Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

M5 x 0.8 Rc 1/4 Rc 1/8 Rc 1/4 Piping Built-in One-touch fittings 6/4 6/4 8/6 8/6 CUJ Rod end male thread JIS Symbol Non-rotating rod With boss in head side CU Note) In the case of without auto switch, M5 x 0.8 is used for 5 stroke only.

ZP

H: M8 x 1 Y H: M5 x 0.8 H: M6 x 1 E D E ZPY02U 2 4 6 8 Applicable tube O.D.

ISO Cylinder

15 12 7 16 10 12 M12 x 1.25 4 M5 x 0.8 12 5 28 14.2 M4 x 0.7 19 6 15 12 7 16 12 16 M16 x 1.5 6 M5 x 0.8 17 6 38 14.2 5 M6 x 1 24 8 18.3 16 10 22 16 16 M16 x 1.5 6 M5 x 0.8 17 6 38 14.2 5 M6 x 1 24 8 18.3 16 10 22 20 20 M22 x 1.5 8 G1/8 20 8 44 17 6 M8 x 1.25 32 11 24 22 13 24 25 22 M22 x 1.5 10 G1/8 22 8 50 20 8 M10 x 1.25 32 11 30 22 17 28 Bore size S Z 1 to 50 51 to 100 101 to 150 1 to

Air Cylinder NCA1 Series

1/8 5/16 3 1/4 1 1/2 3 3/4 1/2 5/8 2 1/4 1 1/4 3/8 4 1 1/2 4 1/2 1/2 5/8 2 1/4 1 1/4 3/8 5 1 1/2 5 1/2 1/2 5/8 2 1/4 1 1/2 7/16 6 1 3/4 6 1/2 3/4 3/4 2 3/4 1 5/8 7/16 BORE TD TL TM UM UW 1 1/2 1 1 2 1/2 4 1/2 2 1/2 2 1 1 3 5 3 2 1/2 1 1 3 1/2 5 1/2 3 1/2 3 1/4 1 1 4 1/2 6 1/2 4 1/2 4 1 1 5 1/4 7 1/4 5 1/4 5 1 1 6 1/4 8 1/4 6 1/4 6 1 3/8 1 3/8 7 5/8 10 3/8 7 5/8 11 Dimensional Drawings Expanded

NCA1

1/8 5/16 3 1/4 1 1/2 3 3/4 1/2 5/8 2 1/4 1 1/4 3/8 4 1 1/2 4 1/2 1/2 5/8 2 1/4 1 1/4 3/8 5 1 1/2 5 1/2 1/2 5/8 2 1/4 1 1/2 7/16 6 1 3/4 6 1/2 3/4 3/4 2 3/4 1 5/8 7/16 BORE TD TL TM UM UW 1 1/2 1 1 2 1/2 4 1/2 2 1/2 2 1 1 3 5 3 2 1/2 1 1 3 1/2 5 1/2 3 1/2 3 1/4 1 1 4 1/2 6 1/2 4 1/2 4 1 1 5 1/4 7 1/4 5 1/4 5 1 1 6 1/4 8 1/4 6 1/4 6 1 3/8 1 3/8 7 5/8 10 3/8 7 5/8 11 Dimensional Drawings Expanded

Electric Actuator/Slider Type

6 e u @0 @1 @2 w !4 !2 !0!1 !3 !

LEC-OM071xx

1 6 Utility Functions (Fn) 6.

Basic type / Direct mount type Series CY3B/CY3R

6 @4 @1 @8 $0 #9 #3 @2 #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY1L10 to 40 @2 $0 #9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !5 @8 #7 #6 $1 F G Area G (10) Enlarged view F 10, 15 #0 @7 #1 w u i o !1 #2 q !3 r y e @6 @5 @3 $1 10 Component Parts Material No. Description Note No.

ZP

ZM 4, 6, 8 tube M6 x 1 M8 x 1 ZH 6, 8 tube M6 x 1 M8 x 1 M6 x 1 M8 x 1.25 ZU How to Order ZL Vacuum entry port Mounting thread ZY Pad type Pad dia.

