MY1

(mm) PC 14.5 PD 32 PE 13 PF 5.5 VV 16 XX 28 YH 37.5 Z 220 ZZ PA PB PG Q PP QW QQ RR SS TT UU WW Model 60 50 7 206 12 42 16 16 6 14.5 15 12.5 MY1H25 Rc 1/16 80 60 8 264 17 51 11 16 4 16 16 16 MY1H32 15 42 13 6.5 19 32 47 280 Rc 1/16 100 80 9 322 18.5 59 11 24 10.5 20 22 19.5 MY1H40 23 36 340 59.5 20.5 37.5 23 8 Rc 1/8 2-d Y S R WX D Bottom ported (ZZ) (Applicable O-ring) Hole Size for Centralized

EX120/121/122

Input: 16 points 4-branch settings Output:16 points 4-branch settings Input: Unused settings Output:16 points 4-branch settings Input: 8 points 2-branch settings Output:16 points 4-branch settings (at the time of shipping) Input Output Input Output Input Output 16 points 16 points 16 points 16 points 16 points 16 points 16 points 16 points 8 points 16 points 16 points 16 points 16 points

Applicable Auto Switch Model

D-F9N(V)/D-F9P(V)/D-F9B(V) Applicable Actuator Series Grommet Series Bore size (mm) Series Bore size (mm) CDU MXS, MXQ 6, 10, 16, 20, 25, 32 6, 8, 12, 16, 20, 25 MXP CDQ2 32, 40, 50, 63, 80, 100 10, 12, 16 * MTS CDQS 12, 16, 20, 25 20, 25, 32, 40 CY1R MY1 16, 20 6, 10, 15, 20 ; MK MXW 8, 12, 16, 20, 25 12, 16 MK2 MXF 8, 12, 16, 20 32, 40, 50, 63 6, 10, 16 *Not available for series CDQP2

NCG/CG1

WH Rod End Lock: -R Head End Lock: -H Bore size (mm) Bore size (mm) WH W P WA WB WH W P WA WB 20 M5 x 0.8 16 15(16) 30 M5 x 0.8 16 16 30 23 23 20 25 M5 x 0.8 16 15(16) 30 30 M5 x 0.8 16 16 25 25 25 32 Rc 1/8 16 15(16) 25 Rc 1/8 16 16 25 28.5 28.5 32 40 20 Rc 1/8 16 15(16) Rc 1/8 16 16 20 33 33 40 50 20 Rc 1/4 18 17(18) 40.5 Rc 1/4 18 18 20 40.5 50 63 47.5 20 Rc 1/4 18 17(18) Rc 1/4 18 18

CQS

L F G D Bore size 12 16 20 25 12 mm 16 mm 20 mm 25 mm In the case of long strokes, use either ends tapped mounting or bracket mounting. Mounting brackets are shipped together, (but not assembled).

High Vacuum Angle Valve

M: Size 16, 25, 40 only.

0.4

16 32 16 32 16 32 16 M12 DeviceNet 2 to 8 stations (16) 2 to 12 stations (24) 2 to 8 stations (16) 2 to 12 stations (24) 2 to 8 stations (16) 2 to 12 stations (24) 2 to 8 stations (16) 2 to 12 stations (24) 2 to 8 stations (16) 2 to 12 stations (24) 2 to 8 stations (16) 2 to 12 stations (24) 2 to 8 stations (16) VFS M12 PROFIBUS DP VFR D-sub Note 4) M12 CC-Link VQ7 M12 EtherCAT IP67 compliant

NCQ8

") Bushing I.D. 3/16" (Inch) Symbol Bore CJ CG CF CE CD CC 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2") 250 (2-1/2") 0.75 0.19 0.56 0.25 3/16 0.38 0.81 0.25 0.56 0.25 3/16 0.38 1.19 0.25 0.94 0.44 3/8 0.75 1.34 1.25 0.31 0.94 0.44 3/8 0.75 0.380.005 0.56 0.19 1.31 0.38 0.93 0.44 3/8 0.75 1.090.015 0.25 0.75 Symbol Bore 075 (3/4"), 106 (1-1/16"), 150 (1-1/2"), 200 (2"), 250 (2-1/2") CM CL

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

85 + 40 (n 4) /2 n = 4, 8, 12, 16 90 + 40 (n 4) /2 n = 4, 8, 12, 16 95 + 40 (n 4) /2 n = 4, 8, 12, 16 105 + 40 (n 4) /2 n = 4, 8, 12, 16 2 (Different surfaces, Same surface) 1 50 55 60 65 70 80 D-M9mV D-M9mWV n 50 + 30 (n 4) /2 n = 4, 8, 12, 16 55 + 30 (n 4) /2 n = 4, 8, 12, 16 60 + 30 (n 4) /2 n = 4, 8, 12, 16 65 + 30 (n 4) /2 n = 4, 8, 12, 16 70 + 30 (n 4) /2 n = 4, 8, 12, 16

