5 Port Air Operated Valve Series SYA3000/5000/7000 1

(A) 4 (A) 4 (B) 2 (B) 2 (Example) SS5YJA7-41-03-01 1 pc. SYJA7140 1 pc. SYJA7240 1 pc. SYJ7000-21-1A 1 pc. 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 position exhaust center 3 position closed center (A) 4 (A) 4 (B) 2 (B) 2 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) The asterisk denotes the symbol for assembly.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

B port D B C G1 U G2 U If B port of Body (B) is machined, the port is plugged with Rc 1/8.

Electric Actuator with Integrated Guide

pc., (B contact) 2 pcs., Proximity switch rail 1 pc.

Plug-in Unit

2 1(P) port 4-G 1/2 Conduit port VQC SMC SMC SMC SMC SMC SMC SMC SQ 95.5 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 77.5 90 72 VQ0 13 55.5 42.7 43.5 20.5 VQ4 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 33.5 11.5 15.7 12 2-Rc 1/8 (Pilot exhaust port) VQ5 (6.5) 21.5 2-Rc 1/8 (External pilot port) 27 2n-Rc 1/4, 3/8, C8, C10, C12 <4(A), 2(B) port> Rc 1/4: 1/4" Female thread Rc 3/8: 3/8" Female thread C8 : 8 One-touch

VQC

SUP block plate VVQ1000-16A EXH shutoff position When using EXH block base (VVQC1000-19A--C ) Note 1) Port plug Note 2) A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B With 3.2 (1/8") One-touch fitting C3 (N1) Side port Fill out in case of mixed sizes (CM/LM/NM).

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Description Bore size Stroke range 12, 16 1 to 29 Stroke range 20, 25 1 to 49 32 to 63 1 to 99 Part no.: CQ2KB50-57D CQ2KB50-75D with 18 mm width spacer inside. B dimension is 115.5 mm.

VQ5000

0 1 0 1 VQ510 A side + A side VQ520 B side + B side A side + A side 0 1 3 4 5 VQ5 0 B side + B side A side + A side .

High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

Air Cylinder

KK KK EA MM MM B B E/2 4-NT ND Deep SN + Stroke (A + B) Stroke B Stroke A G C A TN C G A E XT XT LD + Stroke (A + B) WF WF ZZ + Stroke (A + B) (in) ZZ PC KK Y R XT G A LD Bore (in) DD C NT ND AA EA D B MM WF P K E SN TN EE 9.44 1.30 7/16-20 1.71 1.43 1 15/16 1.26 3/4 7.44 150 (1.5") 1/4-28 3/8 1/4-20 9/32 2.02 0.3 9/16 1 1/8 5/8 1 2.36 9/32 2 5.56 5/8 3/8 9.52 1.30 7/16-20 1.71 1.84 1 15

MY1

Applicable cylinder MY1B25 MY1B32 MY1B40 Model MY-J Bore size SMY1B Bore size , #3 (#1 + #3 + #6) B 28 40 44 B 78 88 108 F 96 111 131 C 14 20 22 C 39 44 54 E 1 1 1 E 1 1 1 MY-J25 MY-J32 MY-J40 Note) One set of floating brackets consists of one right piece and one left piece.

ISO Cylinder

set of a, b, c, e) (Screw: Stainless steel) *1 *2 *3 *4 Band mounting Switch bracket (Resin) Transparent (Nylon)1 d e White (PBT) b c Auto switch mounting screw Switch holder (Zinc die-casted) a Auto switch mounting band D-C7l/C80 D-C73C/C80C D-H7l/H7lW D-H7BA/H7NF BJ2-008 (A set of a and b) BJ2-010 (A set of a and b) BJ2-012 (A set of a and b) BJ2-016 (A set of a and b) BM2-020A (A set

VQ7-6/7-8

ISO size 1 Series VQ7-6 ISO size 1 Max. 10 stations 0.43n + 0.49 (n: Stations) 1/4 3/8 Bottom Note) When equipped with control unit, 1 or 2 stations are used for mounting. 3-10-11 Series VQ7-6 DIN Terminal Type VV71-100 80 100 2n-1/4, 3/8 80 23 37 9 14 9 15 U side U side Manual override R4.5 R4.5 Indicator light P = 43 53.5 P = 43 53.5 B B B B 9 9 B 23 20 SMC SMC SMC 9 A PA A B B A PA A B

VQ7-6/7-8

ISO size 1 Series VQ7-6 ISO size 1 Max. 10 stations 0.43n + 0.49 (n: Stations) 1/4 3/8 Bottom Note) When equipped with control unit, 1 or 2 stations are used for mounting. 3-10-11 12 Series VQ7-6 DIN Terminal Type VV71-100 80 100 2n-1/4, 3/8 80 23 37 9 14 9 15 U side U side Manual override R4.5 R4.5 Indicator light P = 43 53.5 P = 43 53.5 B B B B 9 9 B 23 20 SMC SMC SMC 9 A PA A B B A PA

Vacuum Pad

)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; Note 1) ; in the table indicates the pad material.

Vacuum Pad

)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; Note 1) ; in the table indicates the pad material.

Vacuum Pad

)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; Note 1) ; in the table indicates the pad material.

2 Phase Stepper Motor/Without Motor Brake Series LXS

(B contact) N.O. (A contact) G GD GB GDB GU GUB 1 1 1 1 1 1 GXL-8F GXL-8FI GXL-8FB GXL-8FIB GXL-8FU GXL-8FUB 3 wire/NPN 3 wire/NPN 3 wire/NPN 3 wire/NPN 2 wire/Solid state 2 wire/Solid state N.C. (B contact) LXF LXS LXP LXS N.O. (A contact) N.C. (B contact) N.C. (B contact) N.C. (B contact) N.C. (B contact) N.O. (A contact) N.O. (A contact) N.O. (A contact) N.O. (A contact) N.C.

Micro Mechanical Valve Series VM1000

VZM400 5 port (A) (B) 2 4 Metal spool 12 3 1 5 14 Best Pneumaticsz-2 (EB) (P) (EA) Side ported 1/8 VZM500 5 port (A) (B) 2 4 Rubber spool 12 3 1 5 14 (R2) (P) (R1) VFM200 5 port (A) (B) 2 4 Metal spool 12 3 1 5 14 (EB) (P) (EA) Side ported 1/4 VFM300 5 port (C2) (C1) 2 4 Rubber spool 12 3 1 5 14 (E1) (S) (E2) Front matter 2 2/3 Port Mechanical Valve Series VM100 RoHS Compact size Piping

7

29-1 (for Class B) VCW20-1-29-1-F (for Class H) VXA Lead Wire Assembly Part No. for Flat Terminal (Set of 2 pcs.)

Stability of suction position,

Core sheet XT661 D Seal Dimensions t d Material: Core sheet Rolled steel Seal NBR Part no. d B H Sales unit ZPNA-M6 M6 x 1 8 3 Dimensions 10 pcs. ZPNA-M12 M12 x 1.25 19 7 ZPNA-M14 M14 x 1 19 5 ZPNA-M16 M16 x 1.5 22 6 Part no. t D Applicable thread size ZP3EA-SW6 1.3 14 M6 x 1 ZP3EA-SW10 1.6 15.5 M10 x 1 ZP3EA-SW12 2 24.3 M12 x 1.25 ZP3EA-SW16 2 28 M16 x 1.5 H B 2 pcs.