SMC Corporation of America
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Applicable air preparation equipment VHS20 VHS30 VHS40 VHS40-06 VHS50 Y200-A Y300-A Y400-A Y500-A Y600-A AC20-A AC25-A, AC30-A AC40-A AC40-06-A AC50, AC55 Note), AC60 Note) Y200T-A Y300T-A Y400T-A Y500T-A Y600T-A Note) VHS50 can be connected to AC55 and AC60.

Option Applicable model 10-/21-AF20-A 10-/21-AF30-A 10-/21-AF40-A 10-/21-AF40-06-A 10-/21-AF50-A 10-/21-AF60-A Bracket assembly Note 2) AF52P-050AS AF22P-050AS AF32P-050AS AF42P-050AS AF42P-070AS Note 2) Assembly includes a bracket and 2 mounting screws. 1069-1 A Air Filter 1021-AF-A Dimensions AF20-A AF30-A to 40-06-A 10211021T N S J M U D J M U D S N T Air Preparation Equipment Pressure

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing

If an instantaneous flow of 10 L/min continues for 5 minutes, the accumulated flow will be 10 x 5 = 50 L. Accumulated pulse output A type of output where a pulse is generated every time a predefined accumulated flow passes. It is possible to calculate the total accumulated flow by counting the pulses. Outputs a value proportional to the flow rate.

Part number Description Note ZS-40-A Lead wire with M8 connector Length: 3 m ZS-42-A Bracket With mounting screws for PFMC7501/7102 (M3 x 5, 2 pcs.)

A B (mm) Model A 21h9 28h9 35h9 35h9 B 2 2 2 2 Weight (g) 805 1,097 1,943 2,825 MHT2-32DZ-X5070 MHT2-40DZ-X5070 MHT2-50DZ-X5070 MHT2-63DZ-X5070 0 0.052 0 0.052 0 0.062 0 0.062 653 A

HRX-OM-W004-H Operation Manual Communication function Thermo-chiller Air-Cooled Water-Cooled refrigerated type refrigerated type HRR010-A-10HRR012-A-10HRR018-A-10HRR010-A-20HRR012-A-20HRR018-A-20HRR024-A-20HRR030-A-20HRR050-A-20HRR050-A-40HRR010-W-10HRR012-W-10HRR018-W-10HRR010-W-20HRR012-W-20HRR018-W-20HRR024-W-20HRR030-W-20HRR050-W-20HRR050-W-40Keep this manual available whenever necessary

VJ10-20-4A-6 2 pcs. 6 4A 20 VJ10 6 10 15 20 25 30 0.6 m 5A 20 ZS ZF For ZSE3 1 m (For 100 VAC) 1.5 m Note) If ordering a vacuum switch with 3 m lead wire, specify both the vacuum unit switch and the 3 m lead wire with connector part numbers. Ordering example) ZX1051-K15LOECN(-Q) 1 pc. VJ10-20-4A-6 2 pcs.

8-8 8.4.5 HRSE024-A-20/23-(T) . 8-8 8.5 Pump capacity . 8-9 8.5.1 HRSE012/018-A-10 . 8-9 8.5.2 HRSE012/018/024-A-20/23 . 8-9 8.5.3 OPTION-T (HRSE012/018-A-10-T). 8-10 8.5.4 OPTION-T (HRSE012/018/024-A-20/23-T) . 8-10 8.6 Sample DoC.

~M~ / 6]X6' ~!gb ",*:z..-m;;:r~t 1~ 2M6 Screw depth 11 1 5 2-M6 Screw depth 11 ' ~ Lsii S ~ 60 L 4L.I Applicable clamp Part No. A cylinder , Maleual :Casl iron Malerial: Carbon steel I Matefial : Cast lIon . Part No.

Avoid to using 2 or more end lock cylinders at same time to perform a single task because binding may occur and one of the cylinders end lock may not release. y Use a speed controller as meter-out. Meter-in control may not allow lock to release. Locking style Turn 90 to counterclockwise pushing M/O button. Lock is released when G on cap and H OFF mark on M/O button correspond.

(Switch body only)] NPN output / Wiring bottom entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] NPN output / Wiring top entry Note 4) Digital type ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output / Wiring bottom entry ISE35-R-65-MLA [ISE35-R-65-M (Switch body only)] PNP output / Wiring top entry Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing

It may lead to a burn due to the high temperature. 8. Check the voltage using a tester for more than 5 minute after power-off in case of installation, wiring and maintenance. There is a possibility of getting electric shock, fire and injury. 54 - 9. Do not use in an area where dust, powder dust, water or oil is in the air. It will cause failure or malfunction. 10.

24 VDC 10%, Ripple (P-P)10% or less 1 output: 17 mA or less at 24 VDC, 2 output: 25 mA or less at 24 VDC 5 ms or less 1% F .S. or less IP40 Operating: 0 to 60C, Stored: 10 to 60C (With no condensation) Operating/Stored: 35 to 85%RH (With no condensation) 10 to 500 Hz at whichever is smaller of 1.5 mm amplitude or 98 m/s2 acceleration, in X, Y, Z directions for 2 hrs. each (De-energized) 980

Axial Port (M3 Port) [M] MHZA2-6 M MHZAJ2-6 M S C S C M3 x 0.5 Piping port End boss assembly 20 -0.013 -0.035 4 5 8f8 33.8 12 10 23.7 Specifications and dimensions other than the above are the same as the basic type or the end boss dimensions of the MHZA type. Specifications and dimensions other than the above are the same as the basic type.

0.56 0.66 0.70 B 0.56 0.66 0.70 A 1.50 1.81 2.29 A 1.50 1.81 2.29 B 0.48 0.58 0.61 B 0.48 0.58 0.61 A 1.42 1.72 2.21 A 1.42 1.72 2.21 B 0.60 0.70 0.74 B 0.60 0.70 0.74 A 1.54 1.85 2.33 A 1.54 1.85 2.33 B 0.37 0.46 0.50 B 0.37 0.46 0.50 A 1.30 1.61 2.10 A 1.30 1.61 2.10 Bore Bore 075 (3/4") 106 (1 1/16") 150 (1 1/2") 075 (3/4") 106 (1 1/16") 150 (1 1/2") Mounting Height (NCDM) (in) D-C7 D-C80

Dual rod cylinder 6, 10, 15, 20, 25, 32 Series CXS 10-/11-/1221-/22How to Order Clean series 10 11 12 CXSM,CXSL CXSM,CXSL CXSL Relief type Vacuum suction type Relief type (with specially treated sliding parts) Dual rod cylinder 10 CXS M 15 30 Y59A 21 CXS L 15 30 Y59A Number of auto switches Bearing type L M Ball bushing bearing Slide bearing Nil S n 2 pcs. 1 pc. n pcs.

Consult with P/A in case of 10mm or less stroke. In general, mounting on a small-size actuator may cause hunting. For prevention, a pilot valve with a built-in output restriction is available. The restriction is removable.