ISO Cylinder

Auto switch mounting Auto switch model C85 Series C75 Series Bore size [mm] 8 10 12 16 20 25 32 40 D-M9l(V) D-M9lW(V) D-A9l(V)*7 BJ6-008 (A set of a, b, c, d) BJ6-010 (A set of a, b, c, d) BJ6-012 (A set of a, b, c, d) BJ6-016 (A set of a, b, c, d) BM5-020 (A set of a, b, c, d) BM5-025 (A set of a, b, c, d) BM5-032 (A set of a, b, c, d) BM5-040 (A set of a, b, c, d) D-M9lA(V) BJ6-008S (A

NCA1

) 1 3/4-16 1 1/8 3.9 1/2 3 13/16 1 15/16 1 1/4 3/4 11/64 1.5 1/2 7/8 3/8-24 3.75 0 1/2 5/8 1.57 1.18 6 1/4 1 3/8 2.34 2.72 4.25 7 3/8 6 7/8 7 5/8 400 (4) 1 3/4-16 1 1/8 4.7 1/2 4 1/2 2 1/4 1 1/4 3/4 15/64 1.5 1/2 7/8 3/8-24 4.5 0 1/2 5/8 1.57 1.18 6 1/4 1 3/8 2.34 2.72 4.25 7 3/8 6 7/8 7 5/8 Front Flange Type NC A1F (MF1 Mounting Style)-X130US (in) Bore (in) MM KK A AA B BA C D DD E EA EE

NCA1

") 6 5 5/8 6 1/16 200 (2") 6 5 5/8 6 3/16 250 (2.5") 6 1/8 5 3/4 6 5/16 325 (3.25") 7 3/8 6 7/8 7 5/8 400 (4") 7 3/8 6 7/8 7 5/8 6-15-8 8 Series NCA1 NFPA Interchangeable Air Cylinder Medium Duty Series Rod Side Flange Style: NCA1F (MF1 mounting style) Y P + Stroke AA D across flats 2-EE (NPTF) C 4-FB (Hole) KK EA MM BA CJ1 B R E CJP CJ2 F W J G TF CM2 WF LF + Stroke UF A ZB + Stroke CG1

NCA1

4-DD 2-EE (NPTF) AA WF falts C EA KK MM BA B AE AH AT S J F G 6-AB (Hole) AL AL LF + Stroke R AO AO SA + Stroke E Bore size (in) R MM KK A AA AB AE AH AL AO AT B BA C D DD E EA EE F G J S WF Y P LF 150 (1.5") 5/8 7/16-20 3/4 2.02 3/8 2 3/16 1 3/16 1 7/16 1 1/8 1 1/8 3/8 9/16 2 0.3 3/8 3/8 1.26 1.1 1.43 1/4-28 1/8 3 1 1/4 1 2.36 5/8 1.71 200 (2") 5/8 7/16-20 3/4 2.6 3/8 2 11/16 1 7/16 1 9

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

5 ENC c Encoder connector (16 pins) Axis 3: Connect the actuator cable. !6 MOT c Motor power connector (6 pins) !7 ENC v Encoder connector (16 pins) Axis 4: Connect the actuator cable. !8 MOT v Motor power connector (6 pins) !

CV/MVGQ

7 !8 !

CV/MVGQ

7 !8 !

High Vacuum Angle Valve

Quantity Without auto switch Valve open/closed Valve open Valve closed Mounting position Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 External XLA Nil 1.3 x 10-9 (FKM) 1.3 x 10-7 None A B C A B C r 2-1 7-1 i 7-2 XL XL 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 2-1 7-1 1.3 x 10-9 (FKM) r i 7-2 XLQ Note) Values at normal temperature, excluding gas permeation.

Electric Actuator

P C Regeneration option U C V Servo motor power (U) Servo motor power (V) Servo motor power (W) U V W W Connect to motor cable (U, V, W).

CA2

7 !8 !

