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No.PS-OMH0006-F PRODUCT NAME Multi Channel Pressure Sensor Controller MODEL / Series / Product Number PSE200 Table of Contents Safety Instructions 2 Model Indication and How to Order 8 Summary of Product parts 9 Definition and terminology 10 Mounting and Installation 13 Installation 13 Wiring 15 Internal circuit and wiring example 17 Setting of Function 18 Pressure Setting 22 Setting of Special

0.7 29 40 30 10 70 3.5 20.9 4 25 2.5 25 5 14 MXY12 M5 x 0.8 31 52 40 15 86 8.5 30.9 5 3 36 32 6 18 PH TB Z T WR RL QW R RH WE WD Q W PR P PL TH Model MXY6 5.1 2.9 88 4 12 60 5 7 30 11 13 3(depth 3) 3(depth 3) 2.5 9 20 25.5 MXY8 6.1 98 3.4 4 15 70 6.5 7 38 19 13 3(depth 3) 3(depth 3) 3 10 25 32 MXY12 7.8 114 4.5 21 5 8.5 90 7 50 29 18 4(depth 4) 4(depth 4) 4 13 33 42 n QL Model 50 100 150

Dimensions n L 2 39 31 3 50 42 4 61 53 5 72 64 6 83 75 7 94 86 8 105 97 9 116 108 10 127 119 11 138 130 12 149 141 13 160 152 14 171 163 15 182 174 16 193 185 17 204 196 18 215 207 19 226 218 20 237 229 L1 L2 1.13-11

ALARM (24) Alarm output 2 NO.1 12 General-purpose input NO.2 COM (12, 25) Common The output terminal common. 3 < 1 > NO.3 13 NO.4 4 NO.5 14 5 NO.0 15 6 NO.1 16 < 2 > 7 NO.2 17 General-purpose output 8 NO.3 18 9 NO.4 19 10 NO.5 20 57 Series LC1 Series LC1 Timing for temporary stop during operation Timing for READY signal generation immediately after turning on power HOLD ON OFF ON OFF Power

MH-G04(30g) 10 2 16 3 20 4 25 5 19 3-5. / / / 10 16 20 25 20 1 10: 2 1625: 1625: 3 4 5 6 7 8 A 9 B 10 11 12 13 14 15 C 16 MHY2-10D MHY2-16D MHY2-20D MHY2-25D 17 18 MHY10-PS MHY16-PS MHY20-PS MHY25-PS 19 20 21 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to

Maintenance 10~14 4. Basic Circuit for Cylinder Operation 15 5. Troubleshooting 16~17 6. Construction and Material 18~23 -1- Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Refer to the accessories on page 4-7-14. 4-7-9 10 Series VT317 Standard Specifications Type of actuation Direct operated type 2 position single solenoid Air Fluid Operating pressure range 0 to 0.9 MPa 10 to 50C (No freezing. Refer to page 4-18-4.)

N.O. 5.7 5.5 2 VXA 1 4 VNC0 VNC02 10.4 10.2 50 VN 12 (P1) 10 (P2) Note) The companion flange is JIS B 2210 10K (standard) or its equivalent.

Tightening torque: 0.7 to 0.8 Nm 2 4 5 10 Thank you for purchasing an SMC EX600-WPN# SMC Wireless System. Please read this manual carefully before operating the product and make sure you understand its capabilities and limitations.

(Refer to the instruction manual for details on the cleaning.) 42 47 49.5 40 39.5 43 44.5 34.5 35.5 36 38 40 41.5 10 12000 14000 HAW75 45 48.5 52 45 41 43 45.5 34.5 35.5 36 39 40 42.5 15000 18000 20 HAW110 Conditions: Air pressure 0.7 MPa, Cooling water temperature 30C. Inlet air temperature 50C is saturated air. At 70C or more, it is humid air with dew point 67C. 16

Repair parts . 10 2. How to Use . 11 2-1. Procedures to operation . 11 3. Wiring . 12 3-1. AC adapter type/ IZG10-01, 02 . 12 3-2. Power supply cable type/ IZG10-03 . 12 4. Function . 13 4-1. Name of parts . 13 4-2. LED indication . 13 4-3. Mode setting switch . 14 4-4. Emitter maintenance (cleaning and replacement) . 15 4-5. Alarm function . 17 5. Performance . 18 5-1.

Hysteresis adjusting bolt 75 110 175 Ex.)1S2761 Bellows assembly for 103L1 1S2761 Light and top cover assembly for 103L1 18 8.5 When replacing other parts, please contact SMC for repair, since it cannot be repaired by user. 2.3 56 3-6.3 23 20 32 10 29 10 26 79 99 126 R 3/8 16-9-8

Fluid Vacuum of inert gas Ambient temperature: 20 oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa Atmospheric pressure to 1 x 10-5 Main exhaust valve 200 300 800 Conductance l/s Note 1 Bypass valve MAX31.5Viscosity / Theoretical value Internal 1.3 x 10-9 for the standard material (FKM) at ambient temperature, excluding gas permeation Leakage Pam3/s External 1.3 x 10-

(mm) Model OO PP SS VV QQ RR TT UU Applicable gasket ML1C25 ML1C32 ML1C40 C11.2 10 14 37 24 8 27 20 8 C11.2 16.5 18 46 30 12 32 22 8 C14 17 23.5 53 40 12.5 34 26 10 Model A B C D E F G H I J K L M N P Q S T O R U W Z V Y ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 x 0.8 M6 x 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120

(mm) Model OO PP SS VV QQ RR TT UU Applicable gasket ML1C25 ML1C32 ML1C40 C11.2 10 14 37 24 8 27 20 8 C11.2 16.5 18 46 30 12 32 22 8 C14 17 23.5 53 40 12.5 34 26 10 Model A B C D E F G H I J K L M N P Q S T O R U W Z V Y ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 x 0.8 M6 x 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120

industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: 1 : ) JIS B 8433-1993: *2) , 1. 2. 3. 1. 2. 3. 4. 4/11 FGX-OM-L007-C / 1 1.5 () 5/11 FGX-OM-L007-C FGD Series FGD , 0.5MPa 4080 oC 40 oC IN/OUT 0.1MPa , U IN/OUT 6/11 FGX-OM-L007-C 1. 1-1. 1 2 (1) 3 (2) 4 (3) (4) 5 (5) 6 (6) 7 (7) 8 (8) 9 (9) (10) (2 FGD*B ) 10 (11) (12) 18 (13) (14) 11 (15) (16) (17

(mm) Model OO PP SS VV QQ RR TT UU Applicable gasket ML1C25 ML1C32 ML1C40 C11.2 10 14 37 24 8 27 20 8 C11.2 16.5 18 46 30 12 32 22 8 C14 17 23.5 53 40 12.5 34 26 10 Model A B C D E F G H I J K L M N P Q S T O R U W Z V Y ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 x 0.8 M6 x 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120

Dot color 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Insulation color Dot mark LEC C 1 L5 Light brown Light brown Yellow Yellow Light green Light green Gray Gray White White Light brown Light brown Yellow Yellow Light green Light green Gray Gray White White Black Red Black Red Black Red Black Red Black Red Black Red Black Red Black Red Black Red Black Red I/O cable length (L) I/O

(m) r m Fig. (10) Inertia moment This shows inertia moment of m (weight) at r from the rotation axis. Calculation of inertia moment depends on the shape of the object.