XM, XY x 10-11 (FKM) 1.3 x 10-9 CYV Q1 R1 R2 R3 S1 T1 U1 Kalrez 4079 SS592 SS630 SSE38 1232-70 3310-75 1.3 x 10-10 (FKM) Note 1) Values at ambient temperatures, excluding gas permeation.
Dimensions (mm) 1in = 25.4mm MSUA7 MSUA7-S, SE Scale: 60% Top ports/MSUA7-SE C 8-M4 x 0.7 depth 8 A port B port 67 13 2-M5 x 0.8 14 B 41 50 33 37 4-M5 x 0.8 depth 7 22.5 5 +0.025 0 3H9 A Long groove depth 5 (positioning pin hole) 22.5 47h9 0 0.062 +0.052 0 26H9 36 +0.030 0 3-4H9 depth 4 ( A , B , C ) 4 3 2-5.5 through 3-R2 3-R2 4.5 19 10.5 13 48h9 0 0.062 36 7 6 22.3 10.5 44 3 11 10 58.5
(EXH1) R1 R2 (B)2 4(A) (B)2 4(A) (R2)3 1 5(R1) (P) (R2)3 1 5(R1) (P) 3(R2) 1(P) 5(R1) JIS () Z (B)2 (A)4 1:P 2:B 3:R2 4:A 5:R1 1:P(SUP) 2:B(CYL.1) 3:R2(EXH.1) 4:A(CYL.2) 5:R1(EXH.2) 1:P 4:A 2:B 5:R1 3:R2 EZTZDZLZMZ DC24V ) 8 VF1000-OMP0001 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 (VF1000/3000 (VF1000/3000 (VF1000/3000 (VF1000/3000 ) ) ) ) PE 1) 1) 1) 1) 2) 2
Specification for Option T 11 1 Safety instructions . 11 1 11 2 Specifications . 11 1 11 3 Remote operation . 11 1 11 4 How to connect the power supply and signal cable . 11 2 11 5 How to re-start the operation . 11 2 11 6 Electric circuit . 11 3 Chapter 12 Specification for Option V 12 1 Safety instructions . 12 1 12 2 Specifications . 12 1 12 3 How to perform maintenance . 12 2 12 4 Electric
4.5 Mounting hole Pilot port (A side) 2-M5 x 0.8 body side Pilot port (A side) 2-M5 x 0.8 sub-plate side (R1, R2 port) (P , A, B port) Pilot port (B side) Sub-plate side 5-3-8
T Connecting thread KBB1-M5 KBB1-M6 KBB3-R1 KBB4-R2 Rc(PT)1 4 Rc(PT)1 8 M6 X 1 M5 X 0.8 T Connecting thread Part No.
Mounting P 11 8. Environment P 11 9. Lubricant oil P 11 10. Air source P 11 -2 - Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.
isl'r t-t 2 300 0lhy4 1 8?.6 6.4 ,7 f9.9 ( o E SC!
Plug-in type Non plug-in type VVZS3000-22A-1 VVZS3000-22A-2 VFN G L M KZ D Cylinder side pressure Check valve Applicable valve model VZS3450-FZ VZS34504(A) 2(B) 3(R2) 5(R1) 3(R2) 5(R1) 3(R2) 5(R1) 210 Ncm3/ min or less Solenoid one side energized 1(P) 210 Ncm3/ min or less Leakage 0.5 MPa Solenoid both sides energized 1(P) Piston SUP side pressure P1 SUP side pressure P1 (MPa) 0 Operating
-6 11-3 IDU Series 10-3 10 2 IDX-OM-W029 11 T 11 T T 11-2, 11-3 11-1 1. 2. 3.
T 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-2 11-6 . 11-3 12 V 12-1 . 12-1 12-2 . 12-2 12-3 . 12-3 12-4 . 12-3 13 13-1 . 13-1 2 IDX-OM-W032 i i i 1 () OFF 3 ON OFF i 1 1 3 IDFA Series i-1 i 1 IDX-OM-W032 i i 2 5 i 2 1 IDFA Series i-2 i 2 IDX-OM-W032 i i 2 2 i 2 3 50 i 2 4 i 2 5 0 IDFA Series i-2 i 3 IDX-OM-W032 i i 2 6 WARNING !
