Battery-less

to 50 45 to 65% LEYG25M L mE A/B/C 21 to 35 40 to 50% LEYG16 mE M L 160 Lead 2.5: LEYG16 EC M L 140 120 Lead 5: LEYG16 EB M L LEYG32M L mE A 24 to 30 50 to 70% B/C 21 to 30 Force [N] 100 Lead 10: LEYG16 EA M L 80 LEYG40M L mE A 24 to 30 50 to 65% B/C 21 to 30 60 40 0 20 Min. 20% 10 0 20 30 40 50 60 70 Max. 65% Model LEYG16M LmE

CG5-S

1.5 21 27 71 23 35 64 50 56 21 27 IY-G08SUS +0.5 +0.3 +0.084 0 22 22 32 32 I-G10SUS Y-G10SUS 100 100 M26 x 1.5 79 21 45 55 M26 x 1.5 24 31 79 24 40 72 55 64 24 31 IY-G10SUS Not applicable for -X165US option Not applicable for -X165US option Knuckle joint pin Trunnion bracket Material: SUS440 (pin) SUS304 (bracket, snap ring) Material: SUS440 (pin) SUS304 (snap ring) LL CDd9 (CX) LY d Dd9

SMC Pneumatic Clean Series

Series 10-/11-/21-/22-CDG1 Series 10-/11-REC Series 10-/11-CDM2X Series Perpendicular entry is unavailable.

CJ5-S

14 58 11 58 M8 x 1.25 7 18 22 5.5 M18 x 1.5 55 1/4 15 109 21 RB 63 14 Up to 600 40 35 32 27 38 60 20 21 14 58 11 72 M10 x 1.5 7 18 22 7 M18 x 1.5 69 1/4 15 109 21 80 22 60 Up to 750 40 37 32 50 75 25 28 20 71 13 89 M10 x 1.5 10 22 33 7 M22 x 1.5 80 3/8 23 130 32 J 100 22 60 Up to 750 40 37 41 60 90 30 29 20 71 16 M12 x 1.75 10 26 33 8 M26 x 1.5 100 1/2 23 131 32 110 DBore size (mm) Pivot

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

CJ216 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 16 Air cushion is not available for 21-/22-.

CJ5-S

14 58 11 58 7 18 22 5.5 M18 x 1.5 55 1/4 15 109 21 M8 x 1.25 RB 63 14 Up to 600 40 35 32 27 38 60 20 21 14 58 11 72 M10 x 1.5 7 18 22 7 M18 x 1.5 69 1/4 15 109 21 80 22 60 Up to 750 40 37 32 50 75 25 28 20 71 13 89 M10 x 1.5 10 22 33 7 M22 x 1.5 80 3/8 23 130 32 J 100 22 60 Up to 750 40 37 41 60 90 30 29 20 71 16 10 26 33 8 M26 x 1.5 100 1/2 23 131 32 110 M12 x 1.75 DBore size (mm) Pivot

24

40 26 23 11.5 25.5 21 19 50 24 23 13 27 21 19 63 25 25.5 11 25 21 19 D-X 475 MGP Series Dimensions: 80, 100 4 x NN through 4 x OA through 4 x MM depth ML 4 x YY depth YL L WA Z 30 HR 4 x OB counterbore depth 8 Section XX Section XX Section XX (8) HA: T-slot for hexagon bolt X 0.02 DA X 0.02 X 0.02 21 H VA VB 40 U X T R X PW DB 6H9 depth 10 2 x P GC PB GB GA 10 2 x P (Plug) Q S WB DL JB JA

Air Slide Table

I J 5.5 11 5.7 11.2 2 x M5 x 0.8 thread depth 8 5H9 depth 5 +0.030 0 N x M5 x 0.8 thread depth 6 5H9 depth 5 +0.030 0 5.7 11 6 1 1 28 24.5 58 29 24 49 14.5 24.5 3.5 F 6.5 4 x M5 x 0.8 thread depth 7 14 -1 x F 2 N 21 3 x M6 x 1 thread depth 10 M 10 KA 21 10 5.5 Bottom view of MXQR16-50 NA x M5 x 0.8 thread depth 6.5 45 35 13 K 21 33.7 0.3 10 5.5 5.5 37 Z ZZ G (NN-1) x H H 22.4 7.6 22.4 7.6

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

L2 L1 Manual override (Non-locking) VT VP 55.5 [62] 43.1 36.5 25.5 49 VG A A 19 9.5 VP 21 (Pitch) n-Rc (PT)1/8 P=17 21 (A port) VQ A A 19 9.5 18.5 VQZ (Pitch) n-M5 X 0.8 P=16 21 (A port) VZ [ ] for AC Other dimensions are the same as the M5.

