Rated Flow Range: 40 (5 to 40 L/min), Flow Adjustment Valve: S (w/Flow Adjustment Valve), Thread: N (NPT), Port Size: 06 (3/4), Output Specification/Temperature Sensor: F (Out 1: PNP; Out 2: Flow Rate: Analog 4 to 20 mA; Temp.: None; Temperature Sensor: None), Lead Wire: N (w/o Lead Wire and M8 Connector), Unit Specification: M (Instantaneous Flow: L/min, Accumulated Flow: L,Temperature:

Rated Flow Range: 40 (5 to 40 L/min), Flow Adjustment Valve: S (w/Flow Adjustment Valve), Thread: Rc, Port Size: 06 (3/4), Output Specification/Temperature Sensor: F (Out 1: PNP; Out 2: Flow Rate: Analog 4 to 20 mA; Temp.: None; Temperature Sensor: None), Lead Wire: N (w/o Lead Wire and M8 Connector), Unit Specification: M (Instantaneous Flow: L/min, Accumulated Flow: L,Temperature: °C),

Rated Flow Range: 40 (5 to 40 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 06 (3/4), Output Specification/Temperature Sensor: C (Out 1: NPN; Out 2: Flow Rate: Analog 1 to 5 V,Temp.: None, Temperature Sensor: None), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: J (Instantaneous Flow: L/min, Accumulated Flow: L, Temperature: °F),

Rated Flow Range: 40 (5 to 40 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: F (G), Port Size: 04 (1/2), Output Specification/Temperature Sensor: AT (Out 1: NPN; Out 2: Flow Rate: NPN; Temp.: NPN; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector), Unit Specification: M (Instantaneous Flow: L/min, Accumulated Flow: L,Temperature: °C), Bracket: None

: °F), Bracket: None, Calibration Certificate: None

Flow Range: 40 (5~40 l/min), Thread: F (G thread), Port Size: 04 (1/2), Wiring Specification: N (w/o Lead Wire)

Protocol: 9 (EtherNetIPâ„¢), Number of Axes, Special Specifications: F (1 Axis, w/STO Sub-function), Mounting: 7 (Screw Mounting), Actuator: LEFS (Ball Screw), Type: Basic Type, Body Size: 40, Motor Mounting: L (Left Side Parallel), Lead: A (16: 10mm; 25: 12mm; 32: 16mm; 40: 20mm), Stroke: 950mm

ALB900

To booster lube From booster lube To booster lube From booster lube A B 63 63 80 85 90 100 C Port size Rc INA-11-402 INA-11-403 INA-11-404 INA-11-405 INA-11-406 INA-11-407 Model 1 4 3 8 15 15 15 20 22 22 141 164.5 170 180 230 251 , , 1 4 3 8 1 2 B C D E F Port size Rc Part no. A 3 4 , 1 2 150 165 42.7 76.3 45 65 40 60 35 40 80 80 1 1 3 4 ALBA90-10 ALBA90-20 14-13-19

Hand Valve Series VH

6 Series VH How to Order VH 2 0 1 02 1(P) port location Hand valve R Standard (Opposite to handle side) Handle side Body size (Base size) Port size (nominal size) 2 3 4 6 1/4 base 3/8 base 1/2 base 1 base 02 03 04 06 10 1/4 3/8 1/2 3/4 1 Piping/Mounting Mounting method Body mounted Panel mounted Body mounted Panel mounted Piping (1) Side Side Bottom Bottom Symbol 0 1 2 3 Port thread N F

VQ4000

SX VK VZ Space saving 40% less VF Capacity saving 50% less (In house comparison) VFR VP7 VP4 VQ Various centralized wiring options Compact design with High speed & Long life VQ4 VQZ Large flow capacity F T kit (D-sub connector) kit (Terminal box) (Suitable for cylinders up to 140) VQD (Metal seal, with light and surge suppressor) VZS Built-in One-touch fitting for easier piping

Electro

Specificotions Cam type Type Double acting 4 lo 20 mADC (standard ) Input current 3580Q (1-5mA), 8840 (2-1OrnA), 2350 (4 to 20mA),155Q(5-'25mA), SeO (tO-SOmn) Inout resistance 20 to 1OO PSI (1.4 to Tkgflcm') Supply air pressure 60'to1OO" (standard) o'40 to 3.35 inch (10 to Bsmm) (standard) Strokex 0.5o/o or less Sensitivity +2olo or less +2olo or less Linearity 1olo or less O.75Vo or less