5

+ 30 (n 2) (n = 2, 4, 6, 8) Note 1) 80 + 30 (n 2) (n = 2, 4, 6, 8) Note 1) 85 + 30 (n 2) (n = 2, 4, 6, 8) Note 1) n (Same surface) 90 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 95 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 100 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 105 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 110 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 1 60 65 75 80 85 2 (Different surfaces) 70 75 80

Free Mount Cylinder Series CU

Free flow 3.5 2.7 7 1.5 Effective area (mm2) 4 6 Note) Supply pressure: 0.5 MPa, Temperature: 20C In-line Type Air Flow/Effective Area AS2001FM Model AS1001FM AS2051FM 8 3.2, 4, 6 6 Metric size 6 4 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 1/4", 5/16" 3/16", 1/4" Inch size 3/16" 5/32" 12 7 Air flow (l/min (ANR)) 38 Controlled flow 0.2 0.1 0.6 Effective area (mm2) 100 460 230 Flow rate (l/min (

Made to Order

8 1/4 1/4 3/8 3/8 1/2 84 84 94 94 114 114 4 4 5 9 11.5 17 6.5 9 10.5 12 14 15 19.5 27 32 32 37 37 13 14 15.5 16.5 19 19 46 52 65 75 95 114 47 58 67 67 81 81 17 22 27 27 32 41 6 8 11 11 13 16 32.5 38 46.5 56.5 72 89 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 12 16 20 20 25 30 6 6 7 7 10 10 30 35 40 45 45 55 10 14 18 18 22 26 13 13 14 14 20 20 16 16 16 16 16 16 1860 Made to Order

High Purity Fluoropolymer

Metric size Inch size 1/4" 3/8" None 1/8" 1/2" 3/4" 1" 6 8 10 12 19 1/8" 1/4" 3/16" 3/8" 1/2" 3/4" 1" 25 4 3 1 2 3 Male 4 5 Connector LQ1H P.5 6 1 2 3 Female 4 5 P.6 6 1 2 3 Male 4 5 Elbow LQ1L P.7 6 1 2 3 Female 4 5 P.8 6 1 2 3 Male 4 5 Run tee LQ1R P.9 6 1 2 3 Female 4 5 P.10 6 Features 2 Series LQ1 ,TL/TIL 2 Series Appearance Class Port size Tube O.D.

Step Motor Controller

B-1 A-1 B-2 A-2 B-3 A-3 Cable color Signal Nil 2 1 6 5 3 4 A A B B COM-A/COM COM-B/ Brown Red Orange Yellow Green Blue S Standard cable Cable color Connector D terminal no. Shield 12 13 7 6 9 8 3 Brown Black Red Black Orange Black Vcc GND A A B B B-4 A-4 B-5 A-5 B-6 A-6 Connector B terminal no.

CA2

1 !2 !3 !4 !5 !6 !7 !8 !

CJ2

For detailed specifications, refer to page 6-16-1.

JXCx-OMT0023

setting in auto tuning mode 1 . 14 6.4 2-gain adjustment mode . 15 6.5 Manual mode . 16 6 1 6.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

1/4 How to Order Type 43 VV5Z3 05 43 1 C4 1(P), 3/5(R) port thread type 4(A), 2(B) port size Stations 02 2 stations 3/5(R) port Nil F N Z NPTE Rc C4 One-touch fitting for 4 Rc 1/8 G B3 One-touch fitting for 5/32" 20 20 stations 4(A), 2(B) port 1(P) port NPT Rc 1/8 How to Order Flat ribbon cable type 41P Applicable solenoid valve VV5Z3 41P 05 M5 1 3 5 6 1 3 5 6 VZ343MOZ Stations 4(A), 2

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

6 @4 @1 @8 MX MTS MY #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY CY1L10 to 40 @2 $0 #9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Size combination No. 1 1 2 2 3 3 3 4 4 5 5 6 6 No. 1 2 2 2 3 3 4 4 5 5 6 6 Class Applicable tubing size (inch) 1/8" x 0.086" 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" Class Symbol Nil Applicable tubing size (mm) 4 x 3 3 x 2 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19