Digital Flow Switch (Remote type sensor unit)

(Max. 81) 94.5 44 79 28 16.8 2.7 depth 10 28 7 turns Symbol Bracket dimensions Model S T PF3W504S 56.5 22 PF3W520S 60.5 22 PF3W540S 78 30 -44No.PF-OMN0010-J PF3W504/520/540 (With temperature sensor and flow adjustment valve) Basic type and flow adjustment valve and temperature sensor Symbol A AA D K S Model PF3W504S--T 115 50 81.2 69.5 67.5 PF3W520S--T 123 54 85.2 73.5 71.5 PF3W540S--T 153

MU

56 824 698 573 447 321 195 1257 OUT Flange style/Rod side, 20 50 76 47 1327 1131 935 738 542 346 1963 OUT 0.10 0.14 0.23 0.46 0.83 Mounting bracket weight Head side 20 63 61 113 2069 1757 1446 1134 822 510 3117 OUT CUJ Single clevis style 0.06 0.12 0.22 0.40 0.68 12 25 15 30 235 197 159 121 83 46 378 IN Double clevis style (With pin) 0.07 0.16 0.26 0.47 0.76 14 32 24 42 413 348 283 218 153

A

1/4 1/4 64 20 40 10 102 17 26 67 18 15 M10x1.25 7 99 14 M18x1.5 63 32 3/4-16 ~750 20~750 40 102 129 1/4 1/4 78 25 52 14 113 21 30 72 23 17 M12x1.75 11 117 17 M22x1.5 80 37 3/4-16 ~750 20~750 40 116 140 1/4 1/4 92 30 52 14 124 21 31 76 25 19 M12x1.75 11 131 17 M26x1.5 100 37 1-14 With Boot Bore N P PG PH PL PW S W Without Boot H ZZ e f h ZZ Size l 51 215 43 11.2 59 223 27 1/4 42 11 20 45 153

Compact Cylinder Series CQS

315 273 129 146 188 231 121 137 20 632 567 93 503 106 119 132 144 157 439 182 208 311 375 170 195 25 800 958 721 643 150 166 182 197 213 564 134 245 277 406 485 1116 229 261 Additional Mass (g) Bore size (mm) 12 16 20 25 1.5 3 6 12 Male thread Nut Rod end male thread 1 2 4 8 Rubber bumper (No need to add for long stroke) 0 1 2 3 Foot style (Including mounting bolt) 55 (53) 65 (61) 159 (153

7

P. 153 Replacement Parts . P. 155 Glossary of Terms . P. 156 Solenoid Valve Flow Rate Characteristics . P. 157 Flow Rate Characteristics . P. 162 Specific Product Precautions .

C95

70 90 110 26 28 32 40 50 60 26 28 32 40 50 60 9.5 12 12 16 16 20 32 36 45 50 63 75 10 11 12 12 14 16 4.5 4.5 5.5 5.5 6.5 6.5 144 163 175 190 215 230 142 161 170 185 210 220 32 36 45 50 63 71 7 10 10 10 12 14.5 17 22 22 28 34 40 73 82.5 90 97.5 110 120 95 106.5 122 129.5 150 160 12 16 16 20 20 25 12 16 16 20 20 25 50 63 75 90 110 132 49 58 71 87 110 136 64 72 90 100 126 150 79 90 110 120 153

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

D H11 FB TG 0.2 E R MF TF UF L4 Screw size L4 32 F5032 30 7 32.5 50 32 10 64 79 5 M6 x 20L 40 F5040 35 9 38 55 36 10 72 90 5 M6 x 20L 50 F5050 40 9 46.5 70 45 12 90 110 6.5 M8 x 20L 63 F5063 45 9 56.5 80 50 12 100 120 6.5 M8 x 20L 80 F5080 45 12 72 100 63 16 126 153 9 M10 x 25L 100 F5100 55 14 89 120 75 16 150 178 9 M10 x 25L 125 F5125 60 16 110 Max. 157 90 20 180 Max. 224 10.5 M12 x 25L