3 29 15 16 10 22 8 31 18 51.5 6 40 78 Angle adjustment bolt 2-5.5 through 2-9.5 depth of counter bore 3 3-R2 11 2 10 +0.03 0 3-4H9 long groove depth 4 (one each on three sides) 0 -0.062 47h9 M5 x 0.8 Port A M5 x 0.8 Port B 4-M5 x 0.8 depth 8 8 22 8 12 25 11 6 6 29 Side A Side B 41 12-11-14 15 Rotary Gripper Series MRHQ MRHQ20 A MHZ B 48 59 MHF 78 MHL MHR 38.5 4-M6 x 1 depth 10 51 MHK Courtesy
M 11 M 11-1 ( ) IDF Series 11-1 11 1 IDX-OM-W026 11 M 11-2 ADM200 IDF22E-**-M IDF37E-**-M IDF55E-**-M IDF75E-**-M IDF-S0090 1.0MPa 1 1 2 / AC200V(50/60Hz) 4W (10, 0.95m) (10, 0.95m) 11-3 (1 1 )() 11-4 M 6-4 6-3 T 13-6 13-3 IDF Series 11-2 11 2 IDX-OM-W026 12 R 12 R 12-1 12-2 1 AC100V AC200V INOUT IDF22E/37E/55E-**-R 10A 30mA IDF75E-**-R 15A 30mA IDF Series 12-
Specification for Option M 11 1 Safety instructions . 11 1 11 2 Specifications . 11 2 11 3 Cautions for handling the motor type auto drain . 11 2 11 4 Electric circuit . 11 2 Chapter 12 Specification for Option R 12 1 Safety instructions . 12 1 12 2 Specifications . 12 1 12 3 Power supply connection procedure . 12 2 12 4 Cautions for handling the GFCI . 12 3 12 5 Electric circuit . 12 3
Option T . 11-1 11.1 SAFETY INSTRUCTIONS FOR USE . 11-1 11.2 OPERATION / ERROR SIGNAL OUTPUT . 11-1 11.3 REMOTE OPERATION . 11-2 11.4 CONNECT THE POWER CABLE AND SIGNAL CABLE . 11-3 11.5 ELECTRIC CIRCUIT . 11-4 Chapter 12 Option V . 12-1 12.1 SAFETY INSTRUCTIONS FOR USE . 12-1 12.2 SPECIFICATIONS . 12-1 12.3 MAINTENANCE . 12-2 Chapter 13 Inspection record . 13-1 13.1 INSPECTION RECORD .
T . 11-1 11.1 . 11-1 11.2 . 11-1 11.3 . 11-2 11.4 . 11-3 11.5 . 11-4 12 V . 12-1 12.1 . 12-1 12.2 . 12-1 12.3 . 12-2 13 . 13-1 13.1 . 13-1 IDFC60/70/80/90 Series IDX-OM-W095 1 1.1 () 6.2 1.1.1 3 IDFC60/70/80/90 Series 1-1 IDX-OM-W095 1.2 6 1.2.1 1.2.2 50 1.2.3 0 IDFC60/70/80/90 Series 1-2 IDX-OM-W095 1.2.4 IDFC60/70/80/90 Series 1-3 IDX-OM-W095 1.2.5 SERIAL No.
proportional valve (VEP type) Current 5 (R1) 4 (A) 1(P) 2 (B) 3 (R2) IRV Simplifying circuit design Space-saving and piping work eliminated 2 (A) 1 (P) Selection of inlet pressure or atmosphere 3 (R) 5 (R1) 4 (A) VEX1 1(P) 2 (B) 3 (R2) SRH SRP SRF System Diagram ARX20 Power amplifier VEA25 VCHR Control circuit Voltage Current ITV 0 to 5 VDC 4 (A) IC 2 (B) PVQ Electro-pneumatic proportional
Option R .11-1 11.1 SAFETY INSTRUCTIONS FOR USE . 11-1 11.2 EARTH LEAKAGE BREAKER SPECIFICATION . 11-1 11.3 CONNECTION OF POWER SUPPLY . 11-2 Chapter 12 Option T . 12-1 12.1 SAFETY INSTRUCTIONS FOR USE . 12-1 12.2 OPERATION / ERROR SIGNAL OUTPUT . 12-1 12.3 REMOTE OPERATION . 12-2 12.4 CONNECT THE POWER CABLE AND SIGNAL CABLE . 12-3 12.5 ELECTRIC CIRCUIT . 12-4 Chapter 13 Option V . 13-1
Applicable bore size (mm) Applicable bore size (mm) A B L L1 L2 MM NX R1 R2 U A NDd9 NDH10 B L1 L2 MM NDH10 NX R1 R2 U Part no. Part no.
R .11-1 11.1 . 11-1 11.2 . 11-1 11.3 . 11-2 12 T . 12-1 12.1 . 12-1 12.2 . 12-1 12.3 . 12-2 12.4 . 12-3 12.5 . 12-4 13 V . 12-5 13.1 . 13-1 13.2 . 13-1 13.3 . 13-2 14 . 14-1 14.1 . 14-1 IDF60/70/80/90 Series IDX-OM-W093 1 1.1 () 6.2 1.1.1 3 IDF60/70/80/90 Series 1-1 IDX-OM-W093 1.2 6 1.2.1 1.2.2 50 1.2.3 0 IDF60/70/80/90 Series 1-2 IDX-OM-W093 1.2.4 IDF60/70/80/90