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No.PF-OMJ0006-J PRODUCT NAME Digital Flow Switch (Integrated display type) MODEL / Series / Product Number PFM7## Table of Contents Safety Instructions 2 Model Indication and How to Order 10 Summary of Product parts 13 Mounting and Installation 14 Installation 14 Piping 16 Wiring 17 Flow Setting 20 Function Setting 22 Default settings 22 F0 Unit selection function 23 F1 Setting of OUT1 24

Default setting is H_2: 5.0 kPa. 17 - NO. ZQ-OM01501 Normal output (OUT1) (1) Press the button once in measurement mode. (Refer to page 17) (2) P_1" and the set value are displayed in turn. (3) Press the or button to change the set value. The button is to increase vacuum pressure and the button is to decrease.

[IDFA125F-38/40] () (10 2m) (100.7m) 20 4x R2 1/2 R2 1/2 1130 78 9351 267 1120 655 75 64 (17 ) 40 1276 1375 R ) (14~18) () P.1-5 P.1-5 P.1-5 7122 20 350 700 752 IDFA100F150F 6 4 6.3 IDX-OM-U022 6.

.+24 0.50 o.6240.25 1.12 0.38 0.251 0.12 0.34 3.84 0.84 Ve-18 0.62 t.17 0.62 4.12 o.4sl1*n o?5 9.r49 &35 1.32 o.50 0.2514.25 o,41 47?

Copy function error Incorrect wiring Correct the wiring. 17 (2) Check the power supply wiring. Unable to copy Product failure Replace the product. -72No.PS-OMU0003-D Problem No.

J K l .. oN D P Q W X Z ..J (mm) 50 89 55.5 26 20 64 10.5 M1Bxl .5 B6 7 17 33.5 50 6.6 11 Depth 8 1/4 10.5 71 28.5 19 4" 80 112 68.5 32.5 25 98 12.5 M22xl .S 132 6 22 43.5 77 11 17.5 Depth 13.5 3/8 16 104 35.5 26 65.5 83 94.5 81 26 20 n 10.5 Ml8xl .5 103 7 17 33.5 60 90 14 Depth 10.5 1/4 15 84 28.5 19 55.5 High Magnetic Field Resistallce Sellies COQ2BP Foot Mount: COQ2LPO-OOM-OO H Thread

Electric actuators / Common precautions . 10 2.1 Wiring/Cables . 10 2.2 Design/Selection . 11 2.3 Mounting . 12 2.4 Handling . 13 2.5 Operating Environment . 15 2.6 Maintenance . 16 2.7 Actuator with Lock . 16 2.8 Design/Selection . 17 2.9 Handling . 17 2.10 Mounting . 18 2.11 Power Supply . 19 2.12 Grounding . 19 2.13 Wiring . 19 2.14 Maintenance . 20 3.

Specifications 13 3.1 Specifications 13 3.2 Parts Description 14 3.3 External Dimensions 15 (1) Screw mounting (JXCEH7-) 15 (2) DIN rail mounting (JXCEH8-) 16 3.4 Mounting 17 (1) Mounting 17 (2) Grounding 17 (3) Mounting location 18 4. Initial Setting 19 4.1 Switch setting (EtherCAT ID) 19 4.2 Hardware Configuration 19 5.

x 2.5 threads through for strokes of 20mm or less. 109 + Stroke 17 + Stroke 17 182 226 2-M24 x 3 effective thread depth 33 143 + 2 (strokes) Width across flats 55 Width across flats 55 M36 x 1.5 M36 x 1.5 21 21 47 47 50 50 64 + Stroke 64 237 + 2 (strokes) 8 Compact Cylinder Series CQ2 Reed Switches/Direct Mounting Type D-Z73/Z76/Z80 Auto Switch Specifications With indicator light D-Z73

9 14 Bottom piping adapter PBT 15 O-ring HNBR Fluoro coating 16 Flow adjustment valve body PBT 17 Body Brass Electroless nickel plating 18 Needle Brass Electroless nickel plating 19 O-ring HNBR Fluoro coating 20 O-ring HNBR Fluoro coating @0 PFMB7501/7102 Component Parts !2 !1 !0oi q w e r t y u i !1 !2 No.

