101 kPa?1 to ?100 kPa2 l/min (ANR) (Supply pressure: ?101 kPa)24 VDC ?10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?

101 kPa?1 to ?100 kPa2 l/min (ANR) (Supply pressure: ?101 kPa)24 VDC ?10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?

101 kPa?1 to ?100 kPa2 l/min (ANR) (Supply pressure: ?101 kPa)24 VDC ?10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?

101 kPa?1 to ?100 kPa2 l/min (ANR) (Supply pressure: ?101 kPa)24 VDC ?10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?

101 kPa?1 to ?100 kPa2 l/min (ANR) (Supply pressure: ?101 kPa)24 VDC ?10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?

8)W = 61n + 101, .49604 lb, ModelApplicable valveManifold typeP(SUP)/R(EXH)Valve stations Note)A, B Porting specificationsPort sizeManifold base weight W (g) n: StationsP, EA, EB portA, B portSS5X5-41SX5 40Single base/B mountCommon SUP/Common EXH2 to 20 stationsBaseSideRc 1 4Rc 1 8C6 (One-touch fitting for ?6)C8 (One-touch fitting for ?8)W = 61n + 101

Booster Regulator Series VBA1110 to 4200 1

Q [l/min(ANR)] = x D2 x W x (P2 + 0.101) x 60 x C 6 4 x 10 0. 101 VBAT10, VBAT20, VBAT38 Q [l/min(ANR)] = x 1002 x 200 x (0.8 + 0.101) x 60 x 1 = 841 4 x 106 0. 101 Select booster regulator size from flow characteristics table. Refer to page 14-9-3 for flow characteristics.

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

Port size A B Port size A B C D E F 28 3/4 1 37 62 89 28 188 28 3/4 31 34 22 137 101 IF300 IF310 31 34 22 137 101 IF 98 98 IF301 IF303 IF311 IF313 1 37 62 89 28 188 98 1 29 39 56 28 155 98 1 29 39 56 28 155 Data Splashproof/Low jetproof type: 320/321/323 G1/2 depth 17 Regular hexagon For wiring width across flats 36 A: Paddle short B: Paddle middle Port size C: Paddle long Dimensions Part

ZSE30/ISE30

Switch 100 kPa 0 100 kPa 500 kPa 1 MPa Pressure range 100 kPa 100 kPa For vacuum/ low pressure ZSE30 101 kPa 101 kPa 1 MPa 0 For positive pressure ISE30 100 kPa (0.1 MPa) 1 MPa Rated pressure range of switch Regulating pressure range of switch 16-2-14

VCB

66.5 68 99 VCB31 30 50 86 1/2 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101 71 68 104 22 45 90 1/4, 3/8 41 11 17 36 22.5 23 M5 8 26 84 48 74.5 103 74.5 70 107 VCB41 30 50 94 1/2 41 13.5 17 36 25 23 M5 8 26 88 48 78.5 103 78.5 70 111.5 35 60 102 3/4 41 17.5 17 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 17-2-27

VNB

PB 101 to 47.9 kPa Pilot Solenoid Valve Specifications JIS Symbol (Vacuum pilot type) Valve type Type 6A to 25A 32A to 50A, 32F to 50F V0301-00 Port size Pilot solenoid valve SF4--23 N.C. Normally closed N.O.

VXR21/22/23

(112) 119 (136) 126 (143) 18 32.5 36.5 43.5 46.5 52 36 36 42 53 39 41 20 30 35 35 23 39 47 48 48 92 95 95 59 62 62 1 2 3 4 21 40 45 45 23 25.5 41.5 VXR2260-10 VXR2270-12 26.5 51.5 67.5 57.5 23 25.5 41.5 1 4 1 2 62 97 64 50 93 (103) 44.5 93 (103) 28 101 (111) 93 (103) 60 25.5 40 132 142 (157) 54.5 60 72 VXR2380-14 1 VXR2382-14 30 62 97 64 50 98 (108) 44.5 98 (108) 28 106 (116) 98 (108) 69

V

I-35S-A (N)ZFB200, 201 I-36S-A (N)ZFB300, 301 I-395-A (N)ZFB401 B O D Y S I Z E T U B E S I Z E OD M M 04 4 06 6 08 8 10 10 05 3/16 07 1/4 11 3/8 13 1/2 100 Max 20 ln/min 200 Max 50 ln/min 300 Max 75 ln/min 101 Max 20 ln/min 201 Max 30 ln/min 301 Max 60 ln/min 401 Max100ln/min Courtesy of Steven Engineering, Inc. !

