/N.C.), 1st Selection Vacuum V Port: 7 (Vacuum, V Port: Ø1/4), 1st Selection Quantity: 3
/N.C.), 1st Selection Vacuum V Port: 6 (Vacuum, V Port: Ø6), 1st Selection Quantity: 8
Body Size: 40, Model Type: D (Filter Regulator + Mist Separator), Thread: N (NPT), Port Size: 04 (1/2), Float Type Auto Drain: D [N.O.
Body Size: 40, Model Type: D (Filter Regulator + Mist Separator), Thread: Rc, Port Size: 04 (1/2), Float Type Auto Drain: D [N.O.
Body Size: 40, Model Type: D (Filter Regulator + Mist Separator), Thread: Rc, Port Size: 04 (1/2), Float Type Auto Drain: D [N.O.
channels (1 channel/connector)24 VDC0.5 A/connectorShort-circuit protection0 to 10 V, 1 to 5 V, 0 to 5 V1 k or more?
Valve; w/Stop Valve), Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: ET (Out 1: PNP; Out 2: Flow Rate: Analog 1 to 5 V ⇔ Analog 1 to 5 V; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector), Return Unit Flow Switch Unit Specifications: M (Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display IO-Link: L/min;
Valve; w/Stop Valve), Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: ET (Out 1: PNP; Out 2: Flow Rate: Analog 1 to 5 V ⇔ Analog 1 to 5 V; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector), Return Unit Flow Switch Unit Specifications: M (Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display IO-Link: L/min;
Valve; w/Stop Valve), Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: ET (Out 1: PNP; Out 2: Flow Rate: Analog 1 to 5 V ⇔ Analog 1 to 5 V; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector), Return Unit Flow Switch Unit Specifications: M (Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display IO-Link: L/min;
Valve; w/Stop Valve), Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: ET (Out 1: PNP; Out 2: Flow Rate: Analog 1 to 5 V ⇔ Analog 1 to 5 V; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Return Unit Flow Switch Unit Specifications: M (Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display IO-Link: L/min; Accumulated
Valve: None; Stop Valve: None, Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: CT (Out 1: NPN; Out 2: Flow Rate: Analog 1 to 5 V ⇔ Analog 1 to 5 V; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Return Unit Flow Switch Unit Specifications: M (Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display IO-Link:
Valve: None; Stop Valve: None, Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: CT (Out 1: NPN; Out 2: Flow Rate: Analog 1 to 5 V ⇔ Analog 1 to 5 V; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector), Return Unit Flow Switch Unit Specifications: M (Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display IO-Link
Valve; w/Stop Valve), Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: ET (Out 1: PNP; Out 2: Flow Rate: Analog 1 to 5 V ⇔ Analog 1 to 5 V; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Return Unit Flow Switch Unit Specifications: M (Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display IO-Link: L/min; Accumulated
Valve: None; Stop Valve: None, Supply/Return Port Size: 06 (3/4), Return Unit Flow Switch Output Specifications: ET (Out 1: PNP; Out 2: Flow Rate: Analog 1 to 5 V ⇔ Analog 1 to 5 V; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector), Return Unit Flow Switch Unit Specifications: J (Integrated Display: L/min; Accumulated Flow: L; Temp.: °F)
Valve; Stop Valve: None), Return Port Size: 03 (3/8), Flow Switch Output Specifications: 1T (Out 1: Analog 1 to 5 V; Out 2: Flow Rate: None; Temp.: Analog 1 to 5 V; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector)
Valve; w/Stop Valve), Return Port Size: 03 (3/8), Flow Switch Output Specifications: CT (Out 1: NPN; Out 2: Flow Rate: Analog 1 to 5 V ⇔ Analog 1 to 5 V; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector), Flow Switch Unit Specifications: M (Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display IO-Link: L/min; Accumulated Flow: L; Temp.: °C
Valve: None; Stop Valve: None, Return Port Size: 03 (3/8), Flow Switch Output Specifications: CT (Out 1: NPN; Out 2: Flow Rate: Analog 1 to 5 V ⇔ Analog 1 to 5 V; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Flow Switch Unit Specifications: J (Integrated Display: L/min; Accumulated Flow: L; Temp.: °F)
Note 2) Analog output has no overcurrent detection function.
Ion generation method Corona discharge type Method of applying voltage High frequency AC type Discharge time 0.3 s (1000 VR100 V) Offset voltage Within 10 V (Static neutralization distance: 100 mm from the nozzle) Ionizer Type Pneumatic type, Vacuum ow Number of mounted units 1 2 Supply pressure range 0.1 to 0.7 MPa Exhaust ow rate 410 to 1580 L/min (ANR) 820 to 3160 L/min (ANR) Dust collector
NBR FKM Pressure range 0 to 7 MPa Rc G (ISO1179-1) NPT NPTF 3/8 1/2 3/4 1 Nil G N T Y u Pilot valve o Electrical entry T: Conduit terminal D: DIN terminal (Pitch between the terminals: 11 mm) W: M12 connector (4-pin type) Note 2) V: M12 connector (5-pin type) Note 3) DO: DIN terminal without connector Note 1) V116 i Rated voltage 1 2 3 4 5 6 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC [115