Slit Valve

x 0.8 Rc 1/8 End-lock mechanism With lock mechanism at opening/closing position Note 5) Cylinder volume (L) 0.12 0.2 Non-cassette type 8 14 Cassette type: Standard 12 20 Weight (kg) Cassette type: Half MESK 12 20 Cassette type: Full MESK 11 Note 1) Absolute pressure Note 2) Value at normal temperature: Not including gas permeation.

Manifold Regulator Modular Type ARM2500/3000 Series

End plate ARM2500 ARM3000 O-ring 12 1 13636A 13646A 13636B (Except O-ring) 13646B (Except O-ring) assembly Diaphragm assembly Weather resistant NBR 3 2 Bracket A 1349161A 131515A Bracket Bracket 2 1 set Valve assembly Brass, HNBR 4 Bracket B 13639A 13649A 13 Hex. socket head cap screw Valve spring Stainless steel 5 136310 136410 2 KA00892 KA00904 12 Valve O-ring NBR 6 1 O-ring 11.5 x 8.5

0.1 MPa500 kPaAir/Non-corrosive gas48 x 48 x 100.512 to 24 VDC (15 W or more), Ripple (p-p) 1% or lessqNo. of inputs: Up to 10 bit input from sequencer (parallel) Note 5) Input method: No-voltage contact or NPN open collector input Minimum pulse width: 50 msecwInput method: 4 point input with keys(Interval time can be set by programming.)12 VDC (Max. 300 mA) with accuracy of 12 to 14.4 VDC

It is equivalent IP40 without cover.Built-in sensor type, External sensor type Note 3)10 years when deenergized (EEPROM)M5 female (built-in sensor type)Enclosure: POM Display: PC Gasket: NBRPanel mount adapter: POMDisplay protective cover: PCApprox. 330 g (Built-in sensor type)Approx. 345 g (External sensor type)

It is equivalent IP40 without cover.Built-in sensor type, External sensor type Note 3)10 years when deenergized (EEPROM)M5 female (built-in sensor type)Enclosure: POM Display: PC Gasket: NBRPanel mount adapter: POMDisplay protective cover: PCApprox. 330 g (Built-in sensor type)Approx. 345 g (External sensor type)

, Ambient and fluid temperature: -10 to 50 C, VALVE, COMPACT, CONNECTOR, VALVE, VQ100 SOL VALVE 3-PORT, BA, VQ100 BODY PT M5, .06552 lb

High Vacuum L Type Valve

40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.

XL-OMY0001

XLA-16-2 XLA-25-2 XLA-40-2 XLA-50-2 XLA-63-2 XLA-80-2 16 25 40 50 63 80 5605150 -6 Pa(abs) 110 l/s 1 5 14 45 80 160 200 10 FKM1.310 3/s Pam -11 FKM1.310 KFNW KFNW KDN SUS316L,SUS304,FKM MPa(G) 0.40.7 3 2 0.5MPa 31 61 220 390 680 1420 cm M5 Rc1/8 kg 0.28 0.47 1.1 1.7 3.1 5.1 1 21 9 XL-OMY0001 4-2 XLA-25-2 XLA-40-2 XLA-50-2 AC90240V XL1A25-60S-1 XL1A25-60S-1 1 1 H4 AC100V 200

MHx-OMZ0003

No.MH*-OMZ0003 / / JMHZ2-16D-X7400B-TM . 2 1. . 4 2. . 5 3. . 6 3-1. . 6 3-2. . 7 3-3. . 8 3-4. . 9 3-5. () . 10 3-6. . 11 3-7. . 12 4. . 13 4-1. . 13 4-2. 3 . 14 4-3. . 15 5. . 16 5-1 . 16 5-2. . 16 5-3.

MHx-OMZ0005

M6x23 D-M9(N/P)-5 M3X7 JMHZ2-16D M-5ALHU-2 2 KQ2S04-M5N ASN2-M5-X937 :3x6 3 V114-5LU M4x25 ISO9409-1 6x10 M8-Molex M6x10 M6x10 6x10 5 - 3 3-1. JMHZ2-16D-X7400B-HC10 MOTOMAN-HC10 JMHZ2-16D-X7400B-HC10DT MOTOMAN-HC10DT 6 - 3-2.