Solid State Auto Switches

Sheath Outside diameter [mm] 3.4 2 cores (Brown/Blue) Number of cores Insulator 1.1 Outside diameter [mm] 0.2 Effective area [mm2] Conductor 0.08 Strand diameter [mm] 21 Minimum bending radius [mm] (Reference values) Note 1) Refer to page 1568 for solid state auto switch common specifications. Note 2) Refer to page 1568 for lead wire lengths.

MG

Bore size (mm) Bore size (mm) DB DL DM HR LL MO Over 25 st to 75 st 98 Over 75 st to 175 st 118 Over 175 st 250 st 140 25 st or less 0 Over 25 st to 75 st 13.5 Over 75 st to 175 st 33.5 Over 175 st 250 st 55.5 25 st or 32 32 22 22 9.5 21 15 15 84.5 16 40 40 26 23 11.5 25.5 21 19 91 98 118 140 16 0 7 27 49 50 50 97 24 23 13 27 21 19 114 134 161 20 0 17 37 64 63 63 102 114 25 25.5 11 25 21

Air Slide Table Series MXQ

-50 21 KA NA x M5 x 0.8 thread depth 6.5 10 5.5 21 K 13 35 45 10 5.5 33.7 0.3 5.5 37 Z ZZ (NN 1) x H G H 21 9 21 9 A B 10.5 10.5 5.1 5.1 9.5 9.5 24 6 B A 5H9 depth 5 +0.030 0 NN x M6 x 1 thread depth 12 5H9 depth 5 +0.030 0 HA GA Section AA Section BB (mm) Model F 38 38 48 58 40 46 44 44 GA 18 18 19 19 48 73 80 105 KA 91 123 166 191 NA 4 4 4 4 8 8 8 8 N 4 4 4 4 6 6 8 10 HA 39 39 48 58 45

MY1

26 32 43.5 60 VV 16 19 23 28 30 TT 15.5 21 22.5 35 43 WW 11 13 20 22 25 UU 16 16 24.5 24 28 XX 38 48 54 74 92 SS 3.5 4 10.5 10 13 RR 19 24 25.5 35 49 "P" indicates cylinder supply ports.

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

CJ216 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 16 Air cushion is not available for 21-/22-.

VQC

0 (Terminal block) T Kit 21 Note) Drawing shows VQC1000 type. VQC Base-Mounted Type Manifold Exploded View Manifold Assembly Part No. Housing assembly and SI unit/Input block Description Note Applicable model Part no. No.

TABLE OF CONTENTS

21, 31 NPT 1/2 AN CONNECTOR MISCELLANEOUS OPTIONSsee page 76 All Models BODY OPTIONSsee page 80 SPLICE BOX HOUSING 3.52 3.22 (81.8) .34 (8.6) FINE METERING SILVER SHADING RING All Models 2.50 (63.5) (89.4) Model 21 All Models JIC HOUSING METERING TO ORIFICE ALUMINUM SHADING RING Model 21 Model 21 All Models YOKE MANUAL OVERRIDE BUILT IN MUFFLER All Models 21*, 71 All Models 1.88 (47.8) MOUNTING

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Motor LEFS32 5H9 ( ) depth 5 +0.030 0 (122) Encoder cable (7) Body mounting Note 1) reference plane 4 x M6 x 1 thread depth 9.9 70 42 Motor cable (7) 44 60 5.5 +0.030 0 5H9 ( ) depth 5 Motor option: With lock (2.2) L Encoder cable (7) A (Table traveling distance: Stroke + 6) Note 2) Motor cable (7) (201) (62) 10 62 70 (66) Stroke (64) Encoder Z-phase detecting position Note 3) (231) 48 21

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Refer to pages 11-4-20 to 11-4-21 for detailed specifications. 11-2-21 21 Series CRB2BWU Dimensions: 10, 15, 20, 30 (With angle adjuster) Single vane type Following illustrations show actuator for 90 when A port is pressurized. CRB2BWU10/15/20/30-S Double vane type Following illustrations show the intermediate rotation position when A or B port is pressurized.

Table of Contents

Refer to pages 11-4-20 to 11-4-21 for detailed specifications. 11-2-21 21 Series CRB2BWU Dimensions: 10, 15, 20, 30 (With angle adjuster) Single vane type Following illustrations show actuator for 90 when A port is pressurized. CRB2BWU10/15/20/30-S Double vane type Following illustrations show the intermediate rotation position when A or B port is pressurized.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Refer to pages 11-4-20 to 11-4-21 for detailed specifications. 11-2-21 21 Series CRB2BWU Dimensions: 10, 15, 20, 30 (With angle adjuster) Single vane type Following illustrations show actuator for 90 when A port is pressurized. CRB2BWU10/15/20/30-S Double vane type Following illustrations show the intermediate rotation position when A or B port is pressurized.