Slide Unit/Double Rod Type Series CX2 Slide Bearing: ø10, ø15, ø25

Individual -X 537 478 418 358 299 239 179 119 597 14 XC22 Fluororubber seals Note) Theoretical output (N) = Pressure (MPa) x Piston area (mm2) 465

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Clean Room Specification 11-LEFS Series LEFS16, 25, 32, 40

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Clean Room Specication Applicable to the LEC series 11-LEFS Series LEFS16, 25, 32, 40 Refer to page 38 for model selection and page 510 for particle generation characteristics. Refer to page 603-5 for the communication protocols EtherCAT, EtherNet/IP, PROFINET, and DeviceNet.

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Secondary Battery Compatible 25A-LEFS Series LEFS16, 25, 32, 40

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Secondary Battery Compatible 25A-LEFS Series LEFS16, 25, 32, 40 Refer to page 38 for model selection. How to Order 25A-LEFS 25 H R B 200 S 1 6N 1 q r w e t u y i o !0 !1 !

Direct Operated Precision Regulator/Modular Type ARP20 to ARP40 Series Direct Operated Precision Regulator with Backflow Function/Modular Type ARP20K to ARP40K Series Regulator Symbol Regulator with backflow function

Example 1) When the pressure in the rear and the front of the cylinder differs: Example 2) When the air supply is cut off and releasing the inlet pressure to the atmosphere, the residual pressure release of the outlet side can be ensured for a safety purpose. 1 1 2 12 2 1 2 1 3 1 2 1 14 2 4 12 L 10 5 1 3 How to Order ARP 30 03 BE K Option / Semi-standard: Select one each for a to f.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type

(mm) 6 8 10 12 4 (1) AS221FE-01 AS231FE-01 R 1/8 20, 25, 32 AS221FE-02 AS231FE-02 R 1/4 20, 25, 32, 40 AS321FE-03 AS331FE-03 R 3/8 40, 50, 63 AS421FE-04 AS431FE-04 63, 80, 100 R 1/2 Note 1) Elbow type only Note 2) Distinction between meter-out/meter-in types by appearance Those are distinguished by the lock nut.

Series LECSB/LECSC/LECSS Absolute Type Series LECSA (Pulse Input Type/Positioning Type) Incremental Type AC Servo Motor Driver (Pulse Input Type) (CC-Link Direct Input Type) (SSCNET III Type)

Encoder Capacity 100 W 200 W 400 W 100 W 200 W 400 W Type AC servo motor (S2) AC servo motor (S3) AC servo motor (S4) AC servo motor (S6) AC servo motor (S7) AC servo motor (S8) Symbol C S1 S3 S41 SSCNET III type (For absolute encoder) Incremental S S5 S7 S81 Power supply voltage Absolute 1 2 100 to 120 VAC, 50/60 Hz 200 to 230 VAC, 50/60 Hz 1 Not applicable for Series LEY Dimensions LECSAm 40

Electric Actuator/Slider Type Motor Parallel Type Series LEFS LEFS16, 25, 32, 40 Step Motor (Servo/24 VDC) Servo Motor (24 VDC) ®

Electric Actuator/Slider Type Motor Parallel Type Series LEFS LEFS16, 25, 32, 40 Step Motor (Servo/24 VDC) Servo Motor (24 VDC) RoHS How to Order LEFS 25 R B 200 S 1 6N 1 Motor mounting position Size Motor type 16 25 32 40 R Right side parallel L Left side parallel Symbol Type Applicable size Compatible controllers/ driver LEFS16 LEFS25 LEFS32 LEFS40 LECP6 LECP1 LECPA Nil Step motor (Servo

SL5200

Specifications Operating Parameters SL5201mmA SL5206 1 to 60 psig (0.007 to 0.4 MPa) SL5210 1 to 100 psig (0.007 to 0.7 MPa) SL5202 0.5 to 30 psig (0.0034 to 0.2 MPa) SL5201 0.5 to 10 psig (0.0034 to 0.07 MPa) 100 mm Hg absolute to 10 psig (-88kPa to 0.07 MPa) Select compatible materials of construction for the gas Vacuum to 150 psig (1.0 MPa) 500 psig (3.4 MPa) 1000 psig (6.9 MPa) 40 to

Process Valve: 2 Port Valve For Flow Control VNB Series

3 20 16 20A 3 4 25 4 25A 1 Nil: Non-locking push type Valve size 5 to 7 32A 22 11 4 5 32 1 B 32F 22 32 28 40 6 28 40 1 4 Flange 11 2 40A Note) Semi-standard 1 2 1 B 40F Flange Electrical entry/With light/surge voltage suppressor 2 50A 33 Symbol Electrical entry Valve size 1 to 4 Valve size 5 to 7 7 50 2B 50F 33 50 Flange G GS E EZ T TZ D DZ Grommet Grommet with surge voltage suppressor Grommet

