Table of Contents

M1 M2 Weight (g) ASV310F-N01-07 ASV310F-N01-09 ASV310F-N02-07 ASV310F-N02-09 ASV410F-N01-09 ASV410F-N01-11 ASV410F-N02-09 ASV410F-N02-11 ASV410F-N03-09 ASV410F-N03-11 ASV510F-N02-11 ASV510F-N02-13 ASV510F-N03-11 ASV510F-N03-13 ASV510F-N04-11 ASV510F-N04-13 73 73.8 73 73.8 83.1 85.2 83.1 85.2 83.1 85.2 90.2 91.9 90.2 91.9 90.2 91.9 17.2 19.3 17.2 19.3 19.3 23.3 19.3 23.3 19.3 23.3 23.3 26.5

VZ5000

mm H: 600 mm VFS (Lead wire length) VS4 VQ7 EVS VFN (mm) Stations L1 L2 15 306 294 14 287 275 13 268 256 12 249 237 11 230 218 10 211 199 9 192 180 8 173 161 7 154 142 6 135 123 5 116 104 4 97 85 3 78 66 2 59 47 L plug connector (L) DIN terminal (D) M plug connector (M) Built-in One-touch fittings MAX. 10 300 (Lead wire length) C6: MAX. 6 C8: MAX. 6.5 300 (Lead wire length) 2n-One-touch

VEX1

Cylinder Speed Chart Bore size Series CS1/CS2 Pressure 0.5 MPa, Load factor 50% Cylinder stroke 300 mm Average velocity (mm/s) System 125 140 160 180 200 250 300 1000 Vertically upward movement Horizontal movement 900 800 700 600 500 400 300 200 100 0 A 800 900 1000 700 600 500 400 300 200 100 0 B 900 1000 800 700 600 500 400 300 200 100 0 C 800 900 1000 700 600 500 400 300 200 100 0 D 800

ZP

14 18 30.5 37 47 11 14.5 20.5 11 14 18 30.5 37 47 11 14.5 20.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

CA H6 R1 32 E5032 11 10 6.6 38 51 10 21 7 18 260.2 0.6 31 32 8 10 40 E5040 11 12 6.6 41 54 10 24 9 22 280.2 0.6 35 36 10 11 50 E5050 15 12 9 50 65 12 33 11 30 320.2 0.6 45 45 12 12 63 E5063 15 16 9 52 67 14 37 11 35 400.2 0.6 50 50 12 15 80 E5080 18 16 11 66 86 18 47 12.5 40 500.2 0.6 60 63 14 15 100 E5100 18 20 11 76 96 20 55 13.5 50 600.2 0.6 70 71 15 19 125 E5125 20 25 14 94 124

Aluminum High Vacuum Angle Valve

70 170 69 70 95 87 11 3 100 88 196 96 83 110 114 11 3 117 90 235 131 102 130 134 11 3 154 108 300 112 153 180 190 11 3 200 138 315 Note 1) Dimension E applies when heater option is included.

IDG

(Refer to page 14-19-11.)

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

M14 x 1.5 27 1/4 42 11 20 45 153 51 255 52 43 15 59 1/4 stroke 263 271 50 11 M8 x 1.25 7 18 80 11 M18 x 1.5 30 3/8 46 10 21 50 168 58 284 58 52 15 66 1/4 stroke 292 300 63 11 M10 x 1.25 7 18 99 14 M18 x 1.5 31 3/8 48.5 13 23 60 182 58 298 58 52 17.5 66 1/4 stroke 306 314 80 13 M12 x 1.75 10 22 117 17 M22 x 1.5 37 1/2 55 15 23 70 208 71 350 80 65 21.5 80 1/4 stroke 359 368 100 16 M12 x 1.75

Compact

load [kg] Work load [kg] Work load [kg] Work load [kg] 500 500 500 500 m 400 400 400 400 Wall mounting L5 [mm] L5 [mm] L5 [mm] L5 [mm] L5 300 300 300 300 Y 200 200 200 200 100 100 100 100 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 300 300 300 300 L6 200 200 200 200 L6 [mm] L6 [mm] L6 [mm] L6 [mm] m Z 100 100 100

VDW

Refer to page 252 and 253 regarding manifold additions. 249 Series VDW10/20/30 Dimensions VV2DW2 (25.5) 16 1 16 Approx. 300 11 4.6 1 33 24 (19.5) 19.5 R2.3 L3 L2 L1 2 x 1/4 (IN port) (: Thread type) 4.5 9 1 Stations D side 2 3 4 5 n U side VDW23-*G-* VDW23-*G-* VDW23-*G-* VDW23-*G-* 70 31.5 21 18.5 (OUT port) n x 1/8 n x M5 x 0.8 11 P = 22 11 1.5 4.5 54 6 32 6 (19.5) 9.5 11 9.5 11 46 10 24

