101 kPa?1 to ?100 kPa2 l/min (ANR) (Supply pressure: ?101 kPa)24 VDC ?10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?

Single Axis Electric Actuator Series LJ1H

Page 101 Clean room specification . 104 Dust seal specification . 110 TSUBAKI CABLEVEYOR specification . 122 Construction . 134 Mounting . 140 Non-standard Motor Mounting Dimensions . 143 Deflection Data . 145 LJ1H/High Rigidity Guide .

Single Axis Electric Actuator Serriies LJ1S Slider Guide

Single Axis Electric Actuator Series LJ1S Series LJ1S Slider Guide Lead screw lead mm Mounting Page Model Series Guide type Motor type orientation Slide screw 20 20 20 20 20 20 LJ1S10 LJ1S20 LJ1S30 LJ1S10 LJ1S20 LJ1S30 88 Standard 90 motor 92 Slider guide LJ1S Horizontal 94 Standard 96 motor 98 Option specifications Page 100 Made to Order 101 Dust seal specification 116 TSUBAKI CABLEVEYOR

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

specification Dust seal specification TSUBAKI CABLEVEYOR specification Clean room specification (-X60) LJ1H 10/20/30 (Horizontal mount/Vertical mount) Page 104 Dust seal specification (-X70) LJ1H 10/20/30 (Horizontal mount/Vertical mount) 110 LJ1S 10/20/30 (Horizontal mount) 116 TSUBAKI CABLEVEYOR specification (-X40) LJ1H 10/20/30 (Horizontal mount) 122 LJ1S 10/20/30 (Horizontal mount) 128 101

MXW Series Long Stroke Slide Table

26 103 26 Y L 5H9 +0.03depth 4.5 0 10 15 15 K A 35 20 26.5 A Z Bottom through hole 4.2 N-M5 x 0.8 thread depth 10 (N-1) x H G M5 x 0.8 thread depth 10 GG H 6 depth 4.5 5H9 +0.03 Bottom through hole 4.2 0 F E 5H9 +0.03depth 4.5 0 G F E Model J H GG Z N L K 82.5 123 91 MXW12-100 114 35 30 280 5 51 35 102.5 158 111 MXW12-125 137 35 32.5 330 6 76 60 127.5 182 136 MXW12-150 164 40 47.5 380 6 101

5 Port Solenoid Valve, Series VQC

RED ON: MAC_ID duplication error, or BUSOFF error (major communication abnormality). 11 11 Base-Mounted Type Plug-in Unit Series VQC4000 1in = 25.4mm VV5QC41 S Kit (Serial Transmission Kit: EX240) L2 (1 input block: 8 inputs) 14.5 (128.5) L1 8 6.5 Indicator light 54 P = 25 65.5 Manual override Min.0 to Max. 4 unit (0 to 216mm) 9 9 163 A B A B A B A B A A A B 10 143 32 98.8 143 101 Mounting

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

Dimensions Formulae L1 = 16n + 53 L2 = 16n + 87 n: Stations (max. 16 stations) L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L1 L2 (L3) (L4) 85 119 150 160.5 101 135 162.5 173 117 151 175 185.5 133 167 187.5 198 149 183 212.5 223 165 199 225 235.5 181 215 237.5 248 197 231 262.5 273 213 247 275 285.5 229 263 287.5 298 245 279 300 310.5 261 295 325 335.5 277 311 337.5 348 293 327 350 360.5 309

AC Servo Motor Driver (CC-Link Type)

(Warnings are not displayed.) -128- Revision history No.JXC OMW0030 Jun./2019 1st printing 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2019 SMC Corporation All Rights Reserved

OMR0032

For details of the COM port checking and setting methods refer to the LATC Configurator Configuration Software Installation Manual". 101 - Check that the LATCA controller, communication cable, USB cable, and PC are connected correctly. For example, communication cannot be established if the connector has been damaged.