2-Layer Soft Fluoropolymer Tubing

TQ0425 TQ0604 TQ0806 TQ1008 TQ1209 Temperature F (nC) 290 (2.0) 276 (1.9) 218 (1.5) 160 (1.1) 174 (1.2) 4 to 68 (20 to 20) 247 (1.7) 232 (1.6) 174 (1.2) 131 (0.9) 145 (1.0) 86 (30) Outer layer Inner layer Inner layer Outer layer 203 (1.4) 203 (1.4) 145 (1.0) 116 (0.8) 131 (0.9) 104 (40) Special Special Special Special Chemical Chemical 174 (1.2) 160 (1.1) 116 (0.8) 87 (0.6) 116 (0.8) 122

Manifold Specifications

Applicable solenoid valve Type 20 How to Order G L M D Option VV4Z1 05 20 1 4(A), 2(B) port VZ1120-M5 Applicable blanking plate assembly DXT170-25-1A Individual EXH spacer assembly DXT170-48-1A Individual SUP spacer assembly DXT170-44-1A Stations P, R port thread type 02 2 stations F: With foot bracket 20 20 stations Nil Rc G NPT 1(P) port 00F 00N 3(R) port NPTF 00T Bracket is not mounted

“

50 0 10 20 30 40 50 Units used Units used Bleed air 0 IR No fixed throttle in the new design.

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50 How to Order 30 03 RZ VHS Made to Order Standard Nil Body: Red X1 Built-in silencer (EXH port) X502 Pressure relief Optional specifications 3 port valve Des

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50 How to Order 30 03 RZ VHS Made to Order Nil X1 X502 Standard Body: Red Built-in silencer (EXH port) Pressure relief 3 port valve Optional specifications Symbol B R Z Description Knob color: Black Body size Flow direction: Right to left Symbol 20 30 40 50 Standard port size 1/8 3/8 1/2 3/4 PSI

Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series How to Order XLAQ M9N 16 A q w e r t y w Indicator/Actuator port direction q Flange size Size 16 25 40 50 Indicator Without indicator Symbol Nil A F G J K L M Rear flange surface Actuator port direction Flange side Flange side Left flange surface Rear flange surface Right flange surface

ALF400 to 900, ALT-5/-9

ALF400 to 900, ALT-5/-9 Series Operating Pressure Range Tank and line pressure How to Order ALF 40 02 0 (2) (1) Option Operating allowable range Operating allowable range Tank pressure (MPa) Nil R Auto Feed Lube Flow direction: Right to left Option Body size Port size Nil Description Applicable model Symbol 40 50 60 80 90 2 1 02 03 04 06 10 12 14 20 4 1 4 3 8 3 B With bracket

Series CXSJ 11-/12- ø6, ø10 21-/22- Dual Rod Cylinder/Compact Type

M L Bearing type Compact type Slide Bearing Ball bushing bearing Bore size/Stroke (mm) Standard stroke 10, 20, 30, 40, 50 10, 20, 30, 40, 50 Bore size 6 10 Auto Switch Specifications (Refer to the WEB catalog for detailed specifications and auto switches not in the following table.)

AQ

Quick Exhaust Valve Series AQ Model Excellent exhaust characteristics Large flow capacity Compact and lightweight A wide selection of models Port size Effective area (mm2) Mass (g) Model IN OUT OUT EXH AQ1500-M5 AQ1510-01 AQ2000-01 AQ2000-02 AQ3000-02 AQ3000-03 AQ5000-04 AQ5000-06 M5 x 0.8 2 2.8 25 1 8 4 5.8 45 1 8 25 25 110 1 4 35 40 105 1 4 40 42 215 8 3 60 70 205 1 2 105 115 690 3 4

Information

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 ASG22F-M5 ASG32F-01 ASG42F-02 ASG52F-03 ASG62F-04 M5 x 0.8 6, 10, 16, 20 R1/8 20, 25, 32 R1/4 20, 25, 32, 40 R3/8 40, 50, 63 R1/2 63, 80, 100 Specifications Fluid Air Proof pressure 1.5 MPa Max. operating pressure 1 MPa Min. operating pressure 0.1 MPa Ambient and fluid temperature 5 to 60C (No freezing) 10 turns (8 turns Note 1)) Number