REA/REB

MQQ M Table (1) Recommended Speed Controller Bore size (mm) Model Elbow type RHC Straight type In-line type MK(2) AS1201F-M5-04-X214 AS1301F-M5-04-X214 AS1001F-04-X214 AS1001F-04-X214 AS2001F-06-X214 AS2001F-06-X214 AS2001F-06-X214 AS2001F-06-X214 AS3001F-08-X214 AS3001F-08-X214 10 15 20 25 32 40 50 63 AS1201F-M5-04-X214 AS1301F-M5-04-X214 RS Q G AS2201F-01-06-X214 AS2301F-01-06-X214 2.

REA/REB

AS2001F-06-X214 AS2001F-06-X214 AS3001F-08-X214 AS3001F-08-X214 10 15 20 25 32 40 50 63 AS1201F-M5-04-X214 AS1301F-M5-04-X214 RS Q G AS2201F-01-06-X214 AS2301F-01-06-X214 2.

Table of Contents

C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread D side U side Stations 1 2 3 Dimensions Formula L1 = 11n + 20 n: Station (Maximum 24) 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread 1 2 3 4 5 6 7 8 9 10 11 12 42 62.5 73 n L L1 L2 L3 152 175 185.5 141 162.5 173 130 150

modular-press-e

7) IS1000M-60 IS1000M-50 Y510-(02) 03 IS1000M-20 IS1000M-30 IS1000M-40 IS1000M-50 IS1000M-60 Y610-03 (04) Y610-(03) 04 T-interface Note 6) Note 7) Y110-M5 Y110-M5 VHS20-01 02 VHS50-06 10 3-port valve for residual pressure release Note 7) VHS30-02 03 VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 E100-M5 Piping adapter Note 7) E500-06 E100-M5 01 IS1000E-2002 03 02 IS1000E-3003 04 Pressure

Modular F.R.L. Pressure Control Equipment

7) IS1000M-60 IS1000M-50 Y510-(02) 03 IS1000M-20 IS1000M-30 IS1000M-40 IS1000M-50 IS1000M-60 Y610-03 (04) Y610-(03) 04 T-interface Note 6) Note 7) Y110-M5 Y110-M5 VHS20-01 02 VHS50-06 10 3-port valve for residual pressure release Note 7) VHS30-02 03 VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 E100-M5 Piping adapter Note 7) E500-06 E100-M5 01 IS1000E-2002 03 02 IS1000E-3003 04 Pressure

KB

Style Tube size/ Connecting female thread size Body size KBV1-M5 KBV1-M6 KBV2-M5 M5 X 0.8 M6 X 1 M5 X 0.8 M6 X 1 KBV1-04 KBV1-06 KBV2-06 4 6 KBV2-M6 KBV2-R1 KBV3-R1 KBV3-R2 KBV4-R2 KBV4-R3 KBV2-08 KBV3-08 8 Branch elbow module: KBZ 1 8 Rc(PT) KBV3-10 10 KBV3-12 12 KBV4-12 KBV4-16 Tube O.D. Part No.

Table of Contents

4.3 8 4.5 M5 x 0.8 15 10 19 53 37 10 10 6 36 10.5 8.5 83 M5 18 18 24 M5 x 0.8 13 M5 x 0.8 5.6 9.5 5.5 1/8 12.5 10.5 25 53.5 37.5 12 10 6 42 11.5 9 93 M5 21 21 30 M6 x 1.0 15 M6 x 1.0 5.6 9.5 5.5 1/8 12.5 13.5 28.5 WA WB Bore size (mm) Q R S T U VA VB X XA XB YY YL Z 30 st or less Over 30 st to 100 st Over 300 st 30 st or less Over 30 st to 100 st 23 Over 100 st to 200 st 200 Over 200 st

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric size Inch size Nil S Resin Stainless

LEC-OM02704CN

UVW UVW A61 255 13 0 2 10 12 10 A8A RS-422 1. 2. 3. A8D CC-Link 1(STATION NO.)065 164 2(MODE)04 (MODE)04 3 4CC-Link 1CC-Link 2 5CC-Link 6CC-Link 7 8CC-Link 9. CC-Link A8E ( ) 1. () 2. () () () CPU 888 888 . 888 10 13 10 10.4.3 (AE3) 30 (AE0) 1(AE1) A98AE6OFF MR Configurator A90 1. 2. // DOG 3. DOG 1. 2. // DOG 3. DOG (A25) 4. () 23 5. 6.