IDX-OM-W020

] 17.8 0.5 IDFB4E 1/2 [453] 17.8 [13] 11.1 10.8 [453] 1.2 [283] 3.1 [275] 10.8 17.9 10.6 1.7 9.1 1.3 0.6 9.4 3.1 IDFB6E [455] 0.6 [270] [31] [42] [80] [230] [32] [15] [240] [80] [275] 3/4 [15] IDFB8E 19.1 22.4 14.0 11.8 [300] IDFB11E [485] [568] [355] IDFB15E 1 11.8 23.7 22.8 1.6 2.1 16.6 3.4 10.2 1.7 0.6 10.6 4.0 15 12.4 0.6 [300] [603] [578] [41] [54] [396] [87] [258] [43] [15] [270] [101

PSxx-OMR0001CN

5No.PS-OMR0001CN-J 1 41 LCD VX2 (2 )AR20 () -6No.PS-OMR0001CN-J 2 (0.01 mm0.03 mm0.02 mm0.15 mm0.05 mm0.30 mm) ON()/OFF()() (A)() (B)() (C)(B)() -7No.PS-OMR0001CN-J 2 2 9 0.010.03mm 0.020.15mm 0.050.30mm DIN F G H 7 10 B Rc1/8 4 1 C 6 2 1 3 G1/8 F 3 G1/8 7 NPN1 PNP1 N P L 4 7 5 M SI N 1 2 3 4 5 6 1 2 S 6 7 8 3 4 5 6 6 7 8 T 1F 2GH 3ISO1179-1 4 5kPa 61 7 88 (10 ) 9DIN 101

PSxx-OMT0001CN

5No.PS-OMT0001CN-E 1 42 LCD VX2 (2 )AR20 () -6No.PS-OMT0001CN-E 2 (0.01mm0.03mm0.02 mm0.15 mm0.05 mm0.30 mm) ON()/OFF()() (A)() (B)() (C)(B)() -7No.PS-OMT0001CN-E 2 2 DIN 9 F 0.010.03mm 0.020.15mm 0.050.30mm G H 7 10 B Rc1/8 4 1 6 2 1 3 G1/8 G1/8 3 7 NPN2 PNP2 A B 4 L 7 5 SI N 1 2 3 1 2 3 4 5 6 S 6 7 8 4 5 6 6 7 8 T 1F 2GH 3ISO1179-1 4 5kPa 61 7 88 (10 ) 9DIN 101

8)W = 61n + 101, 1.05506 lb, ModelApplicable valveManifold typeP(SUP)/R(EXH)Valve stations Note)A, B Porting specificationsPort sizeManifold base weight W (g) n: StationsP, EA, EB portA, B portSS5X5-41SX5 40Single base/B mountCommon SUP/Common EXH2 to 20 stationsBaseSideRc 1 4Rc 1 8C6 (One-touch fitting for ?6)C8 (One-touch fitting for ?8)W = 61n + 101

101 kPa?1 to ?100 kPa2 l/min (ANR) (Supply pressure: ?101 kPa)24 VDC ?10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?

101 kPa?1 to ?100 kPa2 l/min (ANR) (Supply pressure: ?101 kPa)24 VDC ?10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?

101 kPa?1 to ?100 kPa2 l/min (ANR) (Supply pressure: ?101 kPa)24 VDC ?10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?

101 kPa?1 to ?100 kPa2 l/min (ANR) (Supply pressure: ?101 kPa)24 VDC ?10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?

101 kPa?1 to ?100 kPa2 l/min (ANR) (Supply pressure: ?101 kPa)24 VDC ?10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?

The ZSE1 monitors vacuum level down to -101 kPa.  ZSE1 can be mounted in a ZM vacuum generator system, or by metric or NPTF male threads.  Rotary trimmers adjust the switch set point and variable hysteresis if 1 output, or two set point trimmers if 2 output.  A red/green LED indicator also lights when the output signal in ON.

Basic vacuum switch with rotary adjustment of a digital output signal; Vacuum range: -101 to 0 kPa; Output: 1 signal output (NPN or PNP); Power supply requirement: 12 to 24 VDC; Repeatability: ±1% of F.S.; Port sizes: 1/8 Rc or 1/8 NPTF male, or ZX or ZR gernerator mountable