Note Main parts 16, 17, 18, 19 MHC6-PS Seal kit MHCA2-6 (Short body) Double acting/with fingers closed Single acting Double acting/with fingers open o i e q t !1 !6 w !0 r !4 u !5 !7 y !3 !2 Parts list No. Description Parts list No.

Wiring . 17 3-2-1. Connection Circuit . 17 3-2-2. Wiring of the power supply cable . 19 3-2-3. Ground connection . 19 3-2-4. AC adapter . 19 3-3. Timing chart . 20 4. Function . 21 4-1. Name of Parts . 21 4-2. Emitter maintenance alarm and cleaning . 21 4-3. Replacement of the emitter assembly . 22 4-4. Alarm function . 24 5. Performance . 25 5-1.Basic characteristics . 25 6.

B 1/4 HEX. : 17 17 Option Semi-standard Semi-standard 8 Semi-standard 8J Port thread Part no. Port thread Part no. Rc Rc C4LF-8J-A G G C4LFF-8J-A NPT C4LF-8(Z)-A NPT C4LFN-8J(Z)-A C4LF-8-A B B External appearance drawing and part no. 1/4 HEX.17 Note 2 Note 2 Option Semi-standard Semi-standard Semi-standard 2 Port thread Part no. Port thread Part no.

marking No.1 (+), No.2 () 0.75 mm2 5.9 14 ATEX Compliant Base Mounted Type Series 52-SY5000 Dimensions 2-position double L plug connector (L) 52-SY5240 (R) -L-02 19 18 9.5 2 x 4.3 (Mounting holes) 37.2 M5 x 0.8 (External pilot port) 15.5 15.5 4 48 Manual override 4 Insulation: Black () B A 17.5 17.5 A B PE X P EB EA Insulation: Red (+) 35 17 17 56 65.4 62.5 M5 x 0.8 (Pilot EXH. port)

40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion

40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion

Effective area is larger than the former model. 6, 10, 16, 20 AS12l1F-M5 AS13l1F-M5 M5 X 0.8 6, 10, 16, 20 AS12l1F-U10/32 AS13l1F-U10/32 10-32UNF 20, 25, 32 AS22l1F-01 AS23l1F-01 R(PT)1/8 Tube swivels 360 20, 25, 32, 40 AS22l1F-02 AS23l1F-02 R(PT)1/4 40, 50, 63 AS32l1F-02 AS33l1F-02 R(PT)1/4 Universal style permits 360 piping swivel. 40, 50, 63 AS32l1F-03 AS33l1F-03 R(PT)3/8 63, 80, 100

(mm) Vacuum entry (Female thread) Vertical Vacuum entry direction M8 x 1.25 M5 x 0.8 Rc 1/8 Connection/Vacuum entry Connection 10 Female thread 10 to 16 17 14 19 M5 x 0.8 20 to 32 10 to 16 47 46 M5 x 0.8 40, 50 M8 x 1.25 20 to 32 Pad dia.

range (mm) 8 7 Linear motion parts 6 Linear motion parts Hysteresis (mm) 2 1 1 8.5(9) 11(11.5) 9 11.5 9 11.5 Proper mounting position A (mm) D-F7 /F7 V/J79/J79C/F7 W/ F7 WV/J79W/F7BAL/F7BAVL Rotary motion parts Rotating angle D-A7/A8 D-F79F 40 32 7 4 29 36.5 36 45.5 Rotary Size Rotary motion parts 55 46 10 7 24.5 (25) 32 (32.5) 31.5 (32) 41 (41.5) 28 27 4 3 25 32.5 32 41.5 32 40 32 40 Operating

16, 20 25, 32 Without indicator light Reed switch 10 10, 16 20, 25, 32 16, 20 25, 32 With timer D-F7NTL Grommet (In-line) Solid state switch With pre-wire connector is available for D-F7NTL type, too.