SMC Corporation of America
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. t Drain valve Open Close 1 w Air supply valve: Close t Drain valve: Close r OUT side valve: Open e IN side valve: Open Stops pressure feed. 2 Back-flushing switch OFF ON 3 4 The M/C stop signal and a signal for element clogging (differential signal switch) are used to start back-flushing.

DPP1 address Access Parameter name Initial value (dec) Contents 0x07 R Vendor ID 0x0083 (131) SMC Corporation 0x08 0x09 0x0130 (304) ISE20B-T-*-X101 0x0A R Device ID 0x0131 (305) ZSE20B-T-*-X101 0x0B 0x0132 (306) ZSE20BF-T-*-X101 ISDU parameters Index Sub index Access Parameters Initial value Remarks (dec) 0x0002 (2) 0 W System command See P.3 System Command 0x000C (12) 0 R/W Device access

M N 4-O T Q 2-P AH AG S K W U L B AL I 4-AK hole R AA AP J X AB A Y + Stroke V AI Z + Stroke AJ For 4-AO AG AN AI Cutout window 100 piston rod end connection AM Mounting dimensions For standard strokes (mm) Bore size (mm) Stroke range (mm) O N M L K J I B AP AO AN AM AL AK AJ AI AH AG AB AA P A 75, 100 125, 150 200, 250 300 63 80 100 M12 x 1.75 depth 23 100 66 180 135 117 65 228 60 M12 234

(P.12) ) INP ON (INP 9.1 (P.32) PLC ) 5 3.(P.12) PLC (PLC) 2 11.4 (P.49) () 10.(P.41) 3.(P.12) -81- 5(P.23) 9.1 (P.32) 3.(P.12) PLC (PLC) 2 11.4 (P.49) () () 3.2 (P.13) USB 10.(P.41) 5 10.(P.41) 10.(P.41) 3.(P.12) ( EMG ) 3.

low particulate generating vacuum grease. p r a Non-contact construction w t i o o n L There is no particulate generation due to friction, since the construction does not allow contact between the cylinder tubes exterior surface and the slide tables internal surface. a t e l u g c Reduced initial particulate generation e i t 3 n r a e p r a w t i o o n L No contact Cleaned, assembled, inspected

three phase 200 VAC CNP1 NFB MC CNP1 NFB MC L1 L1 Single phase 200 to 230 VAC Three phase 200 to 230 VAC CNP3 CNP3 L2 L2 U U U Motor U Motor L3 L3 V V V V M M N N() W W W W P1 P1 PE PE P2 P2 CNP2 CNP2 P P(+) Regeneration option Regeneration option C C D D Detector Detector CN2 CN2 L11 L11 L21 L21 Note) For single phase 200 to 230 VAC, power supply should be connected to L1 and L2 terminals

fixing the KE series Refer to page 531 for details. 8 4.2 Connection thread W L2 L2 (mm) Symbol W H Width across flats Model Connection thread Rc 1/4 Rc 3/8 15.2 20.9 27 29 35.3 40 6 7.5 15.4 21.1 64 89 17 19 Weight (g) Connection thread D L1 L2 Q KEC-02 KEC-03 665

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Leakage test result a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e CX p r a 0.0 10 0 20 10 w 10-10 0 5 10 t i o o n L DTime [min] Operation cycles -X e e a a l l k k a t e l u w w g a a c 2 e i o

Poloneza 89, PL-02-826 Warszawa Portugal SMC Sucursal Portugal, S.A. (351) 22 616 6570 Rua De Eng Ferrerira Dias 452 4100-246,Porto Romania SMC Romania S.r.l. (40)21-3205111 Str.

011 14 T 14 T I D F4E/6E/8E/11E/15E1 141 I EC 142 AC200V / 2A D C24V / 2A ( 20V / 5m A) 143 O N 3 ( ) 5 /1 ( ) I D F Seri es 141 14 1 I D XO M W 011 14 T 144 PE 1 2 3 LN PE PE: L N: LN PE M 3 6. 5m m 1. 25m m 2 ( ) ( ) I D F Seri es 144 14 2 I D XO M W 011 14 T 145 I D F4E8E10T I D F4E8E20T I D F11E20T AC100/100,110V (50/60Hz) PE N L 1 2 AC200/200,220V (50/60Hz) PE

rev) [Motor type: S6, S7, S8]: Absolute 18bit encoder (Resolution: 262144 p/rev) [Motor type: T6, T7, T8]: Encoder (Driver type: LECSB-T/LECSS-T) Absolute 22bit encoder (Resolution: 4194304 p/rev) (Driver type: LECSC-T) Absolute 18bit encoder (Resolution: 262144 p/rev) Type Note6) Non-magnetizing lock specifications Lock unit Holding force [N] 131 255 607 607 607 588 197 385 736 313 607 1146

2 i t w q r w !0 3-Color Display Digital Flow Monitor for Water PF3W3 w w y e u w Component Parts No.

the total amount of vertical deflection NC D X 2 N N O O F A U T O S W I T C H E S A U T OS W I T C H C A P A B L E A U T O S W I T C H 2 Pieces S 1 Piece See Accessories Without Auto Switch D With Auto Switch S T R O K E A D J U S T M E N T S T R O K E ( I N C H) M O U N T I N G With Adjustment Bolts (Std) B With Shock Absorber BC With Cap Type Shock Absorber BCS With One Cap Type Shock

AFJ AFJ r t y u w AMV q Body size 20 30 40 ZH -X185 Symbol Description Related Products w Pipe thread type Nil Rc N NPT F G + 01 1/8 02 1/4 03 3/8 04 1/2 + e Port size Option a Mounting Nil Without mounting option r B Note 1) With bracket + b Element 5 5 m 40 40 m 80 80 m + Nominal filtration rating t c Water drop removal type/ Large flow type S Water drop removal type Type y T Large

VQ5151 VQ5150 (A) 4 (B) 2 (A) 4 (B) 2 VQ5 VQZ 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQD q w e q w VQ5251 (A) 4 (B) 2 VQ5250 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e r q w r q w e VQ5350 VQ5450 VQ5351 VQ5451 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5550 VQ5551 (A) 4 (B) 2 (A) 4 (B) 2 1

Cable wire color Terminal 1 Brown DC+ q 2 Not used N.C. w 3 Blue DC e 4 White IN: 1 to 5 V r Power supply / Output connector (8P) Power supply / Output connector (accessory) i u y t r e w q Pin no. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.

W W 1 1 W W 2 2 1 1 11 11 12 12 1 32 - 7.3 () 12 1.CW [CW] 2.CCW [CCW] 12 1. [] 2.

Various actuators Applicable Manifold Solenoid Valves SY Series (IP67) SV Series (IP67) S0700 Series (IP40) VQC Series (IP67) 5 C O N T E N T S Wireless System EX600-W Series Wireless slave unit Wireless master unit Accessories How to Order qEnd Plate Bracket p. 17 Wireless Unit p. 7 wValve Plate p. 17 Digital Input Unit p. 7 eReinforcing Brace p. 17 Digital Output Unit p. 7 rSeal