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When actually mounting an auto switch, adjust the position after confirming the operating state of the auto switch. 95 Guide table10-MGF Dimensions 10-MGF40/63/100 4-N V D C D C E F H A + Stroke B + Stroke GB GA T X PP (Rc, NPT, G): Relief port 2-P(Rc, NPT, G) Port for extension Port for retraction When the cylinder is extended KA: T-slot for hexagon bolt 4-M K KB KC 6-K (6 positions) 9 9

switch P3DWAm D-P3DWAm M9mV D-M9mVm *: For applicable auto switches, refer to the table below.

7 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 to 120 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC 240VAC (50/60 Hz) Other D: Type D DIN terminal (With connector) Option Nil G None With pressure gauge How to Order Pilot Valve Assembly DO: Type D DIN terminal (Without connector) Y: Type Y DIN terminal (With connector) SF4 1 G 80 Soft start-up valve Rated coil voltage 1 2 3 4 5 6 7 9 100

Spacer Bolt Top cover Top Cover Mounting Bolt Tightening Torque Bore size Tightening torque 25, 32 0.46 to 0.60 lbfft [0.63 to 0.82 Nm] 2 CKZT -X2797 -X2798 Dimensions CKZT S-X2797 Clamp arm (Refer to page 5 for details.) 16 93 52 53 40 10 34 13 250.1 34 3 170.05 44 A 50.1 180.1 28 +0.1 0 C B Proximity switch 2 x 4 x M5 x 0.8 depth 6 G1/8 Unclamping port A D E G1/8 Clamping port Bore size

Fittings & Tubing Air Cylinders Rotary Actuators V D C D C E F H A + Stroke B + Stroke GB GA T X PP (Rc, NPT, G): Relief port 2 x P (Rc, NPT, G) Port for extension Port for retraction When the cylinder is extended KA: T-slot for hexagon bolt 4 x M K KB KC 6-K (6 positions) 10 10 M12 x 1.75 M10 x 1.5 M8 x 1.25 M Bore size Standard stroke (mm) GB D A 170 140 10 10 38 38 36.5 E B F KC 11 11

Alarm indication and trouble shooting . 6-1 6.1 Alarm Display . 6-1 HRS Series HRX-OM-R039 Contents 6.2 Alarm buzzer stop . 6-2 6.3 Troubleshooting . 6-3 6.4 Other Errors . 6-4 Chapter 7 Control, Inspection and Cleaning . 7-1 7.1 Control of Circulating Fluid Quality . 7-1 7.2 Inspection and Cleaning . 7-2 7.2.1 Daily check . 7-2 7.2.2 Monthly check . 7-3 7.2.3 Inspection every 3 months .

Option . 6-1 6.1 OPTION LIST . 6-1 6.2 OPTION C [WITH INVERTER FOR COMPRESSOR] . 6-1 6.3 OPTION M [DEIONIZED WATER (PURE WATER) PIPING] . 6-1 6.4 OPTION P [WITH INVERTER FOR PUMP] . 6-2 Chapter 7 Alarm Notification and Troubleshooting . 7-1 7.1 ALARM NOTIFICATION . 7-1 7.2 ALARM SOUND STOP . 7-3 7.3 TROUBLESHOOTING . 7-4 7.3.1 Alarm details, causes, and troubleshooting . 7-4 7.3.2 How to

IDFA Series 6-1 Specifications 6 1 IDX-OM-W031 Air Dryer 6 References 6-3 Dimensions IDFA22EIDFA37E IDFA55EIDFA75E Measuremm Model Port Size A B C D E F G K L M N P Q R IDFA22E R1 290 775 623 134 405 698 93 13 314 85 600 340 IDFA37E R1-1/2 855 680 IDFA55E R2 470 855 800 (128) (273) (868) (110) 13 500 75 700 526 (110) 519 IDFA75E 900 (968) IDFA Series 6-3 Dimensions 6 2 IDX-OM-W031 Air Dryer

10 12 kg 18 22 23 27 28 46 1ANR 2065% 2 330mA 4 () 6-1 IDFA Series 6 1 IDX-OM-W017 6 6-2 GWP (GWP) Regulation (EU) No 517/2014 IPCC AR4) R134a 1,430 1,430 R404A 3,922 3,920 R407C 1,774 1,770 R410A 2,088 2,090 (1) (2) IDFA Series 6-2 GWP 6 2 IDX-OM-W017 6 6-3 mm IDFA4E15E1 A B C D E F G H J K L M N P Q IDFA3E Rc3/8 226 410 473 67 125 304 33 73 31 36 154 21 330 231 15 IDFA4E

Node address SW1 SW2 SW3 SW4 Node address SW1 SW2 SW3 SW4 0 0 0 0 0 8 0 0 0 1 1 1 0 0 0 9 1 0 0 1 2 0 1 0 0 10 0 1 0 1 3 1 1 0 0 11 1 1 0 1 4 0 0 1 0 12 0 0 1 1 5 1 0 1 0 13 1 0 1 1 6 0 1 1 0 14 0 1 1 1 7 1 1 1 0 15 1 1 1 1 0: OFF 1: ON Set the node address so that it does not duplicate the node address of other slaves.

