Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Clean Room Specification 11-LEFS Series LEFS16, 25, 32, 40

3 H Clean Series q 11 Vacuum type q Accuracy w Size e Motor type 16 25 32 40 Nil Basic type H High precision type Symbol Type Applicable size Compatible controller/ driver 11-LEFS16 11-LEFS25 11-LEFS32 11-LEFS40 LECP6 LECP1 LECPA LECPMJ Nil Step motor (Servo/24 VDC) V V V V r Lead [mm] A Servo motor (24 VDC) V V LECA6 Symbol 11-LEFS16 11-LEFS25 11-LEFS32 11-LEFS40 A 10 12 16 20 B 5 6 8

Vacuum Manifold for fieldbus system

Pneumatic Circuit 29 11. Exhaust/Flow Rate Characteristics 30 11.1. Ejector Exhaust Characteristics/Flow Rate Characteristics (Representative value) 30 11.2. Vacuum Release Flow Rate Characteristics (Representative value) 32 12. Limitations of Use 33 13. Troubleshooting 34 -1No.

Rotary Table

Additionally, note that the 12 VDC relay does not apply to the auto switch. -12- 11. Pay attention to leakage current. <2-wire type> Current (leakage current) flows to the load to operate the internal circuit even when in the OFF state.

10

[mm] Adjustment bolt (Mountable on either right or left) A Model A B C D E F MM MHL2-10DZ-X28 22 15.5 2.5 7 4 2 Max. when adjusted: E M5 x 0.8 MHL2-10D1Z-X28 11 16 MHL2-10D2Z-X28 11 16 MHL2-16DZ-X28 27.5 18.5 3 8 B 9.5 9 M6 x 1 MHL2-16D1Z-X28 13.5 20 MHL2-16D2Z-X28 13.5 20 MHL2-20DZ-X28 32.5 21 4 12 MM 7.5 7 M8 x 1 MHL2-20D1Z-X28 8.5 9 MHL2-20D2Z-X28 8.5 9 MHL2-25DZ-X28 38 26 5 Closing stroke

Card Motor

Green Between case and AC line: 500 VDC, 50 Mor more GND 32 to 122F (0 to 50C) (No freezing) Ambient temperature F.G.

Silencer Series AN

Construction/Parts/Dimensions AN05/10/20 AN15/30/40 No hexagonal part in AN05 and AN10 B Dimensions (mm) B Port size R, NPT A B D Model Sound absorbing material (Resin sintered body) AN05-M5 AN10-01 AN15-02 AN20-02 AN30-03 AN40-04 6.5 M5 x 0.8 15 Body (Resin) A 1/8 23 11 A 16 14 1/4 32 Hexagonal flats D 16.5 14 1/4 45 20 17 3/8 58.5 Port size 24 21 1/2 68 2 Silencer Compact Resin Type/One-touch

Membrane Air Dryer

(For the part number of the dew point indicator, refer to pages 10 and 11.) 3.

id_idw_and_ida_series_air_dyers

11 11 11 11 11 11 11 Optional dew points . 100F (70C) Standard pressure dew point . 40F (40C) Maximum inlet temperature . 122F (50C) Minimum inlet temperature . 35F (1.5C) Compact Heatless Air Dryer Series IDW Solenoid valve services kit 20 22 25 32 42 42 57.5 57.5 Optional Extras Maximum working pressure . 232psig Foot mounting bracket 12DVC electric control Wall mounting bracket Minimum

Compact Electric Actuator Series LG1

A A B Section BB PCD Thread Coupling Motor 28.3 10.5 30 8 26 32 6 0.5 Section AA (Housing interior) Coupling mounting dimensions 11 Series LG1H Nonstandard Motors/Matsushita Electric Industrial Co., LTD Drivers Dimensions 5.2 150 160 168 5.2 20 A 105 3 Summary of input /output signals (connector CN-1/F) Dimension table Pin No. 1 2 3 4 5 6 7 8 9 10 11 Pin No. 12 13 14 19 20 21 22 23 24 25

Dual Speed Controller with One-touch Fitting Series ASD 1

Metric size Inch size With One-touch fitting 04 06 08 10 12 01 03 05 07 09 11 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT AS N ASP Bore size ASN M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AQ ASV AK ASS Needle Valve/Flow Characteristics (Inlet Pressure: 0.5 MPa) ASR ASD230F ASD330F ASD430F ASF 100 200 400 1.5

Model Selection 1

Single unit VX31/32/33 N.C./N.O./C.O. 17-3-81 Single unit Direct operated 3 port 17-3-87 VVX31/32/33 N.C./N.O./C.O. Manifold 17-3-93 VXA21/22 N.C./N.O. Single unit 2 port 17-3-97 VVXA21/22 N.C./N.O. Manifold Direct operated Air operated VXA31/32 17-3-101 C.O. Single unit 3 port 17-3-105 VVXA31/32 C.O.

