Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

Note 2) This filter does not include any companion flange, companion flange bolt, and O-ring. 4 x K depth L DRAIN (): Internal dimensions for FH342 type (mm) Model Weight (kg) d A B C D E F G H J J' K L M N P Q Threaded Rc Flange SSA FH340-03 FH340-04 FH342-06 FH342-08 FH34 -10 FH34 -12 FH341-16 FH440-03 FH44 -04 FH44 -06 FH44 -08 FH44 -10 FH44 -12 FH441-16 FH441-20 FH441-24 FH540-03 FH54

AC Servo Motor Driver (Network card type ）

OUTLINE DRAWINGS 9.2 Connector (1) LE-CSNS connector [Unit: mm] E D A C Logo, etc., are indicated here. 39.0 23.8 B 12.7 Connector Shell kit Each type of dimension A B C D E 10120-3000PE 10320-52F0-008 22.0 33.3 14.0 10.0 12.0 Accept wire : AWG 24, 26, 28, 30 9 4 10. CHARACTERISTICS 10.

Hydraulic

36 44 M4 10 10 13 13 10 10 12 12 12 12 12 16 7 7 7 9 6.5 5.5 5.5 +0.058 0 +0.070 0 +0.070 0 M4 6.5 10 10 5.5 9 9 5.5 7 10 M5 M5 Y-type double knuckle joint Bracket pin Material: Carbon steel 20: Y-02 25: Y-03 Material: Rolled steel 32: Y-04A 40: Y-04B Material: Cast iron 2-D drill through RR1 C1 Chamfer RR1 C NDH10 NDH10 MM C1 Chamfer A B E1 E1 NX NZ NZ NX U1 A1 A1 U1 L1 L1 Part no.

SQ1000/2000

For top ported Approx. 10 R 3 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 62 41.5 25.5 39.5 (58) 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 21 P 1 7.5 P = 17.5 48.7 30 2n-C4, C6, C8 (A, B port) C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting Formulas: L1 = 17.5n + 46, L2 = 17.5n + 60 n: Stations (maximum 12 stations) Dimensions L n 12 256 270 300 310.5 11 238.5 252.5 275 285.5 10 221 235

Silencer Series AN

Construction/Parts/Dimensions AN05/10/20 AN15/30/40 No hexagonal part in AN05 and AN10 B Dimensions (mm) B Port size R, NPT A B D Model Sound absorbing material (Resin sintered body) AN05-M5 AN10-01 AN15-02 AN20-02 AN30-03 AN40-04 6.5 M5 x 0.8 15 Body (Resin) A 1/8 23 11 A 16 14 1/4 32 Hexagonal flats D 16.5 14 1/4 45 20 17 3/8 58.5 Port size 24 21 1/2 68 2 Silencer Compact Resin Type/One-touch

0.4

2 18.5 T 12 12 kit EXH outlet L Applicable connector: D-sub connector (25P) (Conforming to MIL-C-24308) e d i s U e d i s D Stations 1 2 3 4 5 6 7 8 n kit 10 One-touch fitting [3(R), 1(P) port] Applicable tubing O.D.: 10 For top ported S R 3 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A kit 39.4 (58.1) 62.1 41.7 25.7 20.9 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B P 1 C kit P=17.5 63.3 44.5 7.5 One-touch fitting

3

B PF3W3 F AA F AA K L K L 4 x P 4 x P N N (mm) Function Bracket dimensions Model Details Q number A AA B D F K L N P Q S T of rotations PF3W704S/504S PF3W720S/520S PF3W740S/540S 6 56.5 22 63.6 (Max. 68.6) 104 50 70.2 34 58.5 18 13.6 2.7 depth 10 19 6 60.5 22 63.6 (Max. 68.6) 112 54 74.2 34 62.5 18 13.6 2.7 depth 10 19 7 78.0 30 75.25 (Max. 81) 142 71 94.5 44 79.0 28 16.8 2.7 depth 10 28 8

2/3 Port Valve for Various

Model/Valve Specifications Av x 10-6m2 Cv converted C [dm 3/(sbar)] b Cv Water, Oil, Steam Air Flow characteristics Maximum operating pressure differential (MPa) Min. operating pressure differential (MPa) 10 10 15 10 15 20 Connection Orifice Max. system pressure (MPa) Weight (g) Model Water AC DC AC DC AC DC AC Air Oil Steam size (mm) Thread VXP2130-02 0.7 0.7 1.0 0.7 1.0 1.0 1 4 740 500

Plug-in/Plug Lead: Single Unit

M5 ground screw 9 9 2n-Rc 1/2 4(A), 2(B) port VQ0 U side 34.5 VQ4 n X 12 X 12 VQ5 B 2 A 4 6 B B B B B B A A A A A A VQZ B 2 A 4 VQD 5 SMC SMC SMC SMC SMC B 2 A 4 4 L1 L2 B 2 A 4 3 B 2 A 4 2 P = 41 P = 41 B 2 A 4 1 Cable length (600 or 1500 mm) 58.5 34.5 48 68.5 Stations D side 42 16 15.5 61.8 133 22 51 69 117 2-Rc 1/8 (External pilot port) Dimensions Formula: L1 = 41n + 76, L2 = 41n + 96