It is equivalent IP40 without cover.Built-in sensor type, External sensor type Note 3)10 years when deenergized (EEPROM)M5 female (built-in sensor type)Enclosure: POM Display: PC Gasket: NBRPanel mount adapter: POMDisplay protective cover: PCApprox. 330 g (Built-in sensor type)Approx. 345 g (External sensor type)

typeSet value retentionPort sizeMaterialWeightIC10.1 MPa500 kPaAir/Non-corrosive gas48 x 48 x 100.512 to 24 VDC (15 W or more), Ripple (p-p) 1% or lessqNo. of inputs: Up to 10 bit input from sequencer (parallel) Note 5) Input method: No-voltage contact or NPN open collector input Minimum pulse width: 50 msecwInput method: 4 point input with keys(Interval time can be set by programming.)12

typeSet value retentionPort sizeMaterialWeightIC10.1 MPa500 kPaAir/Non-corrosive gas48 x 48 x 100.512 to 24 VDC (15 W or more), Ripple (p-p) 1% or lessqNo. of inputs: Up to 10 bit input from sequencer (parallel) Note 5) Input method: No-voltage contact or NPN open collector input Minimum pulse width: 50 msecwInput method: 4 point input with keys(Interval time can be set by programming.)12

typeSet value retentionPort sizeMaterialWeightIC10.1 MPa500 kPaAir/Non-corrosive gas48 x 48 x 100.512 to 24 VDC (15 W or more), Ripple (p-p) 1% or lessqNo. of inputs: Up to 10 bit input from sequencer (parallel) Note 5) Input method: No-voltage contact or NPN open collector input Minimum pulse width: 50 msecwInput method: 4 point input with keys(Interval time can be set by programming.)12

It is equivalent IP40 without cover.Built-in sensor type, External sensor type Note 3)10 years when deenergized (EEPROM)M5 female (built-in sensor type)Enclosure: POM Display: PC Gasket: NBRPanel mount adapter: POMDisplay protective cover: PCApprox. 330 g (Built-in sensor type)Approx. 345 g (External sensor type)

It is equivalent IP40 without cover.Built-in sensor type, External sensor type Note 3)10 years when deenergized (EEPROM)M5 female (built-in sensor type)Enclosure: POM Display: PC Gasket: NBRPanel mount adapter: POMDisplay protective cover: PCApprox. 330 g (Built-in sensor type)Approx. 345 g (External sensor type)

It is equivalent IP40 without cover.Built-in sensor type, External sensor type Note 3)10 years when deenergized (EEPROM)M5 female (built-in sensor type)Enclosure: POM Display: PC Gasket: NBRPanel mount adapter: POMDisplay protective cover: PCApprox. 330 g (Built-in sensor type)Approx. 345 g (External sensor type)

It is equivalent IP40 without cover.Built-in sensor type, External sensor type Note 3)10 years when deenergized (EEPROM)M5 female (built-in sensor type)Enclosure: POM Display: PC Gasket: NBRPanel mount adapter: POMDisplay protective cover: PCApprox. 330 g (Built-in sensor type)Approx. 345 g (External sensor type)

It is equivalent IP40 without cover.Built-in sensor type, External sensor type Note 3)10 years when deenergized (EEPROM)M5 female (built-in sensor type)Enclosure: POM Display: PC Gasket: NBRPanel mount adapter: POMDisplay protective cover: PCApprox. 330 g (Built-in sensor type)Approx. 345 g (External sensor type)

It is equivalent IP40 without cover.Built-in sensor type, External sensor type Note 3)10 years when deenergized (EEPROM)M5 female (built-in sensor type)Enclosure: POM Display: PC Gasket: NBRPanel mount adapter: POMDisplay protective cover: PCApprox. 330 g (Built-in sensor type)Approx. 345 g (External sensor type)