Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve (A) (A) (A) 2 (A) 2 2 2 1 (P) 3 (R) 1 (P) 3 (R) h h 1 (P) 3 (R) 1 (P) 3 (R) g g Component parts Replacement parts Description Body Piston plate End cover Piston Spool valve assembly Spool spring Material Aluminum die-casted Resin Aluminum die-casted Resin Stainless steel Note Zinc die-casted No.
2 1.5 2 1.5 8 8 8 3 3 9 8 5.2 2 4 1.8 7 6 3.4 2 2.2 Lateral 4.5 With Buffer: Vacuum Inlet Construction Adapter Applicable Pad List ZP3-10B;[Weight: 0.8 g] ZP3-13B;[Weight: 1.0 g] ZP3-16B;[Weight: 1.1 g] 9 9 6 4 4 6 9 6 4 2 2 2 2 2 2 2 2 2 10 10 10 17 16 11.4 3 14 13 8.4 3 11 10 6 2 Buffer Assembly Part No.
1 OUT1OUT2[P_2][n_2] [ tn][ tp] [F 1]OUT1(26)[F 2]OUT2(34) 28 (23 ) -22No.PF-OMN0011CN-C 2 [F 0] [F] 2 2 [F 0] 25 4 L/min [F 1] OUT1 26 ON OFF 50% 5% ON OFF [F 2] OUT2 34 () ( ) ON OFF 50% 5% OUT1 -23No.PF-OMN0011CN-C [F 3] 40 1 [F10] 41 [F20] 45 [F22] 46 OFF [F30] 48 OFF [F80] 49 () [F81] 50 OFF [F82] 51 [*] [F90] 52 OFF [F96] 53 () [F97] 54
) Fig. 2-2 Names of the parts Table 2-1: Accessory list (1) Alarm code list label (English) 1 pc. (2) Operation manual (English) 1 copy (3) Y strainer (40 mesh) 25A 1 pc. (4) Barrel nipple 25A 1 pc.
2 !3 !4 Pneumatic type Piston seal Rod seal CQ2B12-PS NBR 12 16 20 25 32 40 50 63 80 100 CQ2B12-PS CQ2B16-PS CQ2B20-PS CQ2B25-PS CQ2B32-PS CQ2B40-PS CQ2B50-PS CQ2B63-PS CQ2B80-PS CQ2B100-PS CQ2B16-PS Gasket CQ2B20-PS CQ2B25-PS CQ2B32-PS Set of left nos. !2, !3, !4. CQ2B40-PS CQ2B50-PS CQ2B63-PS CQ2B80-PS CQ2B100-PS Seal kit includes !2, !3, !4.
(OUT05)OFF 11INPOFF ... 12BUSY ON 0mm 50mm 60mm 100mm 5 13DRIVEOFF 14No.2 ON (OUT1ON) 15INPON 16BUSYOFF 10mm 57 - 13.2 100mm/s 100mm (No.1 ) 100mm ,10mm/s 50% 5mm (INPON )50mm/s 50mm (No.2 ) No. 1 2 2 2 mm/s mm mm/s mm/s mm mm mm mm/s 0 1 ABS 100 100.00 1000 1000 50 40 10 100 0 0 5 2 ABS 50 50.00 1000 1000 0 0 0 100 0 0 0.1 () 1No.1(IN0ON) / 2DRIVEON (2)(5)(10)(13) No.1
G1/2 1/2-14NPT 1/2-14NPTF Nil F N T Lead wire length 0.5 (2.9)m Lead wire length 0.5 (2.9)m Not required for nil, vacuum adapter (GN) and vacuum pressure gauge (G).
8 1/2 3/4 0.68 Side 1.29 0.68 Bottom 1.29 3-10-22 23 ISO Standard Solenoid Valve: Size 2 Metal Seal/Rubber Seal Series VQ7-8 Model Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) (1) (2) Port size Model Response time (ms) Weight (kg) Series Number of positions b C[dm3/(sbar)] Cv b Cv C[dm3/(sbar)] VQ7-8-FG-S3.0 0.24 12 2.4 0.18 10 Metal seal 40 or less 0.64 Single 2 position 3
Absolute encoder 32 200 S7 AC servo motor (Absolute encoder LECSB2 LECSB2 200 to 230VAC B2 200 to 230VAC B2 B1,B2 B1,B2 Without lock Nil Without lock Nil 400 400 40 40 S8 S8 Cable length With lock B With lock B Without cable Without cable Nil Nil Ball screw lead Stroke 2m 2 2m 2 Size Size 100mm 100 100mm 100 5m 5 5m 5 40 32 25 40 32 25 10m 10m A A 1000 1000mm 1000mm 1000 12mm 12mm 16mm
Change of fluid passage Flow Characteristics Flow characteristics 1 2 (P A) C [dm 3/(sbar)] 27 38 Port size 2 3 (A R) C [dm 3/(sbar)] 27 40 2 1 (A P) C [dm 3/(sbar)] 25 40 3 2 (R A) C [dm 3/(sbar)] 26 38 b 0.38 0.30 b 0.37 0.32 b 0.36 0.22 b 0.37 0.20 Cv 7.0 9.8 Cv 7.4 9.8 Cv 7.3 9.8 Cv 6.8 9.6 1/2 3/4 N.C. N.O.