Hand Valve Series VH

123(134) M8 x 1.25 M8 x 1.25 107.5 105.5 1 (P) 3 (R) 1 (P) 3 (R) 17 25 19 2 4-Rc 1/4, 3/8, 1/2 4-Rc 3/4 VH42-06 (Bottom ported) VH42-02 to 04 (Bottom ported) 2 (A) 2 (A) 46 54 1 (P) 3 (R) 1 (P) 3 (R) 4 (B) 4 (B) 4-Rc 3/4 4-Rc 1/4, 3/8, 1/2 5-8-11 Series VH Dimensions: Body Mounted VH600-06/10 2 (A) 4 (B) 32 1 (P) 132 152 4-11 132 300 223 M15 x 1.5 15 151 150 48 25 4-Rc 3/4, 1 3 (R) 40

Max Operating Pressure: 5 (14 MPa), Construction: 40 (Element Upward Removal, Threaded), Port Size: 12 [1 1/2 Threaded, 40 (1 1/2) Flange SSA], Pressure Indicator: 1 (Differential Pressure Indicator), Relief Valve: 1 (None), Fluid: 0 (Petroleum), Element: M (Micromesh), Filtration: 5μm, Fluid Direction: IN Left, Made to Order: X0 (Non-standard Filtration)

to Cart SMC SY30M-24-1A check valve assy,back pressure, NEW SY3000 MFLD*** $6.98 + Add to Quote Add To Cart Add to Cart SMC SY30M-40

LC-OM089xx

Operating ambient humidity 35 to 85%RH (No dew formed) Storage humidity 35 to 85%RH (No dew formed) 24VDC+/-10% Max. 8mA/point Display LED POWER, A-PHASE, OFF, SET 24VDC 10% Supply source Storage temp. 0 to +40 oC (Non freezing) Input signal Photo-coupler input Applicable motor A3 DC motor Type3 A5 DC motor Type5 B Nothing included Operating ambient temp. +5 to +40 oC included Weight 145g

IDX-OM-X011

53 Inlet air pressure MPa 0.7 Rated value Inlet air temperature oC 40 Note 4) Ambient oC 32 temperature Fluid Compressed air Operating range Inlet air temperature oC 5 to 50 Inlet air pressure MPa 0.15 to 0.97 Note 3) Ambient oC 2 to 45 (Relative humidity 85 % or less) temperature Power supply Note 5) 3-Phase 200 VAC (50Hz), 200/ 220 VAC (60Hz) Electrical specifications Operation current

IDX-OM-U010

Coefficient factors Inlet air temperature (oC) 35 40 45 50 55 60 65 70 75 80 1.58 1.46 1.09 1.00 0.79 0.64 0.55 0.51 0.49 0.47 Inlet air pressure (MPa) 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 to 1.6 0.67 0.79 0.88 0.91 1.00 1.02 1.04 1.09 Ambient temperature (oC) 20 25 30 35 40 45 1.19 1.13 1.06 1.00 0.90 0.77 Calculation example: The air flow capacity when the dew point of IDFC60 is set to 10 oC

PSxx-OMP0001E

Do not exceed the specified maximum allowable load (24 VDC, 40 mA). Specifications Warning PS1200 Model PS1000 PS1100 Do not disassemble, modify (including changing the printed circuit board) or repair. An injury or failure can result. Switch Specifications The value in the brackets is for PS1200.

VFR5000-OMN0001

/ ( ) 5m 1) 2)1 ()ISO VG32 (MSDS) 3) 2 ()ISO VG32 \ 6 No.VFR5000-OMN0001 VFR5000 Series 5 / ( ) 3 30 () 1 ( )VG32 2 ()ISO VG32 7 No.VFR5000-OMN0001 VFR5000 Series/ DIN DIN COMCOM 0.5~1.5mm2 8~10mm 1.25Y-3L1.25-3.5S1.25-4M 1.25-3.5M1.25Y-3L1.25Y-3M ( ) AB+B-COM COM 1.25-41.25-4M 1 SOLA 2 SOLB 3 COM () A-(1) B+(3) B-(4) A B VFR510 A COM A B VFR520 A COM B 3 A COM B VFR5 40

Air Cylinder NCJP Series Pin Cylinder

Series NCJP Dimsaians Notei Includes Mounting Nut. 0.43 No.5-40 UNC 0.56 No.10 32 UNF /6 \1/4") 0 (3!

Electric Actuators

Model IX IY W H Sectional secondary moment Top entry Linear guide LJ1H10 LJ1H20 LJ1H30 LJ1S10 LJ1S20 LJ1S30 Slider guide 24.7 44.8 55 36 56.3 73.3 7 40 84 15 60 177 48 374 836 52 402 1000 70 122 151 70 122 151 Left entry Brake Right entry Axial entry Bottom entry Table traveling accuracy T-slots enable highly flexible mounting.

Electric Actuator with Integrated Guide Series LTF

Electric Actuator with Integrated Guide Incorporating Recirculating Ball Frame-Type Linear Guide Incorporating Recirculating Ball Frame-Type Linear Guide Series LTF Light-weight, compact electric Light-weight, compact electric Frame-type linear guide has one-piece Frame-type linear guide has one-piece Space saving, light weight Space saving, light weight 50 40 46 33 60 74 LTF8 work piece