Vacuum System Peripherals:

S U D side D U side 2 to 10 stations B Special specifications M 2 to 20 stations Both sides Made to order. When using both types, specify C4 and C6 specifically; do not just use X marking.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

A L D VQZ D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 VQD Color: White VZS VFS EXH port silencer VS 63 Silencer is installed in the EXH port.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

C6: One-touch fitting for 6 D side VQD Manifold base (9 stations) SS5Q13-09FD2-D F kit (D-sub connector kit) SS5Q13-09FD2-D 1 set (F kit 9 station manifold base) SQ1130-5-C6 4 sets (2 position single) SQ1230-5-C6 4 sets (2 position double [latching]) SSQ1000-10A-3 1 set (Blanking plate) The asterisk denotes the symbol for assembly.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

L 285.5 21 273 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 Fitting blank plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 L A Dimensions (mm) Applicable fitting d Part number A L D D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 5 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: C6 (ø6 One-touch Fitting)

Enclosure: W (IP67), SI Unit: EB (EtherNet/IPâ„¢ - 16 Outputs - Connector M12), SI Unit Output Polarity: +COM, Stations: 5 Stations, P, E Port Entry: D (D Side 2~10 Stations), SUP/EXH Block Assembly: Internal Pilot, A, B Port: C6 (ø6 One-touch Fitting)

SI Unit: DeviceNet, PROFIBUS-DP, EtherNet/IP, Stations: 5 Stations, SUP/EXH Block Mounting: D Side 2~10 Stations, Pilot: Internal Pilot, A, B Port: ø6 One-touch Fitting

SI Unit: w/o SI Unit, Stations: 5 Stations, SUP/EXH Block Mounting: D Side 2~10 Stations, Pilot: Internal Pilot, A, B Port: ø6 One-touch Fitting, Mounting Method: -

SI Unit: Mitsubishi CC-LINK System, Stations: 5 Stations, SUP/EXH Block Mounting: D Side 2~10 Stations, Pilot: Internal Pilot, A, B Port: ø6 One-touch Fitting, Mounting Method: -

Enclosure: IP67, SI Unit: EtherNet/IPâ„¢ - 16 Outputs - Connector M12, SI Unit Output Polarity: +COM, Stations: 5 Stations, P, E Port Entry: D Side 2~10 Stations, SUP/EXH Block Assembly: Internal Pilot, A, B Port: ø6 One-touch Fitting, Mounting: -, DIN Rail Option: -

, Applicable valve: SV2000, P- and E-port entry position: D-side (2 to 10 stations), Specified DIN rail length: Standard length, Protective Structure: -, Number of Input/Output Units: N/A, Number of Input Blocks: N/A, Number of Valves: 5

, Applicable valve: SV2000, P- and E-port entry position: D-side (2 to 10 stations), Specified DIN rail length: -, Protective Structure: IP67 Specifications, Number of Input/Output Units: N/A, Number of Input Blocks: N/A, Number of Valves: 5

P-, E-Port), Specification: Internal Pilot Specifications, Applicable valve: SV2000, P- and E-port entry position: D-side (2 to 10 stations), Specified DIN rail length: -, Protective Structure: IP67 Specifications, Number of Input/Output Units: N/A, Number of Input Blocks: 4, Number of Valves: 5

SI Unit: ZEN (EtherNet/IP), Input Block Stations: 43 [4 Stations/M8: 4 Inputs (3 Pins)], Input Block COM: +COM, Stations: 5 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: C6 (ø6 One-touch Fitting)

SI Unit: 0 (w/o SI Unit), Input Block Stations: None, Input Block COM: +COM, Stations: 5 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: C6 (ø6 One-touch Fitting)

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 2 (Connector Side Direction), Stations: 5 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: C6 (ø6 One-touch Fitting)

Stations: 5 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: C6 (ø6 One-touch Fitting)

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 2 (Connector Side Direction), Stations: 5 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: C6 (ø6 One-touch Fitting)

SI Unit: 0 (w/o SI Unit), Stations: 5 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: C6 (ø6 One-touch Fitting)

SI Unit: V (CC-LINK), Stations: 5 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: C6 (ø6 One-touch Fitting)