min): 0.2 to 10 (5), Accessory: None, Option: None, Analog Current Output(mA): 4 to 20

Type: [Flow Switches] Flow Switch, Fluid Type: Air / Nitrogen Gas / Carbonic Acid Gas / Argon, Flow Range(l/min): 10～Less than 50, Sensor, Monitor Structure: [Separate Type Connector Connection] Separated sensor, Output Method: Analog, Analog Output Specification: Current, Pipe Port Type: Female Thread, Plumbing Thread Type: [G] G, Plumbing Thread Nominal: [1/8] 1/8, Pressure Resistance(MPa

min): 0.2 to 10 (5), Accessory: None, Option: None, Analog Current Output(mA): None

Type: [Flow Switches] Flow Switch, Fluid Type: Air / Nitrogen Gas / Carbonic Acid Gas / Argon, Flow Range(l/min): 10～Less than 50, Sensor, Monitor Structure: [Separate Type Connector Connection] Separated sensor, Output Method: Analog, Analog Output Specification: Voltage, Pipe Port Type: Female Thread, Plumbing Thread Type: [NPT] NPT, Plumbing Thread Nominal: [1/8] 1/8, Pressure Resistance

Type: [Flow Switches] Flow Switch, Fluid Type: Air / Nitrogen Gas / Carbonic Acid Gas / Argon, Flow Range(l/min): 10～Less than 50, Sensor, Monitor Structure: [Separate Type Connector Connection] Separated sensor, Output Method: Analog, Analog Output Specification: Voltage, Pipe Port Type: Female Thread, Plumbing Thread Type: [NPT] NPT, Plumbing Thread Nominal: [1/8] 1/8, Pressure Resistance

min): 0.2 to 10 (5), Accessory: None, Option: None, Analog Current Output(mA): 4 to 20

Type: [Flow Switches] Flow Switch, Fluid Type: Air / Nitrogen Gas / Carbonic Acid Gas / Argon, Flow Range(l/min): 10～Less than 50, Sensor, Monitor Structure: [Separate Type Connector Connection] Separated sensor, Output Method: Analog, Analog Output Specification: Current, Pipe Port Type: Female Thread, Plumbing Thread Type: [NPT] NPT, Plumbing Thread Nominal: [1/8] 1/8, Pressure Resistance

Series

(Type 20 manifold) 10 23 5 M 1 M3 SYJ3 Body ported Base mounted (4 port) 2 10 SYJ3 33 5 M (Manifold use only) Base mounted (5 port) SYJ3 43 M 2 5 10 Clean series 4 port Port size Coil specifications Manual override Nil Standard With power saving circuit <24, 12 VDC only> Nil: Non-locking push type Nil: Without sub-plate T Power saving circuit is not available in the case of "W" type.

Exhaust Cleaner Series AMC

Max. air flow (l/min(ANR)) Port size Weight (kg) Element model no. Bracket model no. ANR: 20C atmospheric pressure, relative humidity 65% 200 300 , 0.2 AMC-EL3 BE30 1,000 1 4 3 8 1 4 , 3 4 1 2 0.12 AMC-EL2 BE20 0.5 AMC-EL5 BE50 5-10-11

8

In the case of Fig. (3), ripple 10% means V' V" V'/V x 100 = 10% When no pulsation has occurred, ripple is 0%. V ZSE ISE Vacuum breaking pressure Positive pressure added for releasing the work or quickly returning to atmospheric pressure after breaking the vacuum condition. V' V" PSE V Vibration resistance The amount of vibration a device can withstand without damage.

lPSMt

" to 28'(10-85mm) (0.3" to 3.4" std.)5.9" max.)

lPSMt

" to 28'(10-85mm) (0.3" to 3.4" std.)5.9" max.)

Air Cylinder NCM Series Stainless Steel Cylinders

-r I tt""d lii9;--1@_*_1aru" l . 6 l y ' | t Fiif_ilri v *r T f l l T r I L---+---J-J--fo O Series NCM Auto Switeh Mounting Position aAuto $vidr Placemer* dr|lsidrs D-85, 86 Type Front Nose Mounting type Auto switch Auta Swifuh Pkrcement Dfinensions 0.97 1.03 1 . 1 2 1.22 1.35 '( ) are for Front Nos Mounting type cylinders.

Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: None, Thread: Rc, Port Size: 10 (1), Output Specification: G (OUT1: NPN; OUT2: External Input), Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C)

Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 10 (1), Output Specification: C (OUT1: NPN; OUT2: Analog 1 to 5V), Temperature Sensor: None, Lead Wire: N (w/o Lead Wire w/M8 Connector), Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C), Bracket: R (Bracket)

10-cl1-e

Cushion seal L Guide gasket M Piston gasket Replacement Parts: Lock-up Unit K, L and M are non-replaceable parts, so they are not included in the seal kit. CL 40 TN Port thread type Bore size (mm) Nil Rc NPT G TN TF Consult with SMC when replacing the lock-up unit with a bore size of 125 to 160. 154

Digital Pressure Switch (Built-in Regulator Type) ISE35 Series ®

Note 2) Fixed unit: MPa L Applicable series Product series that this product can be installed in.

m or more: 3.5 particles/L [ANR] or lessHeater operation, PID controlR134a/0.14 kg52 dB(A)57 lbs (26 kg)10 mmBody panel: White 1 Base: Gray 2Low Voltage Directive: 2006/95/EC EMC Directive: 2004/108/EC

m or more: 3.5 particles/L [ANR] or lessHeater operation, PID controlR134a/0.26 kg55 dB(A)81.6 lbs (37 kg)10 mmBody panel: White 1 Base: Gray 2Low Voltage Directive: 2006/95/EC EMC Directive: 2004/108/EC

s (3cP) or lessKarman vortex4 to 40 l/min0 to 0.6 MPa0.9 MPa0 to 90C?2.5% F.S. or less (at 25C water)?1% F.S. or less (at 25C water)?5% F.S. or less (0 to 50C, based on 25C)Pulse output, N channel, open drain, output for display unit PF2D 300/301(Specifications: Maximum load current of 10 mA; Maximum applied voltage of 30 V)Voltage output Note 5) 1 to 5 VLinearity: ?