Manifold Type: 41 (Base Mounted), Valve Stations: 12 Stations, A, B Port: M5 (M5X0.8)

Manifold Type: 41 (Base Mounted), Valve Stations: 14 Stations, A, B Port: M5 (M5X0.8)

Manifold Type: 41 (Base Mounted), Valve Stations: 20 Stations, A, B Port: M5 (M5X0.8)

Manifold Type: 41 (Base Mounted), Valve Stations: 13 Stations, A, B Port: M5 (M5X0.8)

Manifold Type: 41 (Base Mounted), Valve Stations: 6 Stations, A, B Port: M5 (M5X0.8)

Manifold Type: 41 (Base Mounted), Valve Stations: 8 Stations, A, B Port: M5 (M5X0.8)

Manifold Type: 41 (Base Mounted), Valve Stations: 8 Stations, A, B Port: M5 (M5X0.8), CE Marked: Q (CE Marked)

Manifold Type: 41 (Base Mounted), Valve Stations: 10 Stations, A, B Port: M5 (M5X0.8)

Manifold Type: 41 (Base Mounted), Valve Stations: 16 Stations, A, B Port: M5 (M5X0.8)

Manifold Type: 41 (Base Mounted), Valve Stations: 2 Stations, A, B Port: M5 (M5X0.8)

Manifold Type: 41 (Base Mounted), Valve Stations: 3 Stations, A, B Port: M5 (M5X0.8)

Manifold Type: 41 (Base Mounted), Valve Stations: 4 Stations, A, B Port: M5 (M5X0.8)

Manifold Type: 41 (Base Mounted), Valve Stations: 4 Stations, A, B Port: M5 (M5X0.8), CE Marked: Q (CE Marked)

IDX-OM-W010

Terminal connecting screw: M5 Connector width: 9.5mm or less Applicable electrical wire: 1.25mm2 or more To the users machine L ,N: Power supply N L Ground fault display button (white) Test button (gray) 4) Connect the grounding cable. AC100V: Connect the ground line to M4 screw on the left side of the GFCI (with the name plate).

IDX-OM-W011

304 33 73 31 36 154 21 330 226 410 413 125 240 15 38 150 IDF2E Rc3/8 51 232 138 24 327 IDF4E / IDF6E / IDF8E / IDF11E ( 10 :0.8m) [ AC100V ] [ AC200V ] (:1.9m) [ AC200V ] (17) mm A B C D E F G H J K L M N P Q IDF4E Rc1/2 453 13 498 568 31 42 283 355 80 230 32 15 284 15 240 80 275 IDF6E Rc3/4 455 270 485 IDF8E Rc3/4 300 IDF11E Rc3/4 IDF Series 6-3 6 3 IDX-OM-W011 6 IDF15E1 mm 603 41

IDX-OM-O004E

Ground Fault Circuit Interrupter To the users machine Terminal connecting screw: M5 Connector width: 9.5mm or less Applicable electrical wire: 1.25mm2 or more L ,N: Power supply N L Ground fault display button (white) test button (gray) 121 12. Specification for Option R 3) Connect the power cable to the terminal of the GFCI. 4) Connect the ground line.

IDX-OM-O004C

INOUT () 5 2 6. 6 6.1 IDF15E1-10 IDF15E1-20 550 MPa 0.151.0 () 240 (85%) 50Hz 2.8 (ANR) 1) 60Hz 3.1 m 3/min 50Hz 2.9 2) 60Hz 3.2 MPa 0.7 35 32 10 () AC100V(50Hz) AC100,110V(60Hz) 3) AC200V(50Hz) AC200,220V(60Hz) 3) (50/60Hz) W 420/480 (50/60Hz) A 4.3/4.6 3.4/3.1 4 ) A 10 R134a(HFC) () Rc1 kg 46 1 2 () kW 15 1(ANR)[2065%] 2[32] 3() 430mA 6 1 6. 6.2 IDF15E1 mm 603 41

EX500-GPR1A.eng

TS M12 connector ( socket ) /10 pcs. 40 41 Item No. Solution/Corrective action PROFIBUS DP compatible communication Field wireable connector Communication cable (With one side connector) Terminal plug PCA-1557727(Plug, B-coded) SOL LED is turned on 4 Check the power for solenoid valves/output ( DC24V ) is supplied.

Digital Flow Switches

Pin description Load is an analog input equipment such as a voltmeter, ammeter. 1 DC(+) PF2A7H-(-M) 68 69 2 Analog output 3 DC() Accumulated pulse output wiring examples 4 OUT1 4-I thread with depth J 40 Max. 30 V 80 mA or less OUT1 Load Black H 0 V or Blue 50 msec 50 msec PF2A7H-(-M) 28 29 B C D E F G H I J A Model Brown PF2A703H PF2A706H PF2A712H 55 160 40 92 67 55 Rc1, NPT1, G1 36 M5 x

Exhaust Cleaner for Clean Rooms AMP Series

Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi or less) Ambient and fluid temperature 5 to 50C (41