Manifold Specifications

12 218 200 13 234 216 14 250 232 15 266 248 16 282 264 17 298 280 18 314 296 19 330 312 M plug connector (M) Built-in speed controllers L plug connector (L) DIN terminal (D) MAX. 10 MAX. 11 Applicable cable O.D. 3.5 to 7 300 (Lead wire length) (Lead wire length) 300 : With light/surge voltage suppressor 3-3-44 5 Port Solenoid Valve Base Mounted Series VZ3000 Type 41 Manifold: Side Ported

0.4

Station 9 SOL.B 22 SOL.A 10 Station 10 SOL.B 23 SOL.A 11 Station 11 SOL.B 24 SOL.A 12 Station 12 SOL.B 25 Note) COM. 13 VV5Q21 Positive COM spec. Negative COM spec. The total number of stations is tabulated starting from station one on the D-side. Note) When using the negative common specifications, use valves for negative common. (Refer to page 56.)

5

11 11 D-A59W 13 13 13 14 14 15 D-A3m/A44 9 9 10 11 11 11 D-Y59m/Y69m D-Y7P/Y7mV D-Y7mW/Y7mWV D-Y7BA 5.5 5.5 7 7.5 6.5 5.5 D-F5m/J59 D-F5mW/J59W D-F5BA/F5NT D-F59F 3.5 4 4 4.5 4.5 4.5 D-G39/K39 9 9 9 10 10 11 D-P3DWA 3 4.5 4.5 5 5 5.5 D-P4DW 4 4 4 4.5 4 4.5 DValues which include hysteresis are for guideline purposes only, they are not a guarantee (assuming approximately 30% dispersion) and

15

moment (6 to 15) [Graph 11] Allowable moment (20 to 40) 20 200 CY1S40-Z 10 100 Moment M1, M3 [Nm] Moment M1, M3 [Nm] CY1S15-Z CY1S32-Z CY1S25-Z CY1S10-Z CY1S20-Z CY1S6-Z 1 10 0.5 5 200 300 100 400 100 400 300 200 Piston speed [mm/s] Piston speed [mm/s] M2 M2 [Graph 12] Allowable moment (6 to 15) [Graph 13] Allowable moment (20 to 40) 20 200 CY1S40-Z 10 100 CY1S15-Z CY1S32-Z Moment M2 [Nm

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

SOL.a () (+) SOL.a () (+) Light/surge voltage suppressor Light/surge voltage suppressor 17 16 23 22 24 SOL.b () (+) SOL.b () (+) Station 11 Station 8 SOL.b () (+) Station 11 11 SOL.a () (+) SOL.a () (+) SOL.a () (+) 15 21 Light/surge voltage suppressor Light/surge voltage suppressor Light/surge voltage suppressor SOL.b () (+) SOL.b () (+) Station 2 Station 2 15 4 4 SOL.b () (+) SOL.a ()

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com F Maximum speed (mm/s) Load center of gravity position l (mm) Maximum speed (mm/s) up to 300 up to 500 up to 700 up to 300 up to 500 up to 100 up to 200 up to 300 Graph (1) Graph (2) Graph (3) Graph (4) Graph (5) Graph (6) Graph (7) Graph (8) l: This

e

200 300 400 500 1000 1500 1 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 Speed (mm/s) Speed (mm/s) Speed (mm/s) 1121 Model Selection Maximum Allowable Moment/Maximum Load Mass Moment: E-MY2HT (Double Axis) E-MY2HT/M1 E-MY2HT/M3 E-MY2HT/M2 300 300 300 200 200 200 100 100 100 Moment (NNm) Moment (NNm) Moment (NNm) 50 50 50 40 40 40 E-MY2HT25 E-MY2HT25 E-MY2HT25 30 30 30 20 20

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Note) Note) For the special voltages, please consult with SMC. 4-14-11 Body Ported 12 Series VQZ100/200/300 How to Order Manifold: VQZ200/300 VV3QZ 2 2 08 C D Series Option 2 3 VQZ200 VQZ300 Nil None DIN rail mounting style (With DIN rail in standard length) DIN rail mounting style (Without DIN rail ) D DO Note) Note) Order DIN rail separately.

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

Quantity Quantity Stroke Stroke 100 2 4 600 7 14 200 3 6 700 8 16 A = (n 1) x pitch 36 300 4 8 800 9 18 400 5 10 900 10 20 500 6 12 1000 11 22 93 Series LTF Deflection Data Deflection Data Calculated values based on the bodys sectional secondary moment.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

External pilot port 11 11 67 VQZ L plug connector (L) DIN connector (Y) VQD 148 (3 Position)<150> 135 (Double)<137> 300 155.5 (3 Position) MAX.10 (Lead wire length) VZS 142.5 (Double) 97.5 (Single)<98.5> Indicator light Pg.7 101.5 (Single) 65.5<66.5> VFS 69.5 Applicable cord O.D. 3.5 to 7 Indicator light VS 64<67.5> Cover diameter 1.5 R1 R2 5 3 1 P VS7 Cross section 0.23mm2 93.5 86 < >