LEC-OM07605CN

(2) (10.2) 50 [ms] 40 30 T8 T9 20 T7 10 T6 T5 0 0 1000 2000 3000 4000 5000 6000 [r/min] LE-T10.3.2 [] LE-T5LE-T6LE-T730 LE-T8LE-T910 6 10. 10.4 a 1 10 8 5 10 7 1 10 7 5 10 6 a: [ms] 1 10 6 5 10 5 b: SSCNET 1 10 5 5 10 4 1 10 4 b 5 10 3 1 10 3 4 7 10 20 40 70 100 200 [mm] 10.5 2500kVA1mAC240V()LECSS2T5LECSS2-T9AC200V (A0-P) (L1L2L3) (L11L21) LECSS2-T5LECSS2-T7 LECSS2-T8

125

x 1 m B 12 x 1 m C VEX33 42-03 04 AS420-03 AN30-03 12 x 1 m D AS420-04 AN40-04 SGP15A x 1 m 1723 3 Port 3 Position Valve Body Ported VEX3 Series How to Order Air operated Pilot solenoid VEX3 B 12 0 01 1 Air operated VEX3 D B 5 1 12 2 01 Pilot solenoid Operation type Option 1 External pilot solenoid 2 Internal pilot solenoid Nil None Thread type Nil Rc F G N NPT T NPTF Body size Port size

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

N 2 GS D B A E3 04 F 3 DN JSXD31 3 Cannot be used in combination with body material symbol A 4 WN 5 6 7 8 B J Series/ Valve type Body material Seal material Port size Thread type Rated voltage Electrical entry Oil-free option Bracket option JSXD41 C N 03 R 1 G None None S F 04 N 2 GS D B E F 3 DN 4 WN 5 6 7 8 B J JSXD41 Series/ Valve type Body material Seal material Port size Thread

Modular Type Air Filter Series AF

Metal bowl with level gauge Metal bowl Metal bowl Optional specifications B B B B B N.C.: Gray N.O.: Black B B O S O S M5 x 0.8 Width across flats 17 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 Bracket mounting size Accessory specification With auto drain Standard specification Port size Model B 85 115 170 204 208 284 297 P 28 57 73 73 D 25 40 53 70 70 90 95 C 7 10 14

Rotary Clamp Cylinders

0.15 17 17 10 0.07 0.15 2 x 4 x M6 x 1.0 4.5 C A R Q Through-hole/Both Ends Tapped Common (Standard) (mm) Clamp stroke 20 mm Clamp stroke 10 mm Bore size A B C Q R S Q R S 20 25 136.5 130.5 69 36 47 25.5 116.5 110.5 59 139 133 69 40 52 28 119 113 59 23 Rotary Clamp Cylinder: Double Guide Type Series MK2T Dimensions: 32, 40, 50, 63 E 4 x F A B E B D 10 D C A F C G Head End Flange (mm) With

Modular Type Lubricators Series AL

Example) AL30-03B-2R Symbol Description Body size 20 30 40 50 60 10 Metric thread (M5) Rc NPT G Nil Thread type N F + M5 01 02 03 04 06 10 M5 1/8 1/4 3/8 1/2 3/4 1 Port size + Nil B Note 1) Option (Mounting) Without mounting option With bracket + Polycarbonate bowl 1000 cm3 tank 1000 cm3 tank (with switch) Lowest limit ON 1000 cm3 tank (with switch) Lowest limit OFF Metal bowl Nylon bowl

Check Valve Series AK

NPT thread Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32 1/4 5/16 3/8 1/2 From One-touch fitting to male thread B Bushing type AKB 01 A 01 S With seal (Standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction Female/Male

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

L ZY O L ZF G H F ZP K J SP ZCUK B C E D I A 2 x 4.5 AMJ AMV AEP HEP Related Equipment A B C D E F G H I J K L Model ZFC050-02 ZFC050-23 ZFC050-04 ZFC051-01 ZFC051-03 58.5 12.75 12.75 2 3.2 4 33 25 10 10.5 10.5 12 8.5 13.75 58 12.5 12.5 1/8" 5/32" ZFC100-04 4 ZFC100-06 6 53.2 9.1 14.1 30 10 18 11.6 19.5 23 20 29 ZFC101-03 5/32" ZFC101-07 1/4" ZFC200-06 6 ZFC200-08 8 67 15.5 17.5 34 14 22

VS7-6

6, 8, 10 Piping SYJ F.

JXCx-OMX0009

Cable colour Terminal No. 8 8m* Vcc B-1 Brown 12 GND A-1 Black 13 A 10m* A B-2 Red 7 A A-2 Black 6 B 15m* B B-3 Orange 9 C 20m* B A-3 Black 8 SD+(RX) B-4 Yellow 11 * Produced upon receipt SD-(TX) A-4 Black 10 of order Black 3 Actuator side Controller side (14.2) (c) (b) (10.2) (5.5 (6.7 (12.7) 6 2 1 (a) (14 (18) A B 5 6 (13.5) 1 3 1 4 2 1 (30.7) (14.7) 15 16 (d) L (10) (11) 10 - [2] Actuator

Vacuum System Peripherals:

U D side D B Special specification M U side 2 to 10 stations 15 15 Includes number of blanking plate assembly .