Stainless Steel 316

Description Stainless steel 316 1 Release bushing Stainless steel 316 2 Guide e r u i o t Stainless steel 316 3 Chuck Special FKM (Fluoro coated) 4 Seal Stainless steel 316 5 Male connector body yre w q Stainless steel 316 6 Male elbow body Special FKM (Fluoro coated) 7 O-ring Stainless steel 316 8 Stopper ring Stainless steel 316 9 Stud 1 Series KQG Dimensions Male Connector: KQGH (In case

Series CJ5-S ø10, ø16 Stainless Steel Cylinder

FX FY FZ GA GB H MM NN NA NB S Z Bore size (mm) 10 15 15 12 17 14 4 8 17.5 5.5 2.5 33 20 42 8 5 28 M4 x 0.7 M10 x 1.0 12.5 9.5 46 74 16 15 18.3 18.3 20 20 5 8 19 5.5 2.5 33 20 42 8 5 28 M5 x 0.8 M12 x 1.0 12.5 9.5 47 75 Double clevis style (D): CJ5DS R V CDH9 + 0.030 0 NB GA 0.030 0.060 Clevis pin ( ) Cdd9 Piping port 2 x M5 x 0.8 GB MM CB CA D 0 0.3 0 0.3 BA BB NA A + 0.2 + 0.1 CX 0 0.3 U

FEP Tubing (Fluoropolymer)

At a temperature of 20C, bend the tubing into a U shape. Fix one end and gradually move the other end closer. Measure 2R at the point where the outside diameter's rate of change is 5%.

Booster Regulator/Air Tank

VBA43A VBA11A VBA42A VBA22A VBA40A VBA20A VBA10A KT-VBA10A-1 KT-VBA20A-1 KT-VBA40A-1 KT-VBA22A-1 KT-VBA42A-1 KT-VBA43A-1 KT-VBA11A-20 Model The kit includes the parts from q to u and a grease pack. VBA43A VBA11A VBA42A VBA22A VBA40A VBA20A VBA10A Quantity Model No.

c

Therefore, refer to the refraction value At a temperature of 20oC, bend the tubing into a U shape. Fix one end and gradually move the other end closer. Measure 2R at the point where the outside diameters rate of change is 5%. and make sure that the tube is not bent or flattened.

e

terminal to connect the FG cable Encoder cable on actuator side Encoder cable for connecting the actuator with the controller Motor cable on actuator side Motor cable for connecting the actuator with the controller Encoder cable on controller side Encoder cable for separating the controller Motor cable on controller side Motor cable for separating the controller Controller detail w t q u

VZM400

5 Stainless steel u POM Plunger !6 Stainless steel i POM Valve seat (A) !7 POM o POM Valve seat (B) 5-6-36 5 Port Mechanical Valve Metal Seal Series VZM400 Series VZM400 Basic VZM450-01-00 JIS Symbol Accessory mounting hole (Pilot exhaust port) SA VA SA VA 0.5 MPa supply VM 1.0 mm P.T. 16 N F.O.F. VR 2.0 mm O.T. 2-3.5 mounting hole 3.0 mm T.T.

ISG

Component Parts Caution No. q w e r t y u i Description Setting pressure adjusting bolt Scale plate Pointer Setting pressure adjusting spring Main lever Bellows assembly Adjusting bolt Snap switch (1a + 1b type) No. o !0 !1 !2 !3 !4 !

SYJ3000

For type R and U, DC voltage is only available. Power saving circuit is only available in the "Z" type. -+ Single Double Brackets cannot be retrofitted. Rated voltage 5 port Note) The double solenoid mounting bracket is supplied unattached.

Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

C U Without indicator Flange side e Temperature specifications/Heater r Auto switch type Applicable flange size 25 40 50 Symbol Nil Auto switch part no.

Series

For "R" and "U", DC voltage is only available. Power saving circuit is only available in the "Z" type. Single (Bracket cannot be retrofitted.) Double Note) The double solenoid mounting bracket is supplied unattached.

ZL112

None Vacuum port adaptor Rc 1/8 Vacuum pressure gauge Digital pressure switch for vacuum Nil GN G D Type U is 24 or 12 VDC only.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve Body Ported/Single Unit

For R and U, only DC voltage is available. Power saving circuit is only available for the Z type. W: With connector cable Note) Note) When placing an order for body ported solenoid valves as a single unit, the mounting screws for the manifold and gasket are not attached. Order them separately, if necessary. (For details, refer to page 100.) CEcompliant DC AC 43

How to Order

For type R, U, only DC voltage is available. Power saving circuit is only available for the "Z" type. AC (50/60 Hz) Bracket CE-compliant 1 2 3 4 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] Nil : Without bracket F : With bracket 3 port For type W, only DC voltage is available. Note) CE-compliant: For DC only.

10-SYJ3000

For type R and U, only DC voltage is available. Power saving circuit is only available for the Z type. -+ Single Double Brackets cannot be retrofitted. 5 port Rated voltage Note)Thedoublesolenoidmounting bracket is supplied unattached.

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Clean Room Specification 11-LEFS Series LEFS16, 25, 32, 40

How to Order 11 LEFS 100 B 1 1 S K 6N 16 w e r t u y o i !0 !1 !2 !

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Secondary Battery Compatible 25A-LEFS Series LEFS16, 25, 32, 40

How to Order 25A-LEFS 25 H R B 200 S 1 6N 1 q r w e t u y i o !0 !1 !

AFJ20 to AFJ40

ow type + d Bowl Note 2) Nil Polycarbonate bowl 6 Nylon bowl + Semi-standard e Flow direction Nil Flow direction: Left to right R Flow direction: Right to left + u f Pressure unit Nil Name plate and caution plate in imperial units: MPa/C Z Note 3) Name plate and caution plate in imperial units: psi/F Note 4) Note 4) Note 4) Note 3) For pipe thread type NPT.

P

0 q t w o OUT IN t u e y OUT IN y e r No.

ISO Standards C85 Series ø 8, ø 10, ø 12, ø 16, ø 20, ø 25 Air Cylinder: Standard Double Acting, Single Rod C85 C85W C85 C85K C85K C85R C75 C75W C75 C75K C75K C75R Single Acting, Spring Return/Extend Single Acting, Spring Return/Extend Single Acting, Spr

. *1 Except 8 Applicable mounting bracket Cushion Nil None L Single foot M Double foot G Flange U Trunnion N Clevis Action Head cover type Mounting bracket L M G U N Nil Rubber bumper (Standard) C Air cushion Built-in magnet N V V V V V E V V V V F V V V Y V V V Nil None D Built-in magnet Rubber bumper Rod boot (20, 25 only) Nil Without rod boot J Nylon tarpaulin (One end) K Heat resistant