226 17.5 208 11 285.5 275 246 20 228 12 298 287.5 266 16 248 13 323 312.5 286 18.5 268 14 348 337.5 306 21 288 15 360.5 350 326 17.5
255 863 412 1370 100 8 13 13 23 49 44 65 51 108 216 108 216 176 313 176 313 206 686 343 1070 125 42 30 56 42 87 156 87 156 138 207 138 207 168 465 278 708 150 37 26 49 36 77 136 77 136 123 182 123 182 151 411 252 627 175 33 23 44 32 69 121 69 121 111 162 111 162 137 368 230 562 200 30 21 40 29 63 109 63 109 101 146 101 146 126 333 211 509 12 16 20 25 32 40 50 63 80 100 Allowable Rotational
31 53.8 10 127 150 17 36.5 62.9 6 130 153 18.5 37.5 63.9 18.5 8 67.3 25.3 24.3 21 R1/4 49.2 55.8 50.8 25.9 49.8 44.8 18.8 120 143 21 32.6 59 10 122 146 22 34.4 60.8 20.9 12 137 160 17 36.5 62.9 6 140 163 18.5 37.5 63.9 18.5 8 67.3 25.3 24.3 21 R3/8 49.2 57.4 52.4 25.9 51 46 20 130 153 21 32.6 59 10 133 156 22 34.4 60.8 20.9 12 219 237 21 32.6 62.8 18.5 10 86.3 30 29.7 25 R3/8 65.5 67.6 60.1
analog Nil 21 22 23 24 P kPa Applicable to plug connector.
(mm) Stations Symbol 7 180 192 197 8 5 138 150 155 6 159 171 176 3 96 108 113 4 117 129 134 1 54 66 71 2 75 87 92 L1 33 45 50 L2 L3 900 Ejector System Series ZX Vacuum Module: ZA Circuit diagram ZX ZR ZM ZMA ZQ ZH ZU ZL ZY ZF ZP SP ZCUK AMJ + + + + AMV AEP Vacuum port (V) M5 (or M6) HEP Related Equipment 10.7 V V 22.5 21 4.2 901 Vacuum Module: Vacuum Pump System Series ZX [Option] How
Clean series y Copper, Fluorine and Silicone-free + Low Particle Generation For details, refer to the Clean Series/Low Particle Generation section of the Web Catalog. 21 Standard model no.
MLGPM, MLGPL common dimensions (mm) IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking ID IE IF IG IH J K L 79.5 10 10 12 32.5 8.5 9 9 83 M5 M5 M6 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 9.5 10 9 24 30 34 6 7.5 9 18 21 24 32 3 20 25 32 20, 30, 40, 50, 75, 100, 125 150, 175, 200, 250, 300, 350 84 36.5
MLGPM, MLGPL common dimensions (mm) IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking ID IE IF IG IH J K L 79.5 10 10 12 32.5 8.5 9 9 83 M5 M5 M6 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 9.5 10 9 24 30 34 6 7.5 9 18 21 24 32 3 20 25 32 20, 30, 40, 50, 75, 100, 125 150, 175, 200, 250, 300, 350 84 36.5
Standard Stroke Standard stroke (mm) Note) Bore size (mm) Symbol Specifications 25, 50, 75, 100, 125, 150 20 -XA Change of rod end shape 25, 50, 75, 100, 125, 150 25 25, 50, 75, 100, 125, 150, 200 32 25, 50, 75, 100, 125, 150, 200, 250 40 Note 1) Intermediate stroke except mentioned above is produced upon receipt of order.
150 18 7 185.5 175 160.5 12.5 8 198 187.5 171 13.5 2 148 137.5 118.5 15 3 160.5 150 129 16 4 173 162.5 139.5 17 5 185.5 175 150 18 6 185.5 175 160.5 12.5 7 198 187.5 171 13.5 8 210.5 200 181.5 14.5 L1 L2 L3 L4 L1 L2 L3 L4 26 Cassette Type Manifold Series SZ3000 Dimensions/SZ3000: Serial Transmission Type SS5Z3-60S DB Stations Scale: 37% [With external pilot] 2-One-touch fitting (X,PE ports
21 21 Light/Surge voltage suppressor Light/Surge voltage suppressor Light/Surge voltage suppressor SOL.B SOL.B SOL.B Station 2 Station 2 Station 2 4 4 4 SOL.A SOL.A SOL.A 3 3 3 Light/Surge voltage suppressor Light/Surge voltage suppressor Light/Surge voltage suppressor SOL.B SOL.B SOL.B Station 1 Station 1 Station 1 2 2 2 SOL.A SOL.A Triangle mark SOL.A 1 1 1 Triangle mark Triangle mark
21 21 Light/Surge voltage suppressor Light/Surge voltage suppressor Light/Surge voltage suppressor SOL.B SOL.B SOL.B Station 2 Station 2 Station 2 4 4 4 SOL.A SOL.A SOL.A 3 3 3 Light/Surge voltage suppressor Light/Surge voltage suppressor Light/Surge voltage suppressor SOL.B SOL.B SOL.B Station 1 Station 1 Station 1 2 2 2 SOL.A SOL.A SOL.A Triangle mark 1 1 1 Triangle mark Triangle mark
840 21 35 37 41 38 44 04 FGDTB 210 1200 23 46 50 56 50 63 06 FGDFB FGESA Note 2) 410 3000 45 90 120 140 100 160 10 FGELA Note 2) 410 3600 50 120 140 170 110 210 20 FGETA FGESB Note 2) 800 3300 70 140 150 160 120 170 10 FGELB Note 2) 800 4200 90 170 180 210 140 230 20 FGETB FGESC Note 2) 1100 3400 83 150 160 170 120 170 10 FGELC Note 2) 1200 4400 120 190 200 220 150 230 20 FGETC FGGSB 160
27 80 I-G08 18 28 71 21 38 50 M22 x 1.5 21 27 18 100 Y-G10 79 24 44 55 M26 x 1.5 24 31 100 I-G10 22 32 79 21 44 55 M26 x 1.5 24 31 22 Applicable bore size (mm) Applicable pin part no.
12 I 12 5 21 8 6 21 8 6.2 27 ZPT40g 40 43 18.5 6 8 6.2 32 6.5 3.3 2PTSOl!
B B B B AC10B AC20B AC25B AC30B AC40B AC40B-06 AC50B AC55B AC60B 70 114 176 156 150 151 159 179 154 153 216 196 190 191 218 192 198 193 297 277 271 272 290 310 285 284 313 293 287 288 8 F.R.L.
Note) 100 100 kW 125 125 kW 150 150 kW Note) Note that the above values are for reference only.