I

from the VY Valve. 02 14 2.0 3 03 38 3.3 body Ported Type 04 12 3.9 Terminal Designations are as follows: 04 12 7.2 5 06 34 8.9 1 = 24v Power Supply 2 = Control Signal 3 = Common Negative for both power and signal. 10 1 10 5% 2% + -2% 7 10 1 114 17 12 114 18 9 14 112 2 33 20 2 37 Courtesy of Steven Engineering, Inc. !

VP300/500/700

Common exhaust: VV3P7-41Stations 1-04 (G) (E) (T) (D, Y) N.C.

LEC-OM07605CN

) 10 [V] 10 [V] 10 [pulse] 10 [pulse] 0 0 10 [pulse] 10 [pulse] -10 [V] -10 [V] CW CW 21 CCW CCW 0A (123) (10V/1Mpulses) 0B (123) (10V/10Mpulses) 10 [V] 10 [V] 1 [Mpulse] 10 [Mpulse] 0 0 1 [Mpulse] 10 [Mpulse] -10 [V] -10 [V] CW CW CCW 0C (123) (10V/100Mpulses) 0D 8[V] 10 [V] 100 [Mpulse] 0 400[V] 0 100 [Mpulse] -10 [V] CW CCW CCW 0E 2(3) 15 (345) (10V/10 pulses) 8 [V] 10

Series KC Self-seal Fittings

Tube size/ Connecting female thread size Body size Type KBV1-M5 KBV1-M6 KBV2-M5 M5 0.8 M6 1 M5 0.8 M6 1 KBV1-04 KBV1-06 KBV2-06 4 6 KBV2-M6 KBV2-R1 KBV3-R1 KBV3-R2 KBV4-R2 KBV4-R3 KBV2-08 KBV3-08 8 Branch elbow module: KBZ 1 8 Rc(PT) KBV3-10 10 Applicable tube O.D. KBV3-12 12 KBV4-12 KBV4-16 Part No.

Modular Type Filter Regulator Series AW

With square embedded type pressure gauge (with limit indicator) With round pressure gauge (without limit indicator) With round pressure gauge (with limit indicator) With set nut (for panel mount) Applicable model AW10 to 40 AW10 to 40 AW30, 40 AW20 to 40 AW10 AW20 to 40 AW10 to 40 Port size Body size Symbol Port size Note 4) 10 20 30 40 M5 01 02 03 04 06 Note 4) M5 1/8 1/4 3/8 1/2 3/4 G

Vacuum System Peripherals:

Connection 3.2, 4 6, 8, 10, 12, 16 KQ2 Nylon, Soft nylon, Polyurethane M5, M6, R 1/8 to 1/2 From 100 kPa One-touch fittings One-touch fittings/Manifold Series KM Applicable tubing: Nylon, Soft nylon, Polyurethane Tubing O.D.: 4, 6, 8, 10, 12 Port A piping port Port B port size No. of port A Piping specifications Port A Port B Model Model 4 6 8 8 10 12 Rc Rc 6 8 10 6, R 6, R 6, R 8, R 8, R

Air Cylinder

Bore size A1 H MM ZZ 20 8 10 M4 x 0.7 86 25 8 10 M5 x 0.8 86 32 12 10 M6 x 1 88 40 13 10 M8 x 1.25 114 H ZZ + Stroke (mm) DBore size Stroke range A AL B1 F FF FX GA GB H H1 I KB MM N ND P S ZZ 20 1 to 150 18 15.5 13 30.4 M5 x 0.8 depth 9 22 22 8 27 5 28 8.2 M8 x 1.25 24 20 0 0.033 1/8 76 103 25 1 to 200 22 19.5 17 36.4 M6 x 1 depth 11 26 22 8 31 6 33.5 10.2 M10 x 1.25 30 26 0 0.033 1/8 76

CYPSeries

-01-06-X214 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Universal type (throttle valve) 10-AS2301F-01-06-X214 1.

CYPSeries

-01-06-X214 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Universal type (throttle valve) 10-AS2301F-01-06-X214 1.

CYP

-06-X214 Caution 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Universal type (throttle valve) 10-AS2301F-01-06-X214 10-AS1301F-M5-06-X214 1.

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

M1 Weight (g) 4 6 6 8 6 8 10 8 10 8 10 10 12 Applicable tubing O.D. d T H D1 D2 L1 L2 L3 Model AS121-M5-F04 AS121-M5-F06 AS221-01-F06S AS221-01-F08S AS221-02-F06S AS221-02-F08S AS221-02-F10S AS321-02-F08S AS321-02-F10S AS321-03-F08S AS321-03-F10S AS421-04-F10S AS421-04-F12S 16 17 17 18.5 17 18.5 21 18.5 21 18.5 21 21 22 13 13 34 31 54 50 52 86 81 93 88 154 146 21 21.5 25.5 26 M5 x 0.8 28.3