INSTALLATION A B c D Installation Transmission oin & Feed-back lever Fig. 1 SINGLE.ACTING ACTUATOR OPERATION ACTUATOR SIGNAL RANGE INSTALLATION STYLE (REFFIG. 1) OUT 1 OUT2 Direct ? 3-15 osi A used ptugged 1i2 Snlit t) 3-15 nsi rl plugged USEQ 1/2 Solil B Reverse _z 3-15 osi USEd plugged 1/2 Solil B 3-15 osi A plugged useo 1/2 Snlit D Fig.

INSTALLATION A B c D Installation Transmission oin & Feed-back lever Fig. 1 SINGLE.ACTING ACTUATOR OPERATION ACTUATOR SIGNAL RANGE INSTALLATION STYLE (REFFIG. 1) OUT 1 OUT2 Direct ? 3-15 osi A used ptugged 1i2 Snlit t) 3-15 nsi rl plugged USEQ 1/2 Solil B Reverse _z 3-15 osi USEd plugged 1/2 Solil B 3-15 osi A plugged useo 1/2 Snlit D Fig.

VEX312 VEX332 1 100 VAC (50/60 Hz) 2 200 VAC (50/60 Hz) 3 110 VAC (50/60 Hz) 4 220 VAC (50/60 Hz) 5 24 VDC 6 12 VDC V 6 VDC S 5 VDC R 3 VDC * DC specification of type D and DO is only available with 12 and 24 VDC. 32 02 1/4 03 3/8 04 1/2 Foot bracket ( VEX312 and VEX332 only) F N* Pilot exhaust (PE) silencer Electrical entry Grommet L plug connector M plug connector DIN terminal G: Lead

Note) A: Non-locking push type A (projecting) 1 6A 8A 10A 10A 15A 20A 25A 32A 40A 50A 1 8 1 4 3 8 3 8 1 2 3 4 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz 4 Note 2) Valve size 1 to 4 10 5 6 Note 2) Note) B: Slotted locking type B (tool required) 7 Note 2) 2 15 Note 1) CE-compliant: For D or DZ only Note 2) Semi-standard Note 3) For other rated voltages, please consult with SMC. 3 20 25

consult with SMC. 2 15A 1 2 15 14 3 20 16 20A 3 4 25 4 25A 1 Nil: Non-locking push type Valve size 5 to 7 32A 22 11 4 5 32 1 B 32F 22 32 28 40 6 28 40 1 4 Flange 11 2 40A Note) Semi-standard 1 2 1 B 40F Flange Electrical entry/With light/surge voltage suppressor 2 50A 33 Symbol Electrical entry Valve size 1 to 4 Valve size 5 to 7 7 50 2B 50F 33 50 Flange G GS E EZ T TZ D DZ Grommet Grommet

VNH1 VNH2 VNH3 VNH4 VNH1-16 VNH2-16 VNH3-16 VNH4-16 Description Bracket (With bolt and washer) B How to Order Pilot Solenoid Valves VO307 1 Q D 5 CE-compliant Nil Q CE-compliant Rated voltage 2 200 VAC 50/60 Hz 1 100 VAC 50/60 Hz Light/surge voltage suppressor CE-compliant 3 110 VAC 50/60 Hz D DIN terminal DZ DIN terminal with light/surge voltage suppressor 4 220 VAC 50/60 Hz 5 24 VDC 6

I ~J' 20 24.5 zs -~ -eli Bracket View A Panel Mount Type Side dimensions for 418 panel mount type 0 40 21.2 , 6 8.5 36.0-5 >, D 0 . 1,16o;~1 ~ \ z 5-22-0 1 ZS-22-02 Thickness of the panel is 1 to 3.2mm. Panel mount adaptor A Panel mount adaptor B SMC CORPORATION 1-16-4 Shrmbashi. Mlnalo-kv.

U S C E Padlock mounting position D C Padlock mounting position D SUP. SUP A B A B IN OUT IN OUT 2 1 3 EXH. EXH.

N FA FB L1 L3 L4 L5 L6 P Q1 Q2 MA MB KM11-04-08-6 6 65 40 61.5 47 73 55 86 22 30 32 44 44 62 8 4 10.6 10 18 29.5 19.5 27 12 16 18.5 6 KM11-04-08-10 10 86 KM11-06-10-6 6 76 KM11-06-10-10 10 102 10 6 13 10 19.5 31.5 21.5 31 13.5 17 21 7.5 KM11-08-12-6 6 85 KM11-08-12-10 10 116 12 8 11.5 22.5 35.5 24 34.5 14.7 18.5 22 9 15.5 KM12/Dimensions Inch H (Hex.) Thead NPT T Applicable tube O.D.

US1 LED . 6-6 US1 LED US1 OFF US1 OFF , (17 V ) US1 (17 V 20.4 V) ON US1 ON 21.6 V 6.4.6. US2 LED . 6-7 US2 LED US2 OFF US2 OFF , (17 V ) US2 (17 V 21.6 V) ON US2 ON 22.8 V 49 No.EX-OMU0020CN 6.5.