5 Port Solenoid Valve, Series VQC For each additional input block, add 21mm.) n: Stations (maximum 24 stations) n L L1 L2 L3 L4 1 55.5 178 200 210.5 2 66 188.5 212.5 223 3 76.5 199 225 235.5 4 87 209.5 237.5 248 5 97.5 220 250 260.5 6 108 230.5 250 260.5 7 118.5 241 262.5 273 8 129 251.5 275 285.5 9 139.5 262 287.5 298 10 150 272.5 300 310.2 11 160.5 283 312.5 323 12 171 293.5 325 335.5 13 181.5 304 325 335.5 14 192 314.5
kPa 0.05 0.5 300 kPa 300 kPa 0.10 0.00 0.0 0.00 0.0 0.1 0.2 0.3 0.4 0.5 0.0 0.6 0.8 0.2 0.4 1.0 0.0 0.5 1.0 1.5 2.0 2.5 3.0 Flow rate [l/min] Flow rate [l/min] Flow rate [l/min] 954 Flow Sensor Series PFMV5 Dimensions PFMV5-1 PFMV5F-1 0.8 34.4 10 2 x M5 x 0.8 15.2 18 15 7.1 3 2 x 3.4 14 Both-side bracket One-side bracket 10 x n pcs. + 24 (n = 1 to 5) (25.7) 10 x n pcs. + 14 (n = 1 to 5)
350 Flow rate (L/min (ANR)) Supply pressure P1 (MPa) Relief flow rate (L/min (ANR)) IR1020-01 IR1020-01 IR1020-01 Back pressure: 1.0 MPa Supply pressure: 1.0 MPa 1.0 0.8 0.204 0.9 0.7 Set pressure (MPa) Set pressure (MPa) 0.8 0.202 0.6 0.7 Set point 0.5 0.6 0.200 0.5 0.4 0.4 0.3 0.198 0.3 0.2 0.2 0.1 0.196 0.1 0 100 200 300 400 500 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 300 0 100 200 1.0
Changes from the standard type are: KT10F KT10H KT10R KT10J KT10L KT10N KT10P Option Other Parameters HF Source pressure Cv 6000 psig (41.4 MPa) 0.12 Wetted Parts Material S B 316 SS 316 SS Brass Bronze 300 SS series Vespel (Option: PEEK) PCTFE Viton (Option: Polyurethane, Buna-N, Ethylene propylene) PTFE C 300 SS series 316 SS Wetted Parts Body Inlet filter Piston and trim Seat, main valve
20 25 32 40 Bore size (mm) MK(2) 32 Piston speed (mm/s) 0.5 to 300 40 0.27 0.4 0.65 1.2 Allowable kinetic energy (J) RS Q G Note) Other intermediate strokes can be manufactured upon receipt of order.
other than 300 mm, refer to the plug connector lead wire.
For Air 1.0 Downstream pressure of valve (P2) [MPa] Upstream pressure of valve P1z1.0 MPa 0.8 Subsonic 0.9 0.6 Critical pressure 0.8 0.7 Sonic 0.4 0.6 0.5 0.4 0.2 0.3 0.2 0.1 0 3/64 (1.2) 50 100 150 3/32 (2.4) 100 200 300 400 1/8 (3.2) 300 200 100 400 500 600 700 5/32 (4) 200 1, 000 800 400 600 7/32 (5.6) Series VXN2 250 500 7/32 (5.6) Series VXN3 500 1, 000 1, 500 2, 000 Flow rate Q [L/min
1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
NPN open collector, single output Analog, no output, 3 turn setting 14 NPN open collector, single output Analog, no output, 200 degree setting 15 Electrical entry NPN open collector, double output Analog, no output, 3 turn setting 24, 12, 6, 5, 3 VDC/100, 110, 200, 220 VAC 16 G H L LN LO M MN MO Lead wire length 300 mm Lead wire length 600 mm With lead wires (Length 300 mm) Without lead wires
(for Junction Common) Plug connector lead wires have a standard length of 300 mm, however, the following lengths are also available. Caution Single solenoid SJ3000-46-SC-l Double solenoid, 3 position type, 4 position type SJ3000-46-DC-l Connector Assembly Part No.
20 25 32 40 Bore size (mm) MK(2) 32 Piston speed (mm/s) 0.5 to 300 40 0.27 0.4 0.65 1.2 Allowable kinetic energy (J) RS Q G Note) Other intermediate strokes can be manufactured upon receipt of order.
Rubber bumper is standard equipment for long stroke type. 75, 100, 125, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 20 Action 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 D Double acting 25 For "Manufacture of Intermediate Strokes", refer to page 7-4-5. Applicable Auto Switch/Refer to page 7-9-1 for further information on auto switches.
MGF40 MGF40 20MGF40 MGF40 10 10 10 MGF40 Data MGF40 10 5 4 3 5 4 3 2 2 5 5 1 10 20 30 40 50 100 200 300 400 1 5 4 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) l = 200 mm l = 300 mm Graph (3) Graph (4) v = 150 mm/s or less v = 200 mm/s or less Graph (7) Graph (8) 20 300 300 200 200 MGF100 MGF100 20 100 100
The MB series medium duty tie rod cylinder offers an improved design that enhances cylinder operation and ease of use. The standard air cushion utilizes a floating cushion seal to eliminate piston rod bouncing. The cushion volume has been elevated permitting about 30% more allowable kinetic energy absorption. The port and captive cushion adjustment valve are located on the same side of cap
The MB series medium duty tie rod cylinder offers an improved design that enhances cylinder operation and ease of use. The standard air cushion utilizes a floating cushion seal to eliminate piston rod bouncing. The cushion volume has been elevated permitting about 30% more allowable kinetic energy absorption. The port and captive cushion adjustment valve are located on the same side of cap
The MB series medium duty tie rod cylinder offers an improved design that enhances cylinder operation and ease of use. The standard air cushion utilizes a floating cushion seal to eliminate piston rod bouncing. The cushion volume has been elevated permitting about 30% more allowable kinetic energy absorption. The port and captive cushion adjustment valve are located on the same side of cap
The MB series medium duty tie rod cylinder offers an improved design that enhances cylinder operation and ease of use. The standard air cushion utilizes a floating cushion seal to eliminate piston rod bouncing. The cushion volume has been elevated permitting about 30% more allowable kinetic energy absorption. The port and captive cushion adjustment valve are located on the same side of cap
The MB series medium duty tie rod cylinder offers an improved design that enhances cylinder operation and ease of use. The standard air cushion utilizes a floating cushion seal to eliminate piston rod bouncing. The cushion volume has been elevated permitting about 30% more allowable kinetic energy absorption. The port and captive cushion adjustment valve are located on the same side of cap
The MB series medium duty tie rod cylinder offers an improved design that enhances cylinder operation and ease of use. The standard air cushion utilizes a floating cushion seal to eliminate piston rod bouncing. The cushion volume has been elevated permitting about 30% more allowable kinetic energy absorption. The port and captive cushion adjustment valve are located on the same side of cap
The MB series medium duty tie rod cylinder offers an improved design that enhances cylinder operation and ease of use. The standard air cushion utilizes a floating cushion seal to eliminate piston rod bouncing. The cushion volume has been elevated permitting about 30% more allowable kinetic energy absorption. The port and captive cushion adjustment valve are located on the same side of cap