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The INPoutput signal is turned on from 100[mm] 1[mm]=99 [mm] Area 2[mm] j Area 1[mm] j 100 b Speed[mm/s] 0 ON AREA Output signal OFF (INPOutput condition) INP Output signal ON In posn[mm] k OFF 101 99 0 10 20 30 40 50 60 70 80 90 100 Stroke [mm] -23- Example of step data input (2) < Positioning operation Relative > a b c d e f g h i j k No.

Operating pressure (MPa) Operating direction Piston area (mm) Rod size (mm) Bore size (mm) 0.15 0.7 0.6 0.5 0.4 0.3 0.2 0.1 8.4 39.2 33.6 28.0 22.4 16.8 11.2 56 OUT CXS6 4 4.6 21.7 18.6 15.5 12.4 9.3 6.2 31 IN 110 94.2 78.5 62.8 47.1 31.4 15.7 157 OUT CXS10 6 70.0 60.0 50.0 40.0 30.0 20.0 10.0 100 IN 247 212 177 141 106 70.6 35.3 353 OUT CXS15 8 176 151 126 101 75.6 50.4 25.2 252 IN 440

L2 L1 4 3 2 P = 25 P = 25 1 50.5 44 X Stations 12 38 26.5 Cable length (600 or 1500 mm) D side 37.5 10.2 12 106.5 43.5 178.5 50.5 59 96.5 Dimensions Formula L1 = 25n + 63, L2 = 25n + 76 n: Station (Maximum 16 stations) L n 9 288 301 8 263 276 L1 L2 7 238 251 6 213 226 5 188 201 4 163 176 3 138 151 1 2 113 126 16 463 476 15 438 451 14 413 426 13 388 401 12 363 376 11 338 351 10 313 326 88 101

100 25, 50, 75, 100, 125 150, 175, 200 M L MGP MGQ OUT(N) IN(N) Theoretical Output (N) Bore size (mm) MGG Operating pressure (MPa) Rod size (mm) Operating direction Piston area (mm2) 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 MGC Made to Order Specifications (For details, refer to pages 1829 to 2021.) 0UT 113 23 34 45 57 68 79 90 102 113 12 6 IN 85 17 26 34 43 51 60 68 77 85 MGF 0UT 201 40 60 80 101

From the above 2. position, turn the adjustment needle 1/4 to 1 turn clockwise. 1 kPa = 7.5 mmHg 1 kPa = 7.5 mmHg 101 101 Supply pressure (kPa) Supply pressure (kPa) Applicable adsorption nozzle range Applicable adsorption nozzle range 50 50 3. 2. 1. 20 20 ZSE ISE Right 0.2 0.3 0.4 0.5 0.6 0.7 0.3 0.5 0.7 0.9 1.1 1/4 to 1 turn Right Left PSE Adsorption nozzle diameter (mm) Adsorption nozzle

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 99 NUMBERING SYSTEM CHART FOR SOLENOID OPERATORS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 100 NUMBERING SYSTEM CHART FOR SERIES 58 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 101

kPa For low pressure 0 to 100 kPa For positive pressure 0 to 1 kPa 0 0 0 101 kPa 100 kPa 1 MPa 10.1 kPa 10 kPa 0.1 MPa 5 Analog output (V) 1 0.6 C B A Pressure 775 Series ZSE1/ISE1 Calibration Procedure Hysteresis Internal Circuit and Wiring Example Set the ON-pressure by the pressure setting trimmer.

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 FAX: 03-5298-5362 URL http://www.smcworld.com 2007 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing IU printing LT 13500DN Printed in Japan.