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

Series 12-CY3B Magnetic rodless cylinder 15, 20, 25, 32, 40 How to Order Clean series 12 Special treatment on sliding part Bore size (mm) 300 15 12 CY3B Cylinder stroke (mm) Type Bore size Port type Symbol 15 M5 x 0.8 Rc NPT G Nil 20, 25, 32, 40 TN TF Model Maximum manufacturable stroke Cushion Standard stroke (mm) Bore size (mm) Port size Lubrication Model Rubber Air 15 1000 M5 x 0.8 Rc1

Title not found

Series SV1000 sv1000 Spacer type { Pori sze lor Series SV2000/3000/4000 sv2ooo I ile sv4000 1/4 sY5000-11-15 sY7000-11-11 n. ,* 5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported lvlodel [,landold Pilch (mm) Appllcable cyrnoef I/etalseal voz1000 t o 0 1 3 15 0.35 ta 0 56 0 . 1 9 Up to o50 Upto o80 vQz2000 voz3{mo UD 10 olO0 Optonil atching coil valve operates the same as a 2 position

Digital Flow Switches

Pin description PF2A7H-(-M) 68 69 1 DC(+) 2 Analog output 3 DC() Accumulated pulse output wiring examples 4 OUT1 4-I thread with depth J 40 Max. 30V 80mA or less OUT1 Black Load H 0V Blue 50msec PF2A7H-(-M) 28 29 B C D E F G H I J A Model Brown PF2A703H PF2A706H PF2A712H 55 160 40 92 67 55 Rc 1, NPT 1, G 1 36 M5 x 0.8 8 OUT1 80mA Load Black 65 180 45 104 79 65 Rc 11/2, NPT 11/2, G 11/2 Rc

KQ-OMS0022

Replace the product in the case of failure such as difficulty removing or inserting tubing. 11 - 5. Construction Male connector Male elbow No.

VQC

Note 2) Symbols for inch sizes are as follows: N3: 5/32" N7: 1/4" N9: 5/16" NM: Mixed The top ported elbow is LN and the bottom ported elbow is BN. Kit designation/Electrical entry/Cable length (Refer to page 2-2-16 for detailed information on kits.) SI unit COM. Input block COM.

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

20 12 11 21 15 23 30 40 40 65 11 37 4 17 4 4 10.4 10.4 KDM 14 41 M 13 40.5 6 18.5 10 10 12.8 12.8 KB 8 A L 14 44.5 48.5 53.5 57 54 59.5 62.5 4.2 8 17 15.2 20.5 26 18 15.2 KR (R) Connection threads H 10 19 18.5 23 41 29 18.5 KA (R) 12 22 20.9 20.9 24 58 46 2 x Applicable tubing KQG2 Reference dimension for R threads after installation Note 1) D indicates the maximum diameter.

Refrigerated Air Dryer

D A B Grommet with membrane Power cable outlet (17) Dimensions (mm) A 230 B C D Circuit breaker Model 32 B D IDFA4E, 6E, 8E, 11E IDFA15E1 67 179 43 258 77 158 C E A IDFA22E to 75E Power cable outlet (17) (Wire diameter 9 to 11) F (mm) Dimensions E D C B A F Model Signal cable outlet (Wire diameter 17) Grommet with membrane IDFA22E IDFA37E IDFA55E IDFA75E 59 125 40 25 46 39 60 Terminal block

Speed Controller with One-touch Fittings In-line Type/Panel Mount Type AS  1F-3 Series

Note) Metric size 23 04 06 08 10 12 Inch size 3.2 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 4 6 8 10 12 Made to Order (For details, refer to page 622.)

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Applicable bore size B2 C2 d H2 SNJ-010C 10 11 12.7 M8 x 1.0 4 NTJ-010C 10 7 8.1 M4 x 0.7 3.2 Y-J016C 16 11 16.6 21 M5 x 0.8 SNJ-016C 16 14 16.2 M10 x 1.0 4 Part no. NDd9 NDH10 NX R1 U1 Y-J010C 3.30.030 0.060 3.3+0.048 0 3.2 8 10 NTJ-015C 16 8 9.2 M5 x 0.8 4 Y-J016C 50.030 0.060 5+0.048 0 6.5 12 10 * A knuckle pin and retaining rings are included.