0.5

m-m 4 x M4 x 0.7, depth 6 (Female thread mounting) 2 x 3.5, depth 1 144 55 25 12.5 179 195 36.6 (10.5) 20 40 Bracket IZF31-m-mBmm 162 (144) 90 2 x 25 (195) 4 x 4.5 211.5 163 144 47 148 3 x 5.5 40 2 x 5.5 45 45 45 17 Fan Type Ionizer IZF21/31 Series Dimensions IZF21/31 IZF10/IZF10R Technical Data With automatic cleaning unit IZF21-m-mmSm IZF31-m-mmSm 64 (144) 20.5 (40) 64 (40) (104) 20.5 153

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

5 5.5 5.5 7 LC WB 13 13 13 16 LH 6.8 6.8 6.8 7 LX 3.2 3.2 3.2 3.2 LZ 40 40 40 55 X 55 55 55 75 NA M8 x 1.25 M10 x 1.25 M10 x 1.25 M14 x 1.5 NN 24 30 34.5 42.5 P M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 S 1/8 1/8 1/8 1/4 WA 31 31 31 36 Y 20 20 20 23 Z 8 8 8 10 LD 4 4 4 4 LT LS 25 28 28 30 Bore size 40 47 47 54 13 17 17 22 26 32 32 41 26 26 26 31 41 45 45 50 5 6 6 8 8 8 8 10 21 25 25 27 149 153

CJ5-S

71 13 89 M10 x 1.5 10 22 33 7 M22 x 1.5 80 3/8 23 130 32 J 100 22 60 Up to 750 40 37 41 60 90 30 29 20 71 16 10 26 33 8 M26 x 1.5 100 1/2 23 131 32 110 M12 x 1.75 DBore size (mm) Pivot bracket CD(Shaft) Z ZZ LD LE LF LG LH LL LP LT LV LX LY LZ -X 0.040 0.076 0.040 0.076 0.040 0.076 0.040 0.076 0.050 0.093 0.050 0.093 0.065 0.117 0.065 0.117 20 8 132 141 7 9 2 14 30 27.6 21 3 56.5 42 30 153

Table of Contents

(g) Stroke (mm) Model 60 40 30 25 20 15 10 5 50 70 80 90 100 27 (32) 30 (40) 34 (44) 37 (47) 40 (50) 44 (54) 51 (61) 58 (68) 65 (75) C(D)UW6-D 44 (49) 49 (59) 53 (63) 58 (68) 62 (72) 67 (77) 76 (86) 85 (95) 94 (104) C(D)UW10-D 74 (99) 81 (111) 88 (118) 95 (125) 102 (132) 109 (139) 123 (153) 137 (167) 151 (181) C(D)UW16-D 132 (165) 145 (182) 158 (195) 171 (208) 184 (221) 197 (234) 223 (260

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

M5 x 0.8 (Hexagon socket head plug) VV VV 1.1 S WX 8.4 2-4 Bottom ported (Applicable O-ring) Y J M5 x 0.8 M6 x 1 MM M4 x 0.7 M5 x 0.8 A B 6.0 7.5 C 3.5 4.5 CH 25 26 G 13.5 12.5 GA 8.5 GB 16.2 20.0 H 52 58 K 10 12 L 110 130 LD 3.6 4.8 LH 38 39 LL 35 45 LW 84 88 M 6.0 7.5 N 20 25 NC 14 17 NE 49.5 55.5 NH 16.5 21.7 NW 56 60 Bore size (mm) 16 20 90 110 PP SS 2.5 5.0 PA 40 50 PB PG 3.5 4.5 Q 153

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

lock 141 145 145 176 Front lock 142 146 148 179 Rear lock 112 112 112 139 Front lock 113 113 115 142 Rear lock 117 121 121 148 Front lock 118 122 124 151 Double lock 123 123 123 147 Double lock 128 132 132 156 20 25 32 40 Clevis Rear trunnion Bore size (mm) Z ZZ Double lock 163 167 167 201 Z ZZ Double lock 139 143 143 167 Double lock 129 133 133 156.5 Rear lock 152 156 156 193 Front lock 153

