ISG

Contacts/Bulb gland Pressure Source Nil W Nil B C 1a1b (Standard) 2ab Contact Warning Enclosure Type A 20a (Standard) Type A 20b Type A 20c Bulb gland 1.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Max. 5 Without magnet and switch rail 2-M2 x 0.4 depth 3 2-M3 x 0.5 depth 3.5 For rail mounting For magnet mounting 8 2.5 L 4.7 6-M3 x 0.5 depth 4 15 15 (mm) MA Z W V S M L K J H N Model 6 60 40 44 10 21 20 20 52.4 32 6.5 MXP10-10B 18 90 65 74 20 39 36 36 82.4 50 7.5 MXP10-20B 10 Series MXP Dimensions MXP12 2-M4 x 0.7 depth 6 2-M3 x 0.5 depth 4 Z 3 With metal stopper V K 5 4 G Max. 4 Max

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Table (3) Guide block L3 L3 End face L3 (mm) 19 15 15 15 15 15 Model MXP10-10B MXP10-20B MXP12-15B MXP12-25B MXP16-20B MXP16-30B Tightening torque (Nm) Model MXP10 MXP12 MXP16 1.67 8-8-5 5 Series MXP Model Selection Model Selection Step Formula/Data Selection Example Operating Conditions 1 Enumerate the operating conditions considering the mounting position and workpiece configuration.

Air Slide Table Series MXP

L3 L3 End face Guide block Table 3 L3 (mm) 19 15 15 15 15 15 Model MXP10-10B MXP10-20B MXP12-15B MXP12-25B MXP16-20B MXP16-30B 212

ISG

Contacts/Bulb gland Pressure Source Nil W Nil B C 1a1b (Standard) 2ab Contact Warning Enclosure Type A 20a (Standard) Type A 20b Type A 20c Bulb gland 1.

High-Precision Digital Pressure Switch

. *2 Further reduced by approx. 60% in power-saving mode (For 20 series) The 20A, 20B, and 20C series have been added to the product lineup.

Vacuum Ejector Body Ported Type/Box Type (Built-in Silencer)

For M3: 0.315 0.03 Nm For M4: 0.76 0.08 Nm *1: For ZH15 to 20B, there is only one mounting hole 6 - Doc. no. ZH-OM00401 Mounting of the standard bracket (ZH05 to 15DA) and adjustment of the vacuum (V) port (1) Align the recess of the standard bracket and the protrusion of the adapter.

Vacuum Regulator

Weight reduced by 20% (Compared with the existing IRV2000 with IRV20 fitting) New and Improved IRV Series New and Improved IRV Series Max. flow Max. flow Max. flow (Over twice the flow of the existing models) 24 240 240l/min (ANR) 140 140l/min (ANR) Existing IRV2000: 100 l/min (ANR) Existing IRV1000: 60 l/min (ANR) Standard connections Series IRV10 Series IRV20 Series IRV10/20 CAT.ES60-20B

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CRA1 CRQ2 MSQ MRQ Adjustment bolt DA port 20B port 2-M3 x 0.5 (Port location: Side ported type only) 24 1 60 (69) 2 D-97/93A 30 1 If the adjustment bolt is removed, rotation will be approximately 270 for the single vane type and 100 for the double vane

Air Slide Table

.) * Dimensions other than those listed above are the same as those for the standard type. 64 MXQB Series Dimensions: MXQ 20B [Standard] MXQ 20B-Z Standard type *1 If long bolts are used, they may touch the guide block and cause a malfunction, etc. Use a screw which has an intermediate length between the maximum screw-in depth and minimum screw-in depth.