MY1

4 C-9 MYM50-15AK0502 GMY50 MC-16 P44 C-4 C-11.2 MYM63-15AK0503 GMY63 MC-20 P53 C-4 C-14 MYM16-15AK0500 GMY16 MYB16-15-A7163 P12 4 x 1.8 x 1.1 7 x 4 x 1.5 MYM25-15AA5903 GMY25 RCS-8 TMY-25 7.15 x 3.75 x 1.7 C-6 MYM32-15AA5904 GMY32 RCS-10 TMY-32 8.3 x 4.5 x 1.9 C-7 MYM20-15AK0501 GMY20 MYB20-15-A7164 P16 5.1 x 3 x 1.05 7 x 4 x 1.5 Note) Two types of dust seal band are available.

Air Cylinder Series CA2

7 r !4 !8 !6 !2 t u !5 o !1 !

Air Cylinder Series MB

7 !

CQS

Foot or Flange style: Body mounting bolt Double clevis style: Clevis pin, type C snap ring for axis, Body mounting bolt CQS-L025 7-4-37 38 Weight/Without Auto Switch (g) Made to Order Specifications (For details, refer to page 7-10-1.)

Air Cylinder

[mm] Auto switch model Bore size 6 10 16 Auto switch mounting Auto switch model Bore size [mm] 6 10 16 D-M9l/M9lV D-M9lW/M9lWV D-M9lA/M9lAV 2 2.5 3 D-M9l D-M9lV D-M9lW D-M9lWV D-A9l D-A9lV Band mounting D-A9l 4.5 6 7 D-H7l/H7lW D-H7BA/H7NF 3 4 4 BJ6-006 (A set of a, b, d, f) BJ6-010 (A set of a, b, c, d) BJ6-016 (A set of a, b, c, d) D-H7C 5 8 9 D-C7l/C80/C73C/C80C 6 7 7 D-M9lA 2 D-M9lAV2

Aluminum High Vacuum Angle Valve

Quantity Without auto switch Valve open/closed Valve open Valve closed Mounting position Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 External XLA Nil 1.3 x 10-9 (FKM) 1.3 x 10-7 None A B C A B C r 2-1 7-1 i 7-2 XL XL 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 2-1 7-1 1.3 x 10-9 (FKM) r i 7-2 XLQ Note) Values at normal temperature, excluding gas permeation.

Basic type / Direct mount type Series CY3B/CY3R

10 14 18 17 20 26 34 48 60 MM M3 x 0.5 M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 N PW 19 26 32 38 43 54 64 82 94 LD 3.5 3.5 4.3 5.4 5.4 7 7 8.6 8.6 M 3.5 4 5 5 6 7 8 10 10 WP 9.5 13 16 19 21.5 27 32 41 47 Y 35.5 39.5 54.5 64 72 79 93 113 121 Z 66 76 94 107 117 130 148 176 188 L 34 38 53 62 70 76 90 110 118 W 20 20 25 40 40 50 60 60 70 WS 6 8 7 7 7 7 7 10 10 X

MY1

7 MYM16-15AK0500 GMY16 MYB16-15-A7163 P12 4 x 1.8 x 1.1 7 x 4 x 1.5 MYM20-15AK0501 GMY20 MYB20-15-A7164 P16 5.1 x 3 x 1.05 7 x 4 x 1.5 MYM25-15AA5903 GMY25 RCS-8 TMY-25 5.1 x 3 x 1.05 C-6 MYM32-15AA5904 GMY32 RCS-10 TMY-32 MYM40-15AA5905 GMY40 RCS-12 TMY-40 8.3 x 4.5 x 1.9 C-9 MYM50-15AK0502 GMY50 MC-16 P44 C-4 C-11.2 MYM63-15AK0503 GMY63 MC-20 P53 C-4 C-14 2 2 2 2 2 4 Scraper Piston seal

A_HEC-OM-K001

Communication . 7-1 7.1 Preparation for Communication . 7-1 7.2 Specifications of communication method. 7-2 7.3 Communication format . 7-3 7.3.1 Control code used for communication . 7-3 7.3.2 Command code list . 7-3 7.3.3 Communication procedures and format . 7-4 7.3.4 Calculation of Check Sum . 7-6 7.4 Details of Communication Format . 7-7 7.4.1 Setting of target temp.

Mechanically Jointed Rodless Cylinder Series MY1

$ 7 9m. & -. : 0 ) $ # & !9m1max & 9 &0.08 M1+ !# m M1 max -$! -. $ 7 9M1. & -;:!. : M1 & m1 g X & < & -;:!.