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

1" 1" 1" 1" 4 16 33.5 17 6 12 16 34.5 20 1/4" 19.5 22.5 44.5 47.5 21 25 19.5 44.5 22.5 21 47.5 25 3/8" 5 9 18 16 17 37 38 16 20 16 37 17 16 38 20 1/4" 22.5 24.5 50.5 52.5 24 29 19.5 16 19.5 16 19.5 22.5 17 22.5 17 22.5 45.5 38 45.5 38 45.5 48.5 39 48.5 39 48.5 21 16 21 16 21 25 20 25 20 25 22.5 50.5 24.5 52.5 22.5 24 50.5 29 24.5 24 52.5 29 1/2" 6 10 20 19.5 16 22.5 22.5 19.5 16 22.5 17 24.5

0.4

) DeviceNet System OMRON Corp.: CompoBus/S (16 outputs) OMRON Corp.: CompoBus/S (8 outputs) CC-LINK Max.16 stations 16 Note) 16 stations D Note 3) Note 1) Refer to page 56 for details.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

D-Y69 D-Y7PV D-Y7WV 70 65 75 85 10 60 60 + 30 (n 4)/2 n = 4, 8, 12, 16 75 + 30 (n 4)/2 n = 4, 8, 12, 16 85 + 30 (n 4)/2 n = 4, 8, 12, 16 10 + 30 (n 2)/2 n = 2, 4, 6, 8 65 + 30 (n 4)/2 n = 4, 8, 12, 16 70 + 30 (n 4)/2 n = 4, 8, 12, 16 With n pcs. With 2 pcs.

10

4 40 27 14 30 52 38 16 12 35 13 14 27 8 51 38.5 52.5 M6 x 1 6 21 16 4 50 32 18 35 65 46.5 20 13 40 14 15.5 27.5 11 58 45 59 M8 x 1.25 7 21 16 5 63 32 18 35 75 56.5 20 13 45 14 16.5 28.5 11 58 50 64 M8 x 1.25 7 21 16 5 80 37 22 40 95 72 25 16 45 20 19 37 13 72 62 76.5 M10 x 1.5 10 30 16 5 100 37 26 40 114 89 30 16 55 20 19 37 16 72 71.5 86 M10 x 1.5 10 30 16 5 -Wl Bore size [mm] MM MO N NB

NCQ8

3/16 +0.002 0 +0.002 0 +0.002 0 +0.002 0 +0.002 0 +0.002 0 +0.002 0 +0.016 +0.008 075(3/4") 075(3/4") #10-32UNF #10-32UNF 5/16 0.31 5/16 0.31 +0.002 0 +0.020 +0.012 106(1 1/16") 106(1 1/16") 5/16-24UNF 5/16-24UNF 3/8 0.71 3/8 0.71 +0.002 0 +0.020 +0.012 150(1 1/2") 150(1 1/2") 3/8-24UNF 3/8-24UNF 3/8 0.71 3/8 0.71 +0.002 0 +0.020 +0.012 1/2-20UNF 1/2-20UNF 1/2 0.87 1/2 0.87 200(2"), 250(

Electric Actuator

(Refer to page 16.)

CL

59 67 73 77 85 112.5 121 133 10 12 16 20 25 25 28 32 17 17 20 16 20 20 25 30 36 36 40 40 50 55 65 80 90 90 90 15 17 17 21 21 16 16 11 11 11 11 11 16 16 6.5 6.0 6.0 8.0 8.0 43 43 43 14 14 14 15 17 17 21 21 16 16 30 35 35 40 40 50 50 56 27 32 32 37 37 47 47 53 60 70 86 102 116 145 161 182 15.0 18.0 25.0 31.5 35.5 32.0 36.0 40.0 18.5 18.5 18.5 W/o rod boot W/ rod boot Bore (mm) 40 50 63 80

45

is 16 in terms of manifold bases, as well as solenoids.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Rod End Lock: -R Bore size (mm) WH W P WA WB 20 30 M5 x 0.8 16 15(16) 23 25 30 M5 x 0.8 16 15(16) 25 32 25 Rc 1/8 16 15(16) 28.5 40 20 Rc 1/8 16 15(16) 33 50 20 Rc 1/4 18 17(18) 40.5 63 20 Rc 1/4 18 17(18) 47.5 80 20 Rc 3/8 22 22 60.5 100 20 Rc 1/2 22 22 71 ( ): Denotes the dimensions for long strokes.

Vacuum Pad

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

Vacuum Pad

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16