High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

[mm] Model L A B n C D E Without lock With lock 11-LEJS40S-200523.5 563.5 206 260 6 1 200 80 11-LEJS40S-300623.5 663.5 306 360 6 1 200 180 11-LEJS40S-400723.5 763.5 406 460 8 2 400 80 11-LEJS40S-500823.5 863.5 506 560 8 2 400 180 11-LEJS40S-600923.5 963.5 606 660 10 3 600 80 11-LEJS40S-7001023.5 1063.5 706 760 10 3 600 180 11-LEJS40S-8001123.5 1163.5 806 860 12 4 800 80 11-LEJS40S-9001223.5

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

B dimension is 125.5 mm. Example Calculation:50, B dimension 50.5 mm (without switch) 50.5 (B dimension) + 75 (st) = 125.5 (mm) 10-4-6 7 Smooth Cylinder Series CQ2Y Dimensions/32 to 50 (Types with auto switch and without auto switch only differ in the A and B dimensions. Please refer to the table below.)

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

U Z A B A B 46 10 to 50 54 14 depth 10.5 63 64 56 15 20 77 10.5 M10 x 1.5 103 7 17 8 60 9 1/4 15 93 47.5 19 56 75, 100 64 53.5 10 to 50 63.5 17.5 depth 13.5 80 73.5 63.5 21 25 98 12.5 M16 x 2.0 132 6 22 10 77 11 3/8 16 112.5 57.5 26 63.5 75, 100 73.5 63 10 to 50 75 17.5 depth 13.5 100 85 73 27 30 117 13 M20 x 2.5 156 6.5 27 12 94 11 3/8 23 132.5 67.5 26 73 75, 100 85 10-4-8 9 Smooth Cylinder

Low Friction Cylinders Series MQ

75, 100 16 15, 30, 45, 60, 75, 100 20 15, 30, 45, 60, 75, 100 25 15, 30, 45, 60, 75, 100 Strokes are available in 1mm increments by installing spacers in standard stroke cylinders.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Lead wire length) 87.2[91.6] 43 3.5 11 5 B A B A 19 10 10.6 Manual override M5 x 0.8 (A, B port) 2-2.6 (For manifold mounting) One-touch fitting (A, B port) Applicable tubing O.D.: 4 and 5/32" : 6, 1/4" (3.2) 32.3 (Light/surge voltage suppressor) + 23 20 12.7 28.1[35.1] 3 11 2-2.6 (For mounting) P R1 15 R2 M5 x 0.8 (P, R1, R2 port) 21 L plug connector (L): 10-SYJ5223-L-M5 M plug connector

MY1

MY1B (Basic type) B A 10 16 20 Mounting position A 27 35 20 B 133 165 90 Operating range l Note) 6.5 8.5 6 MY1M (Slide bearing type) B A 16 20 Mounting position A 90 70 B 110 90 Operating range l Note) 7.5 11 MY1C (Cam follower guide type) B A 16 20 Mounting position A 70 90 B 90 110 Operating range l Note) 11 7.5 MY1H (High precision guide type) B A 10 16 20 Mounting position A 27 35

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

13 34 40 47 19 22 24 80 96 110 100 120 140 0 1 3 24 32 36 63.5 75.5 88 Front flange style: (F) 4-FD B FY FZ FX FT (mm) Stroke range Bore size (mm) B FT FD FX FY FZ 40 50 63 Up to 1000 Up to 1000 Up to 1000 12 16 16 80 100 112 58 61 75 100 125 138 9 9 12 74 78 100 Rear flange style: (G) 4-FD B FY ZZ + Stroke FT FX FZ (mm) Stroke range Bore size (mm) B FT FD FX FY FZ ZZ 40 50 63 Up to 1000

Compact Hydraulic Cylinder

(mm) H I J K L C D E F U A B Z M N O P S Bore size (mm) 32 M10 x 1.5 60 4.5 14 8.5 82 12 16 45 20 31.5 65 14 34 5.5 9 depth 7 Rc1/8 58.5 40 M10 x 1.5 69 5 14 8.5 84 12 16 52 22 35 67 14 40 5.5 9 depth 7 Rc1/8 66 50 M12 x 1.75 86 7 18 11 98 15 20 64 25 41 76 19 50 6.6 11 depth 8 Rc1/4 80 63 M12 x 1.75 103 7 18 11 102 15 20 77 27 47.5 80 19 60 9 14 depth 10.5 Rc1/4 93 80 M16 x 2 132 6 22 11

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

-B12 M12 x 1.75 -B16 M16 x 1.5 1205 Series ZPT ZPT HB-A16 (Male thread) ZPT HB-B (Female thread) 100 125 100 125 M16 x 1.5 (Rc, NPT, NPTF) 8 1 Hexagon width across flats 22 6 6 Hexagon width across flats 24 70 25 70 4 x M5 x 0.8 Width across flats 60 4 x M5 x 0.8 G 11 11 G Width across flats 60 F F E E Y Y 8 10 40 40 C C A A B D B D Dimensions A Dimensions A B C D E F G Y Model B C D E F

2–4

-RA Both ends tapped (CQMA) (mm) Without auto switch With auto switch Stroke range (mm) Bore size (mm) P P EA EB EC B F Q A B F Q A TN TF NN NN TN TF 5 5.5 11.5 M5 x 0.8 M5 x 0.8 40 23 32 10 to 50 50 33 7.5 10.5 45 43 34.4 Rc1/8 NPT1/8 NPT1/8 G1/8 7.5 10.5 G1/8 Rc1/8 NPT1/8 NPT1/8 75, 100 50 33 5 to 50 46.5 29.5 40 Rc1/8 NPT1/8 NPT1/8 G1/8 8 11 G1/8 56.5 39.5 8 11 52 50 41.4 Rc1/8 NPT1

