High Vacuum L Type Valve

Refer to Chapter 3, Product Specific Precautions 3 (P. 7 to 8) and Chapter 5, Construction and Dimensions (P. 11) for maintenance parts. Parts with the indication of "Maintenance part" can be replaced. 4. SMC specified parts should be used for service. Refer to the Construction / Maintenance parts table. 5.

AMG

Options J: With drain guide M Mounting Dimensions Model Port Size (Nominal size B) A G F E D C B S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 R 4.5 5 5 5 5 9 9 10 12 Q 26 28 28 34 34 50 50 60 76 P 70 84 84 100 100 110 110 130 180 O 54 66 66 80 80 88 88 102 136 N 35 40 40 50 50 55 55 65 85 L 9 12 12 14 14 14 14 16 20 K 5 8 8 8 8 10 10 10 15 J 15 20 17 22 19 25 21 30 40 I 56 66 66 80 80 90 90 100

VSA4

Size Port size Rc EXH port Applicable valve Manifold base size Rc P A, EB , , 1 8 1 4 3 8 , 3 8 1 2 EA, EB 3 8 1 2 3 8 1 2 1 4 3 8 VSA420 VSA430 Common EXH Common EXH standard standard Piping specifications/Side ported is only available.

AMR3000 to 6000

These are shipped together with products. l in the gauge part number indicates thread. No symbol for "Rc(PT)", "N" for "NPT" and "F" for "G(PF)". Note 7) To mount a compact pressure switch from the back, PT elbow is needed. Compact Pressure Switch Specifications (Refer to p.3.12-1 for further information.) Mist Separator and Regulator are combined together.

: L/min; Accumulated Flow: L; Temp.: °C)

: L/min; Accumulated Flow: L; Temp.: °C)

High Purity Fluoropolymer Fittings/Needle Valve/Tubing

Series Appearance Class Metric size Inch size 1/4" 3/8" None 1/8" 1/2" 3/4" 6 8 10 12 19 3/16" 1/8" 1/4" 3/8" 1/2" 3/4" 4 2 3 Male 4 P.19 Connector LQ2H 5 2 3 Female 4 P. 20 5 2 3 Male 4 P. 21 Elbow LQ2L 5 2 3 Female 4 P. 22 5 2 3 Male 4 P. 23 Run tee LQ2R 5 2 3 Female 4 P. 24 5 2 3 Male 4 P. 25 Branch tee LQ2B 5 2 3 Female 4 P. 26 5 2 3 Union elbow LQ2E 4 P. 27 5 2 3 Union tee LQ2T 4 P.

CJP

A B L L2 MM R1 R2 U L2 MM L1 NDd9 3 NDH10 3 NX Part no.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

(or 3 kPa) Repeatability Note 2) 0.4 MPa setting (Ex.)10-ARP30-02BG 1 L/min [ANR] or less (at P2 = 0.4 MPa) 0.2 MPa setting (Ex.)10-ARP30-02BG-1 0.6 L/min [ANR] or less (at P2 = 0.2 MPa) Air consumption 0.6 MPa setting (Ex.)10-ARP30-02BG-3 1.4 L/min [ANR] or less (at P2 = 0.6 MPa) 1/8 1/4 1/8 Pressure gauge port size 5 to 60C (No freezing) Ambient and fluid temperature With a digital pressure

AME

AME150 AME450 AME650 B 1 8B 1B 1 2 0.1 MPa 0.1 MPa 0.1 MPa Max. flow line Max. flow line Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) Max. flow line Air flow rate (l /min (ANR)) Air flow rate (l /min (ANR)) Air flow rate (l /min (ANR)) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800)

AMH

/min (ANR)) Air flow rate (l /min (ANR)) AMH550 AMH250 B B 3 4 1 4 Inlet air pressure Air pressure Pressure drop (MPa) Pressure drop (MPa) Max. flow line Max. flow line Air flow rate (l /min (ANR)) Air flow rate (l /min (ANR)) AMH650 AMH350 B 1B 3 8 Inlet air pressure Air pressure Pressure drop (MPa) Pressure drop (MPa) 0.5 Max. flow line Max. flow line Air flow rate (l /min (ANR)) Air flow

CJP

A B L L2 MM R1 R2 U L2 MM L1 NDd9 3 NDH10 3 NX Part no.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

(or 3 kPa) Repeatability Note 2) 0.4 MPa setting (Ex.)10-ARP30-02BG 1 L/min [ANR] or less (at P2 = 0.4 MPa) 0.2 MPa setting (Ex.)10-ARP30-02BG-1 0.6 L/min [ANR] or less (at P2 = 0.2 MPa) Air consumption 0.6 MPa setting (Ex.)10-ARP30-02BG-3 1.4 L/min [ANR] or less (at P2 = 0.6 MPa) 1/8 1/4 1/8 Pressure gauge port size 5 to 60C (No freezing) Ambient and fluid temperature With a digital pressure

PSxx-OMT0001CN

min 12 L/min 22 L/min DC24 V 10(p-p)10() 25 mA 2 (NPN PNP) 10 mA 26.4 V 1 V (10 mA ) 2 LCD 3 7 (/) 6 7 () IP67 8 050 -2070 () 3585RH() AC1000 V 50/60 Hz 1 2 M(DC500 V ) Rc1/8 C 4 6 G1/8(ISO1179-1) F G1/8(ISO1179-1) -15No.PS-OMT0001CN-E 2 ISA3-F ISA3-G ISA3-H M12-4 4 4 5 m 0.72 mm 1.14 mm M12-4 4 4 1.14 mm 23 8 6 5 m46 14 6 5 m 0.50 mm 1.00 mm(26 )

Adapter Material: Brass, Standard, Vacuum Inlet Direction: T (Vertical), Pad Diameter: ø16, Pad Styles: B (Bellows), Material: S (Silicon Rubber), Vacuum Entry: N01 (Female Thread, NPT 1/8)

Adapter Material: Brass, Standard, Vacuum Inlet Direction: T (Vertical), Pad Diameter: ø50, Pad Styles: B (Bellows), Material: F (Fluoro Rubber), Vacuum Entry: N01 (Female Thread, NPT 1/8)

Adapter Material: Brass, Standard, Vacuum Inlet Direction: T (Vertical), Pad Diameter: ø40, Pad Styles: C (Flat w/Ribs), Material: N (NBR), Vacuum Entry: N01 (Female Thread, NPT 1/8)

Pad Diameter: 40 (Flat+Flat with Ribs+Deep+Bellows), Pad Styles: U (Flat Style), Material: S (Silicon Rubber), Rotating or Non-rotating: J (Rotating), Stroke: 50mm, Vacuum Entry: N01 (NPT 1/8), Mounting Thread: A14 (M14X1)

Adapter Material: Brass, Standard, Vacuum Inlet Direction: T (Vertical), Pad Diameter: ø40, Pad Styles: B (Bellows), Material: N (NBR), Vacuum Entry: N01 (Female Thread, NPT 1/8)

Adapter Material: Brass, Standard, Vacuum Inlet Direction: T (Vertical), Pad Diameter: ø50, Pad Styles: B (Bellows), Material: N (NBR), Vacuum Entry: N01 (Female Thread, NPT 1/8)