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.: AMX-OMX0018-B PRODUCT NAME Line filter MODEL / Series / Product Number AFF20-(F, N)01 ~ (F, N)02(B, C)(-2, 6, C, J, L, R, Z)-D AFF30-(F, N)02 ~ (F, N)03(B, C, D)(-2, 6, 8, J, L, R, W, Z)-D AFF40-(F, N)02 ~ (F, N)04(B, C, D)(-2, 6, 8, J, L, R, W, Z)-D Contents Page 1. Safety Instructions 2 to 7 2. Application 8 3. Standard specifications 8 4. How to order 9 5.

.: AMX-OMX0019-C PRODUCT NAME Mist Separator MODEL / Series / Product Number AM20-(F, N)01 ~ (F, N)02(B, C)(-2, 6, C, J, L, R, Z)-D AM30-(F, N)02 ~ (F, N)03(B, C, D)(-2, 6, 8, J, L, R, W, Z)-D AM40-(F, N)02 ~ (F, N)04(B, C, D)(-2, 6, 8, J, L, R, W, Z)-D Contents Page 1. Safety Instructions 2 to 7 2. Application 8 3. Standard specifications 8 4. How to order 9 5.

.: AMX-OMX0020-B PRODUCT NAME Micro Mist Separator MODEL / Series / Product Number AM20-(F, N)01 ~ (F, N)02(B, C)(-2, 6, C, J, L, R, Z)-D AM30-(F, N)02 ~ (F, N)03(B, C, D)(-2, 6, 8, J, L, R, W, Z)-D AM40-(F, N)02 ~ (F, N)04(B, C, D)(-2, 6, 8, J, L, R, W, Z)-D Contents Page 1. Safety Instructions 2 to 7 2. Application 8 3. Standard specifications 8 4. How to order 9 5.

AMX-OMY0038-A PRODUCT NAME Activated Carbon Filter MODEL / Series / Product Number AMK20-(F, N)01 ~ (F, N)02(B)(-2, 6, C, R, Z)-D AMK30-(F, N)02 ~ (F, N)03(B)(-2, 6, R, Z)-D AMK40-(F, N)02 ~ (F, N)04(B)(-2, 6, R, Z)-D Contents Page 1. Safety Instructions 2 to 7 2. Application 8 3. Standard specifications 8 4. How to order 9 5. Construction / Options / Replacement parts 10 6.

Leakage voltage Take note that the leakage voltage will increase when a resistor is used in parallel with switching element or a C-R circuit (surge voltage suppressor) is used for protecting a switching device because of the passing leakage voltage through the C-R circuit. The suppressor residual leakage voltage should be as follows. Should be3% or less of rated voltage.

One-touch fitting ARJ310-01 ARJ310-N01 ARJ310F-01-04 ARJ310F-01-06 ARJ310F-N01-03 ARJ310F-N01-07 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 Note) M5 x 0.8 female thread is cut inside the pipe.

0 q CONTROLLER PRESSURE OUT w Position Detection Switch Flow Sensor Pressure Control Pressure Sensor e w r RUN 4 3 2 1 CH kPa 4 3 2 1 SW t e y D-IN RUN UP SET P-ON DOWN STOP READ r u i o t y u i o !

0 Exhaust portr Adjusting springe Upper diaphragmw Upper diaphragm chamberq SIG Lower diaphragmy Lower diaphragm chambert OUT IN1 Springo Valvei Pistonu IN2 171 A IL201/211/220 Series Construction 2 12 IL211 IL201 1 r r e t e !2 !2 u t u w w i !9 i !9 q q !7 !7 IN OUT IN1 OUT1 !0 !6 !3 o !3 q !8 !6 IN2 OUT2 !8 !7 !6 o IL220 !3 r e !2 w u y i !9 !5 @1 OUT IN1 !1 q @2 @0 IN2 !

S S S Flow direction (1) Press the SET button once when the item to be changed is displayed on the display. The set value on the sub display (right) will start flashing. The output will not operate for 3 seconds after supplying power. The identification code of the product is displayed.

HRZ Series 5.3 Operation Screen 5-9 5-9 HRX-OM-X010 Chapter 5 System Operation 5.3.8 Setting screen POWER ON S 1 3 2 Figure 5-10 Setting screen Table 5-8 Setting screen No.

OUT Standard specification Option Note) Water (Standard, up to 40C) Air (Standard, Dry) Turbine oil Vacuum (up to 1.3 x102 Pa) Carbon dioxide (CO2), Nitrogen gas (N2) Vacuum (up to 1.3 x101 Pa) (V, M) Non-leak (106 Pa m3/s or less) (V, M) IN N.O.

Insulation type Electrical entry Electrical option Class B G C D, T S Note) S L, Z 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) AC DC Note) Surge voltage suppressor is attached in the middle of a lead wire. 17-3-72 3 The VX series will be revised shortly.

T T N E K I ETL LISTED CONFORMS TO M C AC EXT.SENSOR CERTIFIED TO UL STD 60601-1 US C D L I E S T 3054524 Circulating fluid outlet Rc1/4 CAN/CSA STD C22.2 NO.601.1 THERMO-CON HEC002-A5B-F MODEL No.

CE compliant 1 Note) 3 Note) 5 6 V S R Nil 100 VAC 50/60 Hz 110 VAC 50/60 Hz 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC Air operated/Without valve Nozzle diameter Standard supply pressure MPa Combination of Nozzle Diameter and Standard Supply Pressure H (0.5) M (0.35) S (0.45) 0.5 mm 0.7 mm 1.0 mm 1.3 mm 1.5 mm Note) CE compliant products are not available for 1 and 3. 986

Nil S n 2 pcs. Nil R Perpendicular to axis 1 pc. Axial Axial n pcs. For configuration, refer to page 43. Double clevis is only available for being perpendicular to axis. Applicable Auto Switch/Refer to pages 1263 to 1371 for further information on auto switches.

Rack & Pinion Type Rotary Actuator Series 11-CRA1-Z Size: 30, 50 RoHS How to Order 11 Vacuum suction type Clean series Nil Auto switch No D Built-in magnet B Mounting Basic L Foot Shaft type S Single shaft W Double shaft 30 Size 50 11 C D R A 1 B S 50 90 Z M9B Rotating angle Number of auto switches 90 180 100 190 90 180 100 Nil S 2 pcs. 1 pc. 190 Type of auto switch (For model with auto switch

Example) FM Standard (Rod end female thread) With boss in head end Rod end male thread Surge voltage suppressor Without surge voltage suppressor With surge voltage suppressor With light/surge voltage suppressor With surge voltage suppressor (Non-polar type) Nil S Z R U Auto switch With light/surge voltage suppressor (Non-polar type) Nil Without auto switch (Built-in magnet) For applicable

For vacuum equipment precautions, refer to the Handling Precautions for SMC Products and the Operation Manual on the SMC website: http://www. smcworld.com ZU S 05 A Port size Nozzle diameter 05 0.5 mm 07 0.7 mm Nil 6 One-touch tting 01 Rc1/8 female thread Symbol EXH Vacuum pressure reached S 90 kPa L 48 kPa Mounting P V Caution Specications 1 .

0.01 s increments Hysteresis Hysteresis mode Variable from 0 2 Window comparator mode Short circuit protection Provided Voltage output 3 Output voltage (Rated pressure range) Voltage output: 1 to 5 V2.5%F.S.

EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil R Metal seal Double FJG Rubber seal 1 (P) 5 (R1