HRG HRS HRZ HRZD HRW HEC HEB HED Technical Data Related Products 2.2 (57) 0.16 x 0.20 (4 x 5) 15.4 (390) Power switch External temperature sensor connector Alarm output connector Display/Operation panel Communication connector Warning/Caution label 11.7 (298) Power connector 5.7 (145) Tank lid with gasket Power cable (Accessory) Model no. label Handle 4.0 (101) 2.0 (51) 5.7 (145) Handle 60

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2013 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing NZ printing RP 8150SZ Printed in Japan. D-SZ

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2013 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing PP printing RQ 8150DN Printed in Japan. D-G

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2013 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing NZ printing RQ 8150DN Printed in Japan. D-G

Blue F-2815-101-NORYL - $0.50 F-2815-101-B80-NORYL - $1.35 F-2815-101-B85-NORYL - $1.35 .011 White / Orange -- F-2815-111-B80-NOR-W - $1.40 F-2815-111-B85-NOR-W - $1.40 .012 Green F-2815-121-NORYL - $0.50 F-2815-121-B80-NORYL - $1.35 F-2815-121-B85-NORYL - $1.35

Blue F-2815-101-NORYL - $0.50 F-2815-101-B80-NORYL - $1.35 F-2815-101-B85-NORYL - $1.35 .011 White / Orange -- F-2815-111-B80-NOR-W - $1.40 F-2815-111-B85-NOR-W - $1.40 .012 Green F-2815-121-NORYL - $0.50 F-2815-121-B80-NORYL - $1.35 F-2815-121-B85-NORYL - $1.35

Blue F-2815-101-NORYL - $0.50 F-2815-101-B80-NORYL - $1.35 F-2815-101-B85-NORYL - $1.35 .011 White / Orange -- F-2815-111-B80-NOR-W - $1.40 F-2815-111-B85-NOR-W - $1.40 .012 Green F-2815-121-NORYL - $0.50 F-2815-121-B80-NORYL - $1.35 F-2815-121-B85-NORYL - $1.35

Blue F-2815-101-NORYL - $0.50 F-2815-101-B80-NORYL - $1.35 F-2815-101-B85-NORYL - $1.35 .011 White / Orange -- F-2815-111-B80-NOR-W - $1.40 F-2815-111-B85-NOR-W - $1.40 .012 Green F-2815-121-NORYL - $0.50 F-2815-121-B80-NORYL - $1.35 F-2815-121-B85-NORYL - $1.35

Blue F-2815-101-NORYL - $0.50 F-2815-101-B80-NORYL - $1.35 F-2815-101-B85-NORYL - $1.35 .011 White / Orange -- F-2815-111-B80-NOR-W - $1.40 F-2815-111-B85-NOR-W - $1.40 .012 Green F-2815-121-NORYL - $0.50 F-2815-121-B80-NORYL - $1.35 F-2815-121-B85-NORYL - $1.35

Blue F-2815-101-NORYL - $0.50 F-2815-101-B80-NORYL - $1.35 F-2815-101-B85-NORYL - $1.35 .011 White / Orange -- F-2815-111-B80-NOR-W - $1.40 F-2815-111-B85-NOR-W - $1.40 .012 Green F-2815-121-NORYL - $0.50 F-2815-121-B80-NORYL - $1.35 F-2815-121-B85-NORYL - $1.35

Blue F-2815-101-NORYL - $0.50 F-2815-101-B80-NORYL - $1.35 F-2815-101-B85-NORYL - $1.35 .011 White / Orange -- F-2815-111-B80-NOR-W - $1.40 F-2815-111-B85-NOR-W - $1.40 .012 Green F-2815-121-NORYL - $0.50 F-2815-121-B80-NORYL - $1.35 F-2815-121-B85-NORYL - $1.35

Blue F-2815-101-NORYL - $0.50 F-2815-101-B80-NORYL - $1.35 F-2815-101-B85-NORYL - $1.35 .011 White / Orange -- F-2815-111-B80-NOR-W - $1.40 F-2815-111-B85-NOR-W - $1.40 .012 Green F-2815-121-NORYL - $0.50 F-2815-121-B80-NORYL - $1.35 F-2815-121-B85-NORYL - $1.35