Interface Regulator for VQ4000 5 Port Solenoid Valve

l/min (ANR) Flow rate l/min (ANR) ARBQ4000-00-P (PA) ARBQ4000-00-P (PB) 0.7 0.7 0.6 0.6 Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 200 400 600 800 1000 1200 1400 1400 0 0 200 400 600 800 1000 1200 Flow rate l/min (ANR) Flow rate l/min (ANR) 1MPa = 145 psi Nl/min X 0.035 = SCFM Pressure Characteristics Conditions Upstream pressure: 0.7MPa (101

Vacuum Equipment

3.06 2.88 2.70 2.52 2.34 2.16 1.98 1.80 1.62 1.44 0.503 4.28 4.02 3.77 3.52 3.27 3.02 2.77 2.52 2.26 2.01 0.785 6.67 6.28 5.89 5.50 5.10 4.71 4.32 3.93 3.53 3.14 2.01 17.1 16.1 15.1 14.1 13.1 12.1 11.1 10.1 9.05 8.04 4.91 41.7 39.3 36.8 34.4 31.9 29.5 27.0 24.6 22.1 19.6 8.04 68.3 64.3 60.3 56.3 52.3 48.2 44.2 40.2 36.2 32.2 1.33 11.3 10.6 9.98 9.31 8.65 7.98 7.32 6.65 5.99 5.32 12.6 107 101

Series SY100 3 Port Solenoid Valve Rubber Seal

Station L1 L2 2 33.5 27.5 11 128 122 12 13 149 143 14 15 170 164 16 17 191 185 18 19 212 206 3 44 38 20 4 54.5 48.5 5 65 59 6 75.5 69.5 7 86 80 8 96.5 90.5 9 107 101 10 117.5 138.5 159.5 180.5 201.5 222.5 111.5 132.5 153.5 174.5 195.5 216.5 2.1-14 Series SY Made to Order (Contact SMC for further specifications, dimensions and delivery lead time.)

VCB

66.5 46 76 24 1/4, 3/8 VCB31 M5 23 25 32 15 13.5 36.5 86 50 8 30 104 68 71 101 71 46 80 24 1/2 M5 23 22.5 36 17 11 41 90 45 8 22 107 70 74.5 103 74.5 48 84 26 1/4, 3/8 VCB41 M5 23 25 36 17 13.5 41 94 50 8 30 111.5 70 78.5 103 78.5 48 88 26 1/2 M5 28.2 30 36 17 17.5 41 102 60 8 35 119 70 86.5 103 86.5 48 96 26 3/4 4 Series VCB Model Selection VCB (for heated water) 2 port solenoid valve Class

VHK

VHKm-01S-01S 1 8 1 8 32.6 65.2 VHKm-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62 66 17 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHKm-02S-02S 1 4 1 4 1 4 17 VHKm-03S-02S 22 46 85.1 44.3 40.8 44.3 88.6 21.5 4 14 13.7 16.1 3.2 65 17 72 73 76 19 VHK-B2A 49 17 1 30 25 21.5 31 VHKm-03S-03S 3 8 3 8 3 8 19 VHKm-04S-03S 22 46 93 48.7 44.3 48.7 97.4 21.5 4 14 15.1 17.5 3.2 90 19 22 101

VQC

RED ON: MAC_ID duplication error, or BUSOFF error (major communication abnormality). 11 VQC4000 Base-Mounted Type Plug-in Unit VV5QC41 S Kit (Serial Transmission Kit: EX240) L2 (1 input block: 8 inputs) 14.5 (128.5) L1 8 6.5 Indicator light 54 P = 25 65.5 Manual override Min.0 to Max. 4 unit (0 to 216mm) 9 9 163 A B A B A B A B A A A B 10 143 32 98.8 143 101 Mounting hole for 2-M5, with input

2/3 Port Valve

closed Q M L K J Q R T R R Q S S Q R 40 (47) 47 (57) 55 (65) 40 (47) 47 (57) 55 (65) 40 (47) 47 (57) 55 (65) 84 (91) 94 (104) 48 (55) 56 (66) 63 (73) , , , VX21l2 VX22l2 VX23l2 1 8 1 4 1 4 1 4 3 8 3 8 68 (78) 76 (93) 84 (99) 40 45 45 18 21 21 VX21l0 VX22l0 VX23l0 23 25 28 36 46 46 11 13 13 39 44 44 10 30 35 40 46 56 56 39 41 44 59 60 62 47 48 50 59 62 64 92 95 97 20 23 9 10.5 10.5 11.5 101