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

Note 2) For details on PC wiring system, refer to PC Wiring System catalog (CAT.ES02-20B). 5 6 9 SOL.a () (+) 7 SOL.b () (+) Station 8 3 4 5 4 Note) This circuits are for the specifications with up to 4 stations of 2 position double, 3 position and 4 position dual 3 port valve.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

MY1MW16/20 MX B A MTS Reed Switch Solid State Switch D-A90(V), D-A93(V), D-A96(V) (mm) D-M9N(V), D-M9P(V), D-M9B(V) D-F9NW(V), D-F9PW(V), D-F9BW(V) MY 16 20 Mounting position 16 20 Mounting position Mounting position 16 20 93 94 A A A 73 74 70 90 CY 107 106 B B B 87 86 90 110 6.5 7 8.5 6.5 Operating range Note) Operating range Note) Operating range Note) 11 7.5 MG CX MY1MW25/32/40/50/63 D-X 20B

RSQ

QA F Q QB QU QW DBore size (mm) QW QU 29 " 32 40 50 13 13 16 38 42 50 20 24.5 26 7.5 8 9.5 6 6 8 60.5 68 82 -X 20 32 to 50 20B 41.5 45 48 52.5 54 D 10 12 20 25 25 E 29 36 45 52 64 F 6 8 7.5 8 8 G 3 4 8 10 10 H 26.5 33 39 53 53 I 60 69 86 J 4.5 5 7 L 2 2 3 4 4 M 28 36 34 40 50 N 3.5 5.5 5.5 5.5 6.6 O counterbore P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 Q 17 20 20 24.5 24.5 S 8 10 18 24

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2-J CX E DB A C D -X (mm) 20B A 53 77 112 160 C 15 35 45 55 D 26 50 64 80 E 4.9 8 11.7 14.8 F 3 5 6 8.5 G 6.5 9.5 11 14 H 3.4 5.5 6.6 9 J M4 x 0.7 M6 x 1 M8 x 1.25 M10 x 1.5 Model Applicable cylinder MY3A16, MY3B16 MY3A25, MY3B25 MY3A40, MY3B40 MY3A63

Modular F.R.L. Unit

Unit AC10B to 60B Dimensions A AC10B, 20B Pressure gauge port size F P E K Q N B C G G OUT IN T T K H Pressure gauge (Option) J L Square embedded type pressure gauge (Option) Port size M Min. clearance for maintenance Regulator Air filter Drain D AC25B, 30B, 40B, 50B, 55B, 60B A Pressure gauge port size F P E K N Q G G B C IN OUT K Pressure gauge (Option) J L Square embedded type pressure

Table of Contents

Table (3) Guide block L3 L3 End face L3 (mm) 19 15 15 15 15 15 Model MXP10-10B MXP10-20B MXP12-15B MXP12-25B MXP16-20B MXP16-30B Tightening torque (Nm) Model MXP10 MXP12 MXP16 1.67 8-8-5 5 Series MXP Model Selection Model Selection Step Formula/Data Selection Example Operating Conditions 1 Enumerate the operating conditions considering the mounting position and workpiece configuration.

7.5

Note 2) For details on PC wiring system, refer to PC Wiring System catalog (CAT.ES02-20B). 5 6 9 SOL.a () (+) 7 SOL.b () (+) Station 8 3 4 5 4 Note) This circuits are for the specifications with up to 4 stations of 2 position double, 3 position and 4 position dual 3 port valve.

Table of Contents

Contacts/Bulb gland Pressure Source Nil W Nil B C 1a1b (Standard) 2ab Contact Warning Enclosure Type A 20a (Standard) Type A 20b Type A 20c Bulb gland 1.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com F S + Stroke F CX ZZ + Stroke D-X H 20B E G Mounting nut Data NN NA F N CY3B15 (mm) B 35 36 46 60 70 NA 17 24 30 36 46 R 28 34 40 50 S 83 106 111 124 150 W 35 50 50 50 60 X 19 25 30 40 40 D 16.6 21.6 26.4 33.6 41.6 ZZ 103 132 137 156 182 E 3 2 2 2 3

Modular F.R.L. Unit

Unit AC10B to 60B Dimensions A AC10B, 20B Pressure gauge port size F P E K Q N B C G G OUT IN T T K H Pressure gauge (accessory) J L Square embedded type pressure gauge (accessory) Port size M Min. clearance for maintenance Regulator Air filter Drain D AC25B, 30B, 40B, 50B, 55B, 60B A Pressure gauge port size F P E K Q N G G B C IN OUT K Pressure gauge (accessory) J L Square embedded type