1dig (at 25C)Approx. 4 times/s?0.12%F.S./CDisplayed on pressure indication LED0 to 50C?20 to 60C0 to 85%R.H.10 to 55 Hz 1.5 mm amplitude X, Y, Z directions for 2 hrs. each100 m/s2 (approx. 10 G) X, Y, Z directionOnly display unit with cover is equivalent to IP65.

1dig (at 25C)Approx. 4 times/s?0.12%F.S./CDisplayed on pressure indication LED0 to 50C?20 to 60C0 to 85%R.H.10 to 55 Hz 1.5 mm amplitude X, Y, Z directions for 2 hrs. each100 m/s2 (approx. 10 G) X, Y, Z directionOnly display unit with cover is equivalent to IP65.

1dig (at 25C)Approx. 4 times/s?0.12%F.S./CDisplayed on pressure indication LED0 to 50C?20 to 60C0 to 85%R.H.10 to 55 Hz 1.5 mm amplitude X, Y, Z directions for 2 hrs. each100 m/s2 (approx. 10 G) X, Y, Z directionOnly display unit with cover is equivalent to IP65.

1dig (at 25C)Approx. 4 times/s?0.12%F.S./CDisplayed on pressure indication LED0 to 50C?20 to 60C0 to 85%R.H.10 to 55 Hz 1.5 mm amplitude X, Y, Z directions for 2 hrs. each100 m/s2 (approx. 10 G) X, Y, Z directionOnly display unit with cover is equivalent to IP65.

1dig (at 25C)Approx. 4 times/s?0.12%F.S./CDisplayed on pressure indication LED0 to 50C?20 to 60C0 to 85%R.H.10 to 55 Hz 1.5 mm amplitude X, Y, Z directions for 2 hrs. each100 m/s2 (approx. 10 G) X, Y, Z directionOnly display unit with cover is equivalent to IP65.

1dig (at 25C)Approx. 4 times/s?0.12%F.S./CDisplayed on pressure indication LED0 to 50C?20 to 60C0 to 85%R.H.10 to 55 Hz 1.5 mm amplitude X, Y, Z directions for 2 hrs. each100 m/s2 (approx. 10 G) X, Y, Z directionOnly display unit with cover is equivalent to IP65.

1dig (at 25C)Approx. 4 times/s?0.12%F.S./CDisplayed on pressure indication LED0 to 50C?20 to 60C0 to 85%R.H.10 to 55 Hz 1.5 mm amplitude X, Y, Z directions for 2 hrs. each100 m/s2 (approx. 10 G) X, Y, Z directionOnly display unit with cover is equivalent to IP65.

1dig (at 25C)Approx. 4 times/s?0.12%F.S./CDisplayed on pressure indication LED0 to 50C?20 to 60C0 to 85%R.H.10 to 55 Hz 1.5 mm amplitude X, Y, Z directions for 2 hrs. each100 m/s2 (approx. 10 G) X, Y, Z directionOnly display unit with cover is equivalent to IP65.

1dig (at 25C)Approx. 4 times/s?0.12%F.S./CDisplayed on pressure indication LED0 to 50C?20 to 60C0 to 85%R.H.10 to 55 Hz 1.5 mm amplitude X, Y, Z directions for 2 hrs. each100 m/s2 (approx. 10 G) X, Y, Z directionOnly display unit with cover is equivalent to IP65.

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller. (de-energized)490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns

Clean Gas Filter

Construction w u r e q t y IN Description No.

Clean Room Regulator/Fluoro Resin Type Series SRF30

Construction Tubing Integral fittings e y t e t i r y !6 r u i u q o q !0 o !1 !0 w !1 !2 w !2 Parts list !3 No.

VP3145-OMM0003

) 3f 0.5Nm15% a) 3f 3d b) O 1.25mm2-3.5 Y 1.25 mm2-4 c) 6~12mm 9~12mm 1) 4 () 2) () M4 0.60.06Nm N.C.

10 to 50C35 to 85%RH (with no condensation)500 VAC for 1 min. between external terminals and FG10 M or more (500 VDC) between external terminals and FG10 to 150 Hz with a 0.035 mm amplitude or 4.9 m/s2 in each X, Y, Z direction for 2 hrs (De-energized)147 m/s2 in each X, Y, Z direction, 3 times (De-energized)CE marking, UL (CSA)130 g (including accessories)

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller. (de-energized)490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller. (de-energized)490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller. (de-energized)490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller. (de-energized)490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller. (de-energized)490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case.10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller. (de-energized)490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns