Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

Move Speed Position Accel Decel PushingF TriggerLV PushingSp Moving F Area1 Area2 In posn mm/s mm mm/s2 mm/s2 mm/s mm mm mm 0 ABS 100 20.00 1000 1000 0 0 0 100 18.00 22.50 0.5 1 ABS 50 10.00 1000 1000 70 60 5 100 6.0 12.0 1.5 63 ABS 20 5.00 500 500 0 0 0 100 3.0 8.0 1.2 Caution Writing of the step data should be performed while the electric actuator is stopped. 39 - Details of step data

Air Cylinder Series MB

range B FD FE FT FX FY FZ Fd Front flange/(F) 32 40 50 63 80 100 25 31 38.5 39.5 45.5 54 125 to 1400 138 14 7 20 180 102 216 57.5 to 700 to 800 to 1000 to 1000 to 1000 to 1000 50 55 70 80 100 120 7 9 9 9 12 14 3 3 2 2 4 4 10 10 12 12 16 16 64 72 90 100 126 150 32 36 45 50 63 75 79 90 110 120 153 178 Port Cushion valve 4-FD Fd FY B Without air cushion Bore size (mm) FX FZ ZZ FT FE 32 40 147

Modular F.R.L. Unit

33 24 41.5 30 2 Note 1) 65 29.5 5.5 3.2 50 2.5 132 143 28 80 110 7 14 55 35 41 28.5 64 13 7 4 71 0 184 146 31 80 110 7 14 35 55 41 30.5 10 66 7 4 71 187 3.5 183 36 105 145 18 9 40 50 72.5 35 74 12 9 4 88 222 3.5 185 36 105 155 9 18 40 77.5 50 74 35 9 4.6 88 12 224 3 264 43 105 186 11 20 93 50 70 44.5 84 16 11 6.4 115 3.3 303 277 43 105 191 11 20 50 98 70 44.5 16 84 11 6.4 117.5 316

Smooth Cylinder/Low Speed Cylinder

80 M10 x 1.5 depth 22 37 3 40 25 40 22 Up to 300 110 60 71 16 10 M26 x 1.5 41 100 37 3 M12 x 1.75 depth 22 40 30 50 26 (mm) GB Rc, NPT port GB G port Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 S TB TA ZZ GA 12 P 1/8 GA 12 P M5 x 0.8 11 12 12 77 11 114 Up to 200 11 12 12 77 11 119 12 1/8 12 M5 x 0.8 Up to 300 11 12 10 79 11 121 12 1/8 10 1/8 Up to 300 12 13 10 87 12 139 13

HRX-OM-X084

The weight will increase by 2kg when option T1 [Inverter pump] is selected. 12: Copper is not included when option M [Applicable to deionized water piping] is selected. 13: When option DM [Electric conductivity control + Applicable to deionized water pipng] is selected, these materials are included. 14: If the altitude is 1000 m or more, please refer to "P.3-3 When Thermo-chiller installation

Table of Contents

-12-16-16 ZH20DL-12-16-16 12 12 16 16 15.8 35.5 50 17 10 15.8 35.5 50 10 17.2 38.5 54.3 12 17.2 38.5 54.3 12 12 12 16 16 17 21.7 21.7 One-touch and screw-in connection Applicable tubing diameter N Applicable tubing diameter E S type: White color L type: Black color (Mounting hole) B C D E F G H Model A ZH18DS-12-03-12 ZH18DL-12-03-12 ZH20DS-12-04-16 ZH20DL-12-04-16 12 12 12 12 110 52.45 42

42

Maximum stations are 12.

Modular F.R.L. Unit

Failure to follow this procedure can cause damage to the knob and the outlet pressure 0.1 0.1 0 3000 4000 1000 2000 Flow rate L/min (ANR) 0 2000 Flow rate L/min (ANR) 0 1000 3000 0 Conditions: Inlet pressure 0.7MPa may fluctuate. Outlet pressure 0.2MPa Pull the pressure regulator knob to unlock.

