Exhaust Cleaner for Clean Rooms AMP Series

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G 2 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket

PAB-OM-C006-B

Replacement parts PAB-OM-C006-B P2 FLUID IN FLUID OUT P1 IN FLUID PT F E diaphragm set K T PA 3 3 1 S w itching valve assembly set K T PA 3 3 6 FLUID OUT P2 P1 4 . Maintenance 3 . How to use C aution Quality of supply air Place filter w ith filtration 5 m.

PAB-OM-C007-B

Replacement parts PAB-OM-C007-B P2 FLUID FLUID OUT IN P1 PT F E diaphragm set K T PA 5 3 1 S w itching valve assembly set K T PA 5 3 6 FLUID IN FLUID OUT P2 P1 4 . Maintenance 3 . How to use E xternal leakage of transported fluid F luid might leak externally due to life of diaphragm, and this could result in human injury or equipment damage. T ake measures against leakage.

AS-FPQ/AS-FPG

AS-FG AS-FP AS-FP AS-FM AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ 715

AS-FPQ/AS-FPG

AS-FG AS-FP AS-FP AS-FM AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ 715

Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: B [ℓ500 (ℓ250 x 2)], Port Size: 06 (3/4 Rc), Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: 5 μm, Element Seal Material: T (Fluororesin), Accessory: B (Bracket)

VFS1000

5 Port Pilot Operated Solenoid Valve Metal Seal, Body Ported Series VFS1000 How to Order 01 VFS1 1 20 1 G Symbol Option 2 position single F: With foot bracket Thread type 1 Nil N Rc NPT NPTF G T Port size 01 F Rc 1 8 2 position double SJ Option 2 Mountable only for VFS1120.

AMR3000 to 6000

N Bracket dimensions With auto-drain Model Port size A B C D E F G H J K L M U (Body) V (Adapter) L 178 211 277 321 B 260 298 366 436 T 9 9 11 11 S 8 16 21 26 R 78 97 98 115 P 50 35 45 46.5 1/4, 3/8 1/4, 3/8, 1/2 1/2, 3/4 3/4, 1 1/4, 3/8 1/4, 3/8, 1/2 1/2, 3/4 3/4, 1 AMR3000 AMR4000 AMR5000 AMR6000 100 120 130 160 180 210 246 290 264 302 370 440 10 10 45 70 101 121 131 161 51 61 66 81 28

Series VS

Series VS R8 S HOW TO ORDER ISO5599/2 VALVE MANIFOLD VV8 2 5 03 TU1 03 D T W1 W1=NEMA 4 ISO Size 1 Size 1 Port Thread Code 2 Size 2 3 Size 3 NIL Rc (PT) T NPTF F G(PF) Location of port 1(P), 5(EA), 3(EB) Number of Stations D D side 2 2 stations U U side B Both side 9 9 stations Size of port 1(P), 5(EA), 3(EB) Symbol Size Applicable ISO size 02 1/4 Size 1 U side option 03 3/8 Size 1

Super Mist-Separator NAME Series

Tebxi 27-2184 1't [,/l 3/94 Spectfications subiect to clunge wilhout notce.

KF

Specifications Fluid Air 1.0 MPa 101.3 kPa 7.0 MPa 5 to 60C (No freezing) JIS B 0203 (Taper thread for piping) Mounting section Nut section None or with seal JIS B 0211 Class 2 (Metric fine thread) Maximum operating pressure Operating vacuum pressure Proof pressure Ambient and fluid temperature Thread Seal (Thread portion) Note) Note) Male elbow, Male branch tee and Male run tee with sealant

AMR3000 to 6000

N Bracket dimensions With auto-drain Model Port size A B C D E F G H J K L M U (Body) V (Adapter) L 178 211 277 321 B 260 298 366 436 T 9 9 11 11 S 8 16 21 26 R 78 97 98 115 P 50 35 45 46.5 1/4, 3/8 1/4, 3/8, 1/2 1/2, 3/4 3/4, 1 1/4, 3/8 1/4, 3/8, 1/2 1/2, 3/4 3/4, 1 AMR3000 AMR4000 AMR5000 AMR6000 100 120 130 160 180 210 246 290 264 302 370 440 10 10 45 70 101 121 131 161 51 61 66 81 28

VZA200/400

VZA412 01 P VZA414 01 1P Thread type Nil Rc NPT NPTF G N T F VV3ZA2 031 01 50 Thread type VZA200 01 S Thread type Nil Nil Rc NPT NPTF G Rc NPT NPTF G N T F N T F 1800 Series VZA200/400 3 Port Air Operated Valve Dimensions Body ported : VZA4 2-P-01 Pilot port M5 x 0.8 Mounting hole 2 x 3.4 2 x 3.4 mounting hole (Non-locking

Electric Actuator ／ Slider Type High performance Battery-less absolute encoder

24 30 L Left side parallel (Step motor 24 VDC) A 10 12 16 20 B 5 6 8 10 Stroke1[mm] Motor option Auto switch compatibility (In-line only) 23456 Nil Housing B bottom6 Positioning pin hole Grease application (Seal band part) 50 50 Nil Without option Nil With Nil None B With lock K Body bottom 2 locations N Without (Roller specification) C With (Includes 1 mounting bracket) 1200 1,200 *Refer

Fieldbus system (SI unit compatible CompoNet TM )

If a single-solenoid valve is mounted on the standard wiring manifold, the output number for the B side valve is skipped. : Custom wiring for mixed mounting single-solenoid valves and double-solenoid valves can be specified with a Wiring Specification Sheet.

LV50-OMQ0004

Bracket thickness is approx. 1.6mm Model Piping port size A B C D E F G H I J K L LFE13 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 LFE14 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 LFE26 3/4 105 78 50 29 67 94 100 35 6 1.6 115 106 LFE38 1 120 90 55 32 73 100 106 41 6 1.6 115 106 Model M N O P Q R S T U Bracket weight LFE13 48 39 4.6 12 11.5 52 28 2.5 depth 8.5 2 Approx. 45g LFE14 48 39 4.6

HEC-OM-R008

Year Ensure that the power source and the power supply of the product is Month T U V . Z A B . Upper / Lower temperature limit alarm function HECR008 / HECR010 turned off (or the power plug must come off ) Normal When high head pump option selected Jan o To Uo Vo . Zo Ao Bo .

VHK

Connection thread R Applicable tubing Bracket mounting dimensions B S (Width across flats) Weight (g) O. D.

Low Profile Air Gripper Series MHF2

4 r t e !6 Component Parts MHZ Note Material Material No. Description No.

Diaphragm Style Flow Switch Series IFW5 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

Color of lead wire Black Symbol Contact C Z I SE3 Common A White Normally Open B (N.C.)