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~:;:--l' VAC Vacuum load lock chamber Digital pressure switch Digital Pressure Switch Series ZSE6/ISE6 (For vacuum) (For positive pressure) Model 1~SV(S % F ,S, ) ".

Type L Type S Type L ZU05mA 0.5 90 48 7 13 14 6 One-touch fitting ZU07mA 0.7 11 16 28 Rc1/8 1 Supply pressure: 0.45 MPa ZUmA Series CAT.ES100-118A In-line Type Vacuum Ejector ZUmA Series RoHS Precautions How to Order ZU S 05 A Be sure to read this before handling the products.

Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Number of auto switches Mounting Bore size 12 16 20 25 32 40 50 Nil S n 2 pcs. 1 pc. n pcs.

Data Switch operating range (mm) Cylinder speed (mm/s) Switch detecting time DC () Blue Ex.) Cylinder speed 1000 mm/sec. Sequencer response time 0.1 sec. Detecting point dispersion Within 100 mm (= 1000 mm/sec. x 0.1 sec.) Take PLC response time into consideration when using.

Names of individual parts 0.34 ISE35 Indication LED 1 s 1 s Thank you for purchasing an SMC ISE35 Series Digital Pressure Switch. Please read this manual carefully before operating the product and make sure you understand its capabilities and limitations.

50 ms0.5 s2 s) 1.5 s 15 V 1 k 420 mA 600 DC24 V 50 5F.S. -54No.PF-OMJ0005CN-I PFM710 PFM725 PFM750 PFM711 ()30 ms 3F.S.() LED 3 7 2 (/) OUT1ON OUT2ON DC24 V10 55 mA IP40 050 () 050 -1060 () 3585R.H.() AC1000 V 1 50 M (DC500 V ) CE(EMC ROHS )ULCSA 110L/min10009.99 L/min 2100L/min100099.9 L/min 3 ()10024 551005009.5 221002003.8 420 1 atm() 0 1 atm() -55No.PF-OMJ0005CN-I

Since voltage drops due to the internal circuit in S,Z types, the allowable voltage fluctuation should be within the following range. 24VDC-7% to +10% 12VDC-4% to +10% 15 - Table (3) Allowable kinetic energy and safe range of rotation time Adjustable range of rotation Allowable kinetic energy(J) s/90 time safe in operation Size Without Air cushion With Air cushion 50 0.05 0.98 0.2 to 2 63

Specifications Size 1 2 3 7 Fluid Air (Non-lube) Maximum operating pressure 0.7MPa Minimum operating pressure 0.1MPa Ambient and fluid temperature 0 to 60C (with no freezing) Cushion No cushion Lubber cushion Allowable kinetic energy 0.001J 0.0015J 0.002J 0.006J Angle adjustment range 0 to 190 Maximum rotation 190 Rotation time adjustment range 0.2 to 0.7 s/90 0.2 to 0.1 s/90 Cylinder bore

*Refer to the table of Applicable stroke 6mm 6mm 8mm 8mm 10mm 10mm B B Cable type *Applicable stroke Standard produced upon receipt of order Without cable Nil Without cable Nil 100 100 200 200 300 300 400 400 500 500 600 600 700 700 800 800 900 900 1000 1000 Robotic type cable R Robotic type cable R 11-LEFS25 11-LEFS25 Standard cable S Standard cable S 11-LEFS32 11-LEFS32 Motor cable

CN1IF(CONT) 18 - (LEC)(LEC) 5.4 CN2PC/TB (LEC)(LEC-T1-3*G*)(LEC-W2) CN2SWOFF(LEC)(LEC) (LEC-T1-3*G*)(LEC-W2) (1) CN2 (3m) (2) (USB) 120.3 120.3 mm mm 200 200 mm/s mm/s USB (A-miniB type) 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN2 () 9.

IF ALM SF BF LED 10.LED ALM LED 7 12.LEC 9 - 3 31 DC24V10% 200mA 300mA LEC 5 57words 57word UL , UL1310 Class2 Profibus Profibus DP V1 DP slave 0125 ID 1414 GSD Dsub 9.6k 19.2k 45.45k 93.75k 187.5k 500k 1500k 12000k (bps) (m) 1200 1000 400 200 100 IF RS485(Modbus ) 115.2k 230.4kbps 115.2kbps 28m 3m 5m 5m 5m 5m 5m 10 - 0 40 90%RH ) -10 60 90%RH ) 2(0.5G) 4.9m/s

Grease pack part number: GR-S-010 (10g), GR-S-020 (20g) 1) Rod seal Apply a thin layer of grease to all surfaces of the new seal to make it easy to mount the rod seal and improve sealing.

Mount the marker (EX600-ZT1) into the marker groove as required. -14No.EX-OMQ0016 SI unit Model Indication and How to Order EX600-S SI unit Polarity of output Symbol Content Protocol 1 Source / PNP (Negative common) Symbol Content 2 Sink / NPN (Positive common) PN PROFINET Summary of Product parts No.

IDX-OM-W013-C PRODUCT NAME Refrigerated Air Dryer MODEL / Series IDU3E-10(-C,K,L,M,R,S,T) IDU3E-20(-C,K,L,M,R,T) IDU4E-10(-C,K,L,M,R,S,T) IDU4E-20(-C,K,L,M,R,T) IDU6E-10(-C,K,L,M,R,S,T) IDU6E-20(-C,K,L,M,R,T) IDU3E-23(-C,K,L,R,T,V) IDU4E-23(-C,K,L,R,T,V) IDU6E-23(-C,K,L,R,T,V) This manual is intended to explain the installation and operation of the product.

[%F.S.] 2.5 2.0 1.5 1.0 0.5 0.0 0 1 2 3 4 5 [s] Response time[s] Operating pressure range Pressure [MPa] Operable range Fluid temperature [oC] When high temperature fluids are used, the operating pressure range will be reduced. Operate within the range given above.

No.EX-OMC0002-C PRODUCT NAME CompoBus/S compatible SI unit MODEL/ Series/ Product Number EX12#-SCS# Table of Contents Safety Instructions 2 Model Indication and How to Order 8 Summary of Product parts 9 Mounting and Installation 11 Wiring 11 Settings 14 Maintenance 17 Troubleshooting 24 Specification 27 Specifications 27 Dimensions 28 -1No.EX-OMC0002-C Safety Instructions These safety instructions

Calculate the maximum speed of the load, V (mm) from travel time of the load, t (s) and stroke, st (mm).

Recommended tightening torque Unit: N m Thread size 1/8 1/4 3/8 1/2 3/4 1 Torque 3 to 5 8 to 12 15 to 20 20 to 25 28 to 30 36 to 38 (4) Before using an SMC fitting and S coupler, please refer to "Tightening the threaded portion of the connection thread" of the Fittings & Tubing Precautions. (5) Do not apply torsion or bending moment other than the weight of the product itself.

Grease pack part number: GR-S-010 (10g), GR-S-020 (20g) 1) Rod seal Apply a thin layer of grease to all surfaces of the new seal to make it easy to mount the rod seal and improve sealing.