High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

[mm] Model L A B n C D E Without lock With lock 11-LEJS40S-200523.5 563.5 206 260 6 1 200 80 11-LEJS40S-300623.5 663.5 306 360 6 1 200 180 11-LEJS40S-400723.5 763.5 406 460 8 2 400 80 11-LEJS40S-500823.5 863.5 506 560 8 2 400 180 11-LEJS40S-600923.5 963.5 606 660 10 3 600 80 11-LEJS40S-7001023.5 1063.5 706 760 10 3 600 180 11-LEJS40S-8001123.5 1163.5 806 860 12 4 800 80 11-LEJS40S-9001223.5

42

Maximum stations are 18. 18 6 19 7 20 8 21 9 22 10 23 11 24 1.

Electric Actuator with Integrated Guide

point distance mm LTF8 Horizontal Lateral 10 10 Load 100% Load 100% Load 50% 1000 Load 50% 10 Amount of deflection m Amount of deflection m 100 1000 10 100 1 No load 10 No load 0.1 1 0.01 100 1000 100 1000 Load point distance mm Load point distance mm w w With single end support and table moved to the end of the stroke Load point distance Load point distance Figure 2.

CV/MVGQ

Different sides RZQ 2 Same side 100 100 100 D-A3 D-G39 D-K39 35 + 30 (n 2) n = 2, 3, 4 100 + 30 (n 2) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4 Different sides MI W S n 100 + 100 (n 2) n = 2, 4, 6, 8 Same side CEP1 10 35 55 75 80 90 100 100 100 75 80 90 1 Different sides CE1 2 Same side 35 + 30 (n 2) n = 2, 3, 4 75 + 30 (

JA/JAH/JB/JS

7 8 8 11 11 11 13.5 13.5 16 20 20 20 24 6.6 6.6 6.6 9 9 9 9 9 11 11 11 18 22 6 6 6 9 9 9 12 12 16 19 19 21 29 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 36 40 40 52 52 52 45 45 55 65 65 72 100 48 52 52 70 70 70 19 25 25 32 32 32 65 65 75 90 90 100 150 0.08 0.12 0.12 0.28 0.28 0.28 0.63 0.63 1.15 2.07 2.07 2.8 9 1100 2500 2500 4400 4400 4400 11000 11000 18000 28000 28000 28000 55000 1 1.5

JA/JAH/JB/JS

7 8 8 11 11 11 13.5 13.5 16 20 20 20 24 6.6 6.6 6.6 9 9 9 9 9 11 11 11 18 22 6 6 6 9 9 9 12 12 16 19 19 21 29 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 36 40 40 52 52 52 45 45 55 65 65 72 100 48 52 52 70 70 70 19 25 25 32 32 32 65 65 75 90 90 100 150 0.08 0.12 0.12 0.28 0.28 0.28 0.63 0.63 1.15 2.07 2.07 2.8 9 1100 2500 2500 4400 4400 4400 11000 11000 18000 28000 28000 28000 55000 1 1.5

Modular F.R.L. Units

v*11 v*11 v*11 v*11 *1 Drain guide is NPT1/8 (applicable to the AF20-A) and NPT1/4 (applicable to the AF30-A to AF60-A).

Step Motor Controller

13 7 6 9 8 11 10 3 Connector B terminal no.

JXCx-OMU0026

0.0 0.0 0.5 Axis 2 CIR-L 40.00 100 0.0 0.0 0.5 2 Axis 3 0.00 100 0.0 0.0 0.5 Axis 4 20.00 100 0.0 0.0 0.5 Axis 1 CIR-R 100 0.00 1000 1000 100 0.0 0.0 0.5 Axis 2 CIR-R 0.00 100 0.0 0.0 0.5 3 Axis 3 0.00 100 0.0 0.0 0.5 Axis 4 20.00 100 0.0 0.0 0.5 Axis 1 CIR-3 100 0.00 1000 1000 100 0.0 0.0 0.5 Axis 2 CIR-3 -40.00 100 0.0 0.0 0.5 4 Axis 3 -20.00 100 0.0 0.0 0.5 Axis 4 -20.00 100 0.0 0.0 0.5

51

70 82 100 5.5 5.5 6.6 6.6 9 11 11 14 6 7 7 8 9 9 11 14 12 12.5 11 10.5 15 15 17 20 6 7 7.5 7.5 12 12 16 16 20 23 23 29 35 35 44 44 4 4 4 5.5 8 8 9.5 9.5 26 31 38 47 58 72 89 110 M4 x 0.7 M8 x 1.25 24 29 35.5 44 55 69 80 100 M5 x 0.8 57 60 62 62 84 84 104 105 Width across flats 6 length 3.5 M5 x 0.8 M10 x 1.25 M5 x 0.8 Width across flats 8 length 3.5 M5 x 0.8 M10 x 1.25 Rc1/8 Width across

SFOD-OMT0010

Mounting the controller . 11 3.3 Install the setting software and the driver . 11 3.4 Wiring and connection . 11 3.5 Power supply, Start-up of controller setting software, and Alarm check 11 (1) Supplying power . 11 (2) Start-up of controller setting software . 12 (3) Alarm check. 13 3.6 Parameters and Step data . 14 (1) Select the actuator. 14 (2) Setting parameters . 17 (3) Step data settings