Cylinder with Turntable Series MGT

400 Eccentric distance l (mm) Eccentric distance l (mm) Allowable side load F (N) F Stroke (mm) Bore size (mm) Model 25 50 75 100 125 150 175 200 DMGTM 140 151 162 176 193 212 178 204 63 MGTL 199 212 226 243 170 186 127 143 -X F MGTM 199 213 228 246 267 291 221 250 80 Individual -X MGTL 180 192 205 220 237 255 154 62 MGTM 271 288 307 328 353 382 321 356 100 MGTL 242 257 274 292 313 335 153

MLGP

Ball bushing bearing) Dimensions A, DB, E: MLGPM (Slide bearing) A E A E Bore size (mm) 131 141.5 144.5 Bore size (mm) 115 128 131 DB DB st 50 50 < st 200 200 < st 350 200 < st 350 20 25 25 st 50 50 < st 200 74 89 84 st 50 50 < st 100 100 < st 200 200 < st 350 16 20 20 st 50 50 < st 100 100 < st 200 200 < st 350 74 89 84 40 50 63 40 50 63 31 34.5 29.5 174 196 199 36 46 41 136 153

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

lock 128 132 132 156 Front lock 142 146 148 179 20 25 32 40 Clevis Rear trunnion Bore size (mm) Z ZZ Double lock 139 143 143 167 Z ZZ Double lock 163 167 167 201 Double lock 129 133 133 156.5 Rear lock 143 147 147 182 Rear lock 118 122 122 148.5 Rear lock 128 132 132 159 Rear lock 152 156 156 193 Front lock 144 148 150 185 Front lock 119 123 125 151.5 Front lock 129 133 135 162 Front lock 153

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Refer to L1 dimension on pages 153, 162 and 172 for lengths that correspond to the number of manifold stations. 175 Series SY9000 23 Type 23P Type How to Increase Manifold Bases (Series SY9000 only) Manifold case can be added at any location. When a type 23 manifold base is added, tension bolts as well as manifold block assembly will be required.

MY1

LL 40 50 55 70 85 PG 3.5 4.5 7 8 9 HG 13.5 17.5 21 26 33.5 JJ M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 Model MY1B16 MY1B20 MY1B25 MY1B32 MY1B40 M 6 8 9 12 12 PA 40 50 60 80 100 N 20 25 30 37 45 NC 13.5 17.5 20 25 30.5 NE 27.8 34 40.5 50 63 NG 13.5 17.5 28 33 42.5 NH 27 33.5 39 49 61.5 MM M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 PB 20 25 30 35 40 PC 40 50 55 70 85 PD 4.5 5 6 10 12.0 Q 153

MY1

0.8 (Hexagon socket head plug) (Hexagon socket head plug) (mm) A B C E GA GB H KK J LD L LL LW M MM N NC Model G JJ K NE 80 6 3.5 2 9 16 37 6.5 M5 x 0.8 3.5 80 40 30 6 M4 x 0.7 20 14 MY1B16 14 M4 x 0.7 10 27.8 100 7.5 4.5 2 12.5 17.5 46 10 M6 x 1 4.5 100 50 37 8 M5 x 0.8 25 17.5 MY1B20 12.5 M4 x 0.7 12 34 (mm) NW PC PD T VV XX YH YW Z NH PA PB PG Q PP QW QQ RR SS TT UU WW Model 40 20 3.5 153

Rotary Actuator

[mm] 63 15 105 59 130 101 Size H U UU 50 39 114 150 63 45 136 177 80 55 165 215 100 60 190 250 Size H N U UU 50 30 15 105 125 63 33 17 124 146 80 43 20 153 178 100 44 25 174 204 80 18 130 76 160 119 100 18 150 92 180 133 DThe dimensions of shaft key and four chamfers are the same as the basic type.