Rated Flow Range: 01 (0.01 to 1 L/min), Flow Adjustment Valve: None (Straight), Port Size: 01 (Rc1/8), Output Specification: C (Out 1: NPN; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: Lead Wire w/Connector, Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve)
°C, Bracket: R (w/Bracket), Calibration Certificate: None
Compact and For vacuum equipment precautions, refer to the Handling Precautions for SMC Products and the Operation Manual on the SMC website: http://www. smcworld.com Nozzle diameter Port size 05 0.5 mm 07 0.7 mm Nil 6 One-touch fitting 01 Rc1/8 female thread Symbol EXH Vacuum pressure reached S 90 kPa L 48 kPa Mounting P V Caution Specifications 1 .
Power supply for output devices (24 VDC) 1 2 1 2 Power supply for output devices (0 V) 5 [Power supply for sensor (24 VDC)] 3 If using the product in an interlocking circuit: Provide a double interlocking system, for example a mechanical system. Check the product regularly for proper operation.
[r EF] Reference condition [Anr.]
), Bracket: R (w/Bracket), Calibration Certificate: None
: °C), Bracket: R (w/Bracket), Calibration Certificate: A (w/Calibration Certificate)
: °C), Bracket: R (w/Bracket), Calibration Certificate: A (w/Calibration Certificate)
: °C), Bracket: R (w/Bracket), Calibration Certificate: A (w/Calibration Certificate)
: °C), Bracket: R (w/Bracket), Calibration Certificate: A (w/Calibration Certificate)
: °C), Bracket: R (w/Bracket), Calibration Certificate: A (w/Calibration Certificate)
: °C), Bracket: R (w/Bracket), Calibration Certificate: None
°C), Bracket: R (w/Bracket), Calibration Certificate: A (w/Calibration Certificate)
: °C), Bracket: R (w/Bracket), Calibration Certificate: A (w/Calibration Certificate)
: °C), Bracket: R (w/Bracket), Calibration Certificate: A (w/Calibration Certificate)
), Bracket: R (w/Bracket), Calibration Certificate: None
°C, Bracket: R (w/Bracket), Calibration Certificate: None
: °C, Bracket: R (w/Bracket), Calibration Certificate: A (w/Calibration Certificate)
: °C, Bracket: R (w/Bracket), Calibration Certificate: None
: °C, Bracket: R (w/Bracket), Calibration Certificate: A (w/Calibration Certificate)