Air Slide Table

Table (4) Maximum Allowable Moment: Mmax (Nm) 0.4 Pitch/Yaw moment: Mpmax/Mymax Stroke (mm) Roll moment: Mrmax 0.3 Stroke (mm) 20 Model 10 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150 0.2 MXQR 6 MXQR 8 MXQR12 MXQR16 MXQR20 MXQR25 1.4 1.4 1.4 2.8 2.8 3.5 3.5 3.5 5.1 5.1 2.0 2.0 2.8 3.7 7.9 7.9 5.1 5.1 6.0 6.9 7.4 7.4 50 100 200 300 500 700 15 14 4.7 4.7 4.7 7.2 7.2 15 11 11

SX

) SY3000-11-24 Mounting Screw Tightening Torques SX5000 SY5000-11-10 M2: 0.17 Nm M3: 0.8 Nm M4: 1.4 Nm SX7000 SY7000-11-9 Warning When mounting a valve or spacer on the manifold base or sub-plate, etc., those mounting directions are determined.

Modular Design with Uniform Body Style

*11 *11 *11 *11 *1 Set the inlet pressure to at least 0.05 MPa higher than the set pressure. *2 Options B, G, H, and M are not assembled and supplied loose at the time of shipment. *3 The assembly consists of a bracket and set nuts (applicable to the AR20(K)-D to AR40(K)-D).

Air Slide Table Series MXS

MXS12-75 MXS12-50 MXS12-75 0.03 0.025 MXS12-30 MXS12-40 MXS12-50 MXS12-75 MXS12-20 MXS12-10 MXS12-100 MXS12-40 MXS12-30 MXS12-20 0.06 0.020 0.02 MXS12-100 MXS12-10 0.015 0.04 MXS12-50 MXS12-40 MXS12-30 0.010 0.01 MXS12-20 MXS12-10 0.02 0.005 20 40 60 80 100 120 0 0 0 20 40 60 80 100 120 60 20 40 80 100 120 Load (N) Load (N) Load (N) 56 Air Slide Table Series MXS The graphs below show the

CG1

4.5 6 125 101 100 28.5 30 188.5 (202.5) 197.5 (211.5) +l CJP 60 (74) 65 150 121 120 192 (206) 201 (215) +l Note) ( ): Long stroke CJ2 Flange (mm) CM2 Stroke range Rear flange ZZ Bore (mm) FT FD FX F E B C85 Without rod boot With rod boot Front Rear 20 25 32 40 50 63 80 100 112 118 120 132+l 140+l 142+l 6 7 7 8 9 9 11 14 5.5 5.5 6.6 6.6 9 11 11 14 28 32 38 46 58 70 82 100 2 2 2 2 2 2 3 3

Floating Joint

20 25 32 32, 40 40 32, 40 50 50, 63 80 100 100 125 160 13 17 17 22 22 22 27 27 32 41 41 41 55 7 8 8 11 11 11 13.5 13.5 16 20 20 20 24 6.6 6.6 6.6 9 9 9 9 9 11 11 11 18 22 6 6 6 9 9 9 12 12 16 19 19 21 29 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 36 40 40 52 52 52 45 45 55 65 65 72 100 48 52 52 70 70 70 19 25 25 32 32 32 65 65 75 90 90 100 150 0.08 0.12 0.12 0.28 0.28 0.28 0.63 0.63 1.15

CV/MVGQ

J Bore size (mm) Stroke range (mm) A AL B B1 C CDH10 CX D F H1 E I J K L LL D50 63 80 100 +0.070 0 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 35 35 40 40 12 16 20 25 83 83 84 85 98 100 105 110 7 7 11 11 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 18 18 20 20 11 11 13 16 10 10 14 14 40 40 52 52 20 20 25 30 52 64 78 92 27 27 32 41 70 85 102 116 Up to 600 Up to 600 Up to 750 Up to 750 18 25 31.5 35.5

CRQ2

D20Size Page 10 15 20 30 40 Series Variations Rotating angle 80 to 100 170 to 190 Single shaft S Shaft type Double shaft W Standard Made to Order 11-8-2 to 11-8-9 None Rubber bumper Cushion Air cushion With auto switch Variations 20Copper-free Single shaft with four chamfers X Double shaft key Y Double shaft with four chamfers Z 11-8-10 Shaft type 11-8-11 Single round shaft T Double shaft

Profile Design ISO/VDMA Air Cylinder Series CP95

11 95 90 50 100 113 60 89 41 5 25 10 55 20 20 11 12 115 110 60 Mounting type E Bore d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 32 11 10 6.6 38 51 10 21 7 18 26 31 32 8 10 40 11 12 6.6 41 54 10 24 9 22 28 35 36 10 11 50 15 12 9 50 65 12 33 11 30 32 45 45 12 12 63 15 16 9 52 67 14 37 11 35 40 50 50 12 15 80 18 16 11 66 86 18 47 12.5 40 50 60 63 14 15 100 18 20 11 76 96 20 55 13.5 50 60 70