7

Hs Ht A B Hs A B Hs A B Hs Ht B D-P4DW D-M9 D-M9W D-M9A 12 D-A9 Hs D-B54 Note) The above drawing is the switch band mounting example for the D-P4DWS.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

With External Pilot Specifications (Pitch) 24 P=24 48.6 11 25 11.8 20 14.5 13.7 SJ E 3/5 E 3/5 E 3 E 3 4 A A 4 4 A A 4 A 4 A 4 A 4 A 4 A 4 A 4 35.8 40.4 35 SY 58.3 63.9 74.8 B 2 P 1 P 1 B 2 B 2 B 2 B 2 P 1 P 1 B 2 B 2 B 2 B 2 B 2 C2 C2 SV One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 12 3/8" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 8, 5/16" 10, 3/8" 12 X

High Purity Chemical Valve

G H PA C SMC A B N E J B (F) Dimensions (mm) A B C D E F G H J K L M M5 x 0.8 R N Q Model LVC2m LVC3m LVC4m LVC5m LVC6m 30 30 54.5 44 11 79 28.5 13 4 20 37 3.5 23.5 M3 x 0.5 36 47 79 56 16.5 106 43 17.5 7.5 34 46 5.5 39 46 60 96 68 22 131 55 18 8 42 57 5.5 48 Rc 1/8 NPT 1/8 Rc 1/8 NPT 1/8 58 75 129 84 26 154 68 27.5 8 56 71 6.5 62 58 75 138 84 32 165 77 27.5 8 56 71 6.5 71 465 Series LVC

39

CKZ-50A007 CKZ-50A008 CKZ-50A009 NAAMS code ACA201M ACA202M ACA203M NAAMS code ACA211M ACA212M ACA213M Straight-Machined 25 mm Offset-Machined A A B B C C 8F7 through +0.028 +0.013 D 8F7 through +0.028 +0.013 D E E F G F 200.03 10 G 200.03 10 300.025 300.025 11 through 11 through H 300.025 300.025 250.05 I M61.0 H M61.0 150.03 150.03 I R45 6.5 500.05 6.5 18 30 3 10 10 3 18 R6 R6 R25 R25 19

Smooth Cylinder

64 53.5 10 to 50 63.5 17.5 depth 13.5 80 73.5 63.5 21 25 98 12.5 M16 x 2.0 132 6 22 10 77 11 3/8 16 112.5 57.5 26 63.5 75, 100 73.5 63 10 to 50 75 17.5 depth 13.5 100 85 73 27 30 117 13 M20 x 2.5 156 6.5 27 12 94 11 3/8 23 132.5 67.5 26 73 75, 100 85 7 Smooth Cylinder Series CM2Y 20, 25, 32, 40 Specifications and auto switch information not provided below are the same as those of the standard

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

78 28 60 35 6 12 12 30 12 M6 x 1.0 x 18.5l 64 14 2-M6 x 1.0 2-11 counterbore depth 6.3 2-6.9 through CXS32 98 38 96 36 75 44 8 16 14 30 16 M8 x 1.25 x 23l 76 18 2-M6 x 1.0 2-11 counterbore depth 6.3 W X Y T TT U UU V Model PP Q QQ R 4-M5 x 0.8 thread depth 4.5 4-Rc 1/8 thread depth 6.5 4-Rc 1/8 thread depth 6.5 8-M4 x 0.7 thread depth 5.5 8-M5 x 0.8 thread depth 7.5 8-M5 x 0.8 thread depth

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

Prevents Micro-Bubbles

S) LVN TI/ TIL L 49.5 PA A B (mm) Dimensions W PAX (mm) Dimensions W Model LVA20 LVA30 LVA40 LVA50 LVA60 67 2-2 Depth 4 S PB Model LVA2 LVA3 LVA4 LVA5 88.5 11.5 B A SMC 110.5 24 A B SMC 147 29 34.5 K Dimensions (mm) A B Q R P C D E G H J K L M N Model Rc 1/8, 1/4 NPT 1/8, 1/4 LVA1 20 33 49.5 10 27.5 11 4 11 27.5 4.2 M5 x 0.8 Rc 1/4 NPT 1/4 LVA2 57.5 30 36 44 11 31.5 13 4 20 37 3.5 26.5

Rotary Clamp Cylinders

19.5 (20) 23.5 (24) B 11 13.5 19 22.5 20 24 A 73.5 74.5 90 120 92 122 B 8 10.5 16 19.5 17 21 A 70.5 71.5 87 117 89 119 A 70 85.5 115.5 87.5 117.5 B 9 14.5 18 15.5 19.5 A 60.5 61 76 77 92.5 122.5 94.5 124.5 A 73 (73.5) 74 (74.5) 89.5 (90) 119.5 (120) 91.5 (92) 121.5 (122) B 9 11 13.5 16 21.5 25 22.5 26.5 A 56.5 57 72 73 88.5 118.5 90.5 120.5 B 5 7 9.5 12 17.5 21 18.5 22.5 A 63 63.5

17

a XB XAH7 X (Mounting hole position) c d e X0.02 (Pin hole position) XA (mm) XC XL b c d e Bore size (mm) a 6.5 6.5 8.5 11 10.5 10.5 13.5 17.8 5.5 5.5 7.5 10 3.5 4 4.5 7 9.5 11 13.5 18.5 32 40 50 63 Section XX 4 x YY depth YL 4 x MM depth ML 4 x NN through L Z WA 4 x OA through 4 x OB counterbore depth OL Section XX Section XX (OL) HA: T-slot for hexagon bolt T R X0.02 X0.02 DA DB H VA VB