JXCx-OMX0009

[Normal mode] Step data example Pushing Pushing Moving In Position Acceleration Trigger LV AREA 1 AREA 2 No Movement Speed Deceleration force speed force position [mm/s2] [mm/s2] . mode [mm/s] [mm] [] [mm] [mm] [] [mm/s] [] [mm] 0 1 ABS 100 100.00 1000 1000 50 40 10 100 0 0 5 2 ABS 50 50.00 1000 1000 0 0 0 100 0 0 0.1 (E.g.) Flow chart Controller Select/input Step No.1.

Membrane Air Dryer

1000 300 150 Rated conditions are 0.7 MPa of inlet air pressure and 25oC of inlet air temperature.

Fieldbus system Analog unit

When the upper limit of the scale is set to 5000, and the lower limit of the scale is set to 1000, the result will be as follows. 1000 1 V is input 2000 2 V is input 3000 3 V is input 4000 4 V is input 5000 5 V is input 3. The resolution from 1 to 5 V is 1/1000 based on the calculation (5 V 1 V) / (5000 1000) = 1/1000.

High performance type Step Motor Controller (Servo/24 VDC)

(Using Step No.2) [Normal mode] Step data example Pushing Trigger Pushing Moving Move Accele Decele Speed Position Area1 Area2 In position No. ration ration force L V speed mm/s force ment MOD mm/s mm mm mm mm mm/s2 mm/s2 % % % 0 1 Absolute 100 100.00 1000 1000 50 40 10 100 0 0 5 2 Absolute 50 50.00 1000 1000 0 0 0 100 0 0 0.1 Flow chart (example) Controller (1) Select/ input No.1 (Turn

New

Electrical option Piping option Port thread Special voltage Electrical entry/Electrical option Symbol Port thread Specifications Symbol Electrical entry 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC 12 VDC 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC 12 VDC 24 VDC 100 VAC 110 VAC 200 VAC 230 VAC 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

V 12 V IC circuit 5 V, 12 V Relay, PLC Diagnostic indication (2-color indicator) Yes Grommet 24 V 12 V IC circuit 5 V, 12 V Water resistant (2-color indicator) M9PAV1 M9PA1 M9BAV1 M9BA1 12 V 3-wire (NPN equivalent) Grommet 24 V A96V A96 IC circuit 5 V Yes A93V2 A93 A90 IC circuit 100 V Relay, PLC 2-wire 12 V A90V No 100 V or less 1 Water resistant type auto switches can be mounted

REC

40 200 to 1000 Use SMC recommended speed controller.

Compressed Air Cleaning Filter Series

AMF80/90/1000 N-4 Pressure outlet (IN side) N-5 Pressure outlet (OUT side) IN OUT N-2 N-1 Component Parts/Material Model AMF800/900/1000 SGP-E: SS400 SGP-E: SS400 AMF801/901 Note No. Description 1 2 Filter case Cover SGP-E: SS400 Element SS400 Replacement Parts Model AMF800 AMF801 AMF900 AMF901 AMF1000 No.

LECP6_C

W W 1 1 W W 2 2 1 1 11 11 12 12 1 32 - 73 () 12 1. CW [CW] 2. CCW [CCW] 12 1. [] 2.

Digital Pressure Switch ( compatible)

Apply a tightening torque of 8 to 12 Nm.

Short Stroke Electric Actuator Series LX

234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2 5 6 12 With brake 274 CE Marking _ Page 282 Made to Order AC servomotor specification _ 288 Low particulate generation specification _ 294 Construction _ 296 Mounting _ 299

Ionizer

How to Order IZS31 CP X13 L (Tolerance 1%) Cable length 60 L: Cable length Symbol 7 01 02 04 05 06 07 08 09 11 12 13 14 15 16 17 18 19 20 1000 mm 2000 mm 4000 mm 5000 mm 6000 mm 7000 mm 8000 mm 9000 mm 11000 mm 12000 mm 13000 mm 14000 mm 15000 mm 16000 mm 17000 mm 18000 mm 19000 mm 20 mm (Red) 1 12 (6.2) 3 Cable Specifications No. of cable wire 12 0.14 mm2 (AWG26) 0.48 mm Nominal cross section