for Chemical Liquids Material and Fluid Compatibility Check List Chemical Compatibility Acetone Note 1, 2) Ammonium hydroxide Note 2) Isobutyl alcohol Note 1, 2) Isopropyl alcohol Note 1, 2) Hydrochloric acid Note 2) Ozone Hydrogen peroxide Concentration 5% or less, Temperature 50C or less Ethyl acetate Note 1, 2) Butyl acetate Note 1, 2) Nitric acid (except fuming nitric acid) Concentration
50 60 Thread type Metric thread (M5) Rc NPT G Nil N F AL20 Port size Body size Symbol Port size M5 1/8 1/4 3/8 1/2 3/4 1 10 20 30 40 50 60 Note 2) M5 01 02 03 04 06 10 Accessory When more than one specification is required, indicate in alphanumeric order.
Rc 1/8 P port (Air supply port) 2 2 1 Ejector Bracket B Bracket B Note) 1 Dimensions for mounting bracket B 2 2 2 Dimensions for mounting spacer B Spacer B is used to leave space for maintenance (for replacement of silencer etc.) on side mounting.
SUS304> 5 (SUS304) () 2 4 (A6063) < A6063> C D E E F C H B G A A mm A B C D E F G H XLH-16 40 100.5 38 1 30 17 35 XLH-25 50 114 48 1 12 40 26 41 XLH-40 65 162.5 66 2 11 55 41 57 XLH-50 70 179.5 79 2 11 75 52 70 8 XL-OMY0003
5 10 []18 12 O 1) FKM M 10 FKM : 110 Pa <> 9 XL-OMY0003
6 6-1. 1 1P4P5 10 XL-OMY0003
6-2 1 2 b 3 1 2 O 4 a aa b O O
Part No. of solenoid for SY3000/SX3000 2.
to 160F (40 to 71C) (No freezing) 1) 0.06 Bubble tight 1/4 inch face seal Bottom mount (Option: panel mount) 5.07 lbs (2.3kg) 2) 1) 14 to 194F (10 to 90C) for Vespel and PEEK seat.
(PNP) 5 V, 12 V IC Grommet 2-wire 12 V Connector 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC Grommet 12 V 5 V, 12 V Relay, PLC Diagnostic indication (2-color) 24 V IC 12 V 2-wire Water resistant (2-color) Grommet IC 5 V, 12 V With diagnostic output (2-color) 4-wire (NPN) Latch with diagnostic output (2-color) F7LF 2-wire P5DW Magnetic field resistant (2
VPA300/500/700 Series VPA700 Series/Base Mounted/Dimensions 3/8, 1/2 2(A) port Standard/VPA744-103 04 A B 40 16 64 24 3/8, 1/2 3(R) port 1/8 12(PA) port 18 67 2 x 6.2 (For mounting) NO 2A NC 53 66 12 12 3R NC 1P (1/8) 12(PA) port 11.5 16 115.1 107.1 24 96.5 95.5 32.5 M5 x 0.8 (Breathing hole) 16 X 40 3/8, 1/2 1(P) port 80 03 04 A B For vacuum/VPA744V-13/8, 1/2 2(A) port 40 16 64 3/8, 1/2
Note 2) For the inch-size One-touch fittings, refer to page 4-14-40.
DC (+) N C DC () OUT Pin no. 1 2 3 4 2-3.4 43 Flow direction Dimension L 100 106 Model PFW504 PFW520 PFW540 62 78.2 120 1.6 23 50 60 34 2-Port size 4-4.5 34 50 40 48 (43.5) Flow direction 25 Series PFA Dimensions/Remote Type Display Unit for Water PFW3-A Panel mount type Internal circuits and wiring Sensor 41.8 Blue Brown Black N.C. 40.3 40 1 2 3 4 4.3 SMC FLOW SWITCH 5 6